公开(公告)号：US11099486B2

公开(公告)日：2021-08-24

申请号：US16477619

申请日：2017-12-13

申请人： ASML NETHERLANDS B.V.

发明人： Alexander Ypma ,  Dimitra Gkorou ,  Georgios Tsirogiannis ,  Thomas Leo Maria Hoogenboom ,  Richard Johannes Franciscus Van Haren

IPC分类号： G03F7/20 ,  G05B19/418 ,  H01L21/66

摘要： A technique to generate predicted data for control or monitoring of a production process to improve a parameter of interest. Context data associated with operation of the production process is obtained. Metrology/testing is performed on the product of the production process, thereby obtaining performance data. A context-to-performance model is provided to generate predicted performance data based on labeling of the context data with performance data. This is an instance of semi-supervised learning. The context-to-performance model may include the learner that performs semi-supervised labeling. The context-to-performance model is modified using prediction information related to quality of the context data and/or performance data. Prediction information may include relevance information relating to relevance of the obtained context data and/or obtained performance data to the parameter of interest. The prediction information may include model uncertainty information relating to uncertainty of the predicted performance data.

公开(公告)号：US11687007B2

公开(公告)日：2023-06-27

申请号：US17423325

申请日：2020-01-09

申请人： ASML NETHERLANDS B.V.

发明人： Arnaud Hubaux ,  Johan Franciscus Maria Beckers ,  Dylan John David Davies ,  Johan Gertrudis Cornelis Kunnen ,  Willem Richard Pongers ,  Ajinkya Ravindra Daware ,  Chung-Hsun Li ,  Georgios Tsirogiannis ,  Hendrik Cornelis Anton Borger ,  Frederik Eduard De Jong ,  Juan Manuel Gonzalez Huesca ,  Andriy Hlod ,  Maxim Pisarenco

IPC分类号： G03F1/70 ,  G03F7/30 ,  G03F7/00 ,  G06F30/392

CPC分类号： G03F7/70508 ,  G03F1/70 ,  G03F7/70616 ,  G06F30/392 ,  G05B2219/45028 ,  G05B2219/45031

摘要： A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.

公开(公告)号：US11150562B2

公开(公告)日：2021-10-19

申请号：US16486859

申请日：2018-02-22

申请人： ASML NETHERLANDS B.V.

发明人： Jelle Nije ,  Alexander Ypma ,  Dimitra Gkorou ,  Georgios Tsirogiannis ,  Robert Jan Van Wijk ,  Tzu-Chao Chen ,  Frans Reinier Spiering ,  Sarathi Roy ,  Cédric Désiré Grouwstra

IPC分类号： G03F7/20

摘要： A method of optimizing an apparatus for multi-stage processing of product units such as wafers, the method includes: receiving object data representing one or more parameters measured across the product units and associated with different stages of processing of the product units; and determining fingerprints of variation of the object data across the product units, the fingerprints being associated with different respective stages of processing of the product units. The fingerprints may be determined by decomposing the object data into components using principal component analysis for each different respective stage; analyzing commonality of the fingerprints through the different stages to produce commonality results; and optimizing an apparatus for processing product units based on the commonality results.

公开(公告)号：US11774869B2

公开(公告)日：2023-10-03

申请号：US17599302

申请日：2020-01-17

申请人： ASML NETHERLANDS B.V.

发明人： Ruud Hendrikus Martinus Johannes Bloks ,  Hendrik Cornelis Anton Borger ,  Frederik Eduard De Jong ,  Johan Gertrudis Cornelis Kunnen ,  Siebe Landheer ,  Chung-Hsun Li ,  Patricius Jacobus Neefs ,  Georgios Tsirogiannis ,  Si-Han Zeng

IPC分类号： G03F7/20 ,  G03F7/00

CPC分类号： G03F7/70875 ,  G03F7/7085 ,  G03F7/70633

摘要： A method of determining an overlay value of a substrate, the method including: obtaining temperature data that includes data on measured temperature at one or more positions on a substrate table after a substrate has been loaded onto the substrate table; and determining an overlay value of the substrate in dependence on the obtained temperature data. There is further disclosed a method of determining a performance of a clamping by a substrate table using a determined overlay value.

公开(公告)号：US11520238B2

公开(公告)日：2022-12-06

申请号：US17479078

申请日：2021-09-20

申请人： ASML NETHERLANDS B.V.

发明人： Jelle Nije ,  Alexander Ypma ,  Dimitra Gkorou ,  Georgios Tsirogiannis ,  Robert Jan Van Wijk ,  Tzu-Chao Chen ,  Frans Reinier Spiering ,  Sarathi Roy ,  Cédric Désiré Grouwstra

IPC分类号： G03F7/20

摘要： A method of optimizing an apparatus for multi-stage processing of product units such as wafers, the method includes: receiving object data representing one or more parameters measured across the product units and associated with different stages of processing of the product units; and determining fingerprints of variation of the object data across the product units, the fingerprints being associated with different respective stages of processing of the product units. The fingerprints may be determined by decomposing the object data into components using principal component analysis for each different respective stage; analyzing commonality of the fingerprints through the different stages to produce commonality results; and optimizing an apparatus for processing product units based on the commonality results.

公开(公告)号：US20230333482A1

公开(公告)日：2023-10-19

申请号：US18212334

申请日：2023-06-21

申请人： ASML NETHERLANDS B.V.

发明人： Arnaud HUBAUX ,  Johan Franciscus Maria Beckers ,  Dylan John David Davies ,  Johan Gertrudis Cornelis Kunnen ,  Willem Richard Pongers ,  Ajinkya Ravindra Daware ,  Chung-Hsun Li ,  Georgios Tsirogiannis ,  Hendrik Cornelis Anton Borger ,  Frederik Eduard De Jong ,  Juan Manuel Gonzalez Huesca ,  Andriy Hlod ,  Maxim Pisarenco

IPC分类号： G03F7/20 ,  G06F30/392 ,  G03F1/70

CPC分类号： G03F7/70508 ,  G06F30/392 ,  G03F1/70 ,  G03F7/70616 ,  G05B2219/45028 ,  G05B2219/45031

摘要： A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.

公开(公告)号：US11099485B2

公开(公告)日：2021-08-24

申请号：US16493326

申请日：2018-04-09

申请人： ASML NETHERLANDS B.V.

发明人： Alexander Ypma ,  Vahid Bastani ,  Dag Sonntag ,  Jelle Nije ,  Hakki Ergün Cekli ,  Georgios Tsirogiannis ,  Robert Jan Van Wijk

IPC分类号： G03F7/20 ,  G03F9/00

摘要： A method of maintaining a set of fingerprints representing variation of one or more process parameters across wafers subjected to a device manufacturing method, the method including: receiving measurement data of one or more parameters measured on wafers; updating the set of fingerprints based on an expected evolution of the one or more process parameters; and evaluation of the updated set of fingerprints based on decomposition of the received measurement data in terms of the updated set of fingerprints. Each fingerprint may have a stored likelihood of occurrence, and the decomposition may involve: estimating, based the received measurement data, likelihoods of occurrence of the set of fingerprints in the received measurement data; and updating the stored likelihoods of occurrence based on the estimated likelihoods.