公开(公告)号：US20020180946A1

公开(公告)日：2002-12-05

申请号：US10196712

申请日：2002-07-17

Applicant: ASML Netherlands B.V.

Inventor： Theodorus H.J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M.J.R. Soemers ,  Johannes C. Driessen ,  Michael J.M. Renkens ,  Adrianus G. Bouwer

IPC: G03B027/58

CPC classification number: G03F7/70766 ,  G03F7/70716 ,  G03F7/70758 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/70991

Abstract: A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

Abstract translation: 通过在真空室壁中的孔上提供滑动密封将长行程运动馈送到真空室中。 要移动的物体（其可以是光刻设备中的掩模或晶片台）在真空室内连接或安装在滑动密封件上并通过滑动密封的移动而移动。 滑动密封件可以是板，碗或镶嵌板的迷宫。

公开(公告)号：US20040094722A1

公开(公告)日：2004-05-20

申请号：US10613094

申请日：2003-07-07

Applicant: ASML NETHERLANDS B.V.

Inventor： Theodorus H.J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M.J.R. Soemers ,  Johannes C. Driessen ,  Michael J.M. Renkens ,  Adrianus G. Bouwer

IPC: G21K001/08 ,  H01J003/14 ,  H01J003/26 ,  H01J049/42 ,  G21G005/00 ,  G03B027/54 ,  G03B027/60 ,  G03B027/62 ,  G03B027/64

CPC classification number: F16C29/025 ,  F16C32/0614 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70716 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841

Abstract: A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing

Abstract translation: 用于真空室的轴承包括将加压气体排放到两个构件之间的间隙中的气体轴承，以在这些构件之间保持预定的间隔。 为了避免形成气体轴承的气体是真空室中的不可接受的泄漏，在真空室和气体轴承之间提供真空泵