公开(公告)号：US20020180946A1

公开(公告)日：2002-12-05

申请号：US10196712

申请日：2002-07-17

Applicant: ASML Netherlands B.V.

Inventor： Theodorus H.J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M.J.R. Soemers ,  Johannes C. Driessen ,  Michael J.M. Renkens ,  Adrianus G. Bouwer

IPC: G03B027/58

CPC classification number: G03F7/70766 ,  G03F7/70716 ,  G03F7/70758 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/70991

Abstract: A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

Abstract translation: 通过在真空室壁中的孔上提供滑动密封将长行程运动馈送到真空室中。 要移动的物体（其可以是光刻设备中的掩模或晶片台）在真空室内连接或安装在滑动密封件上并通过滑动密封的移动而移动。 滑动密封件可以是板，碗或镶嵌板的迷宫。

公开(公告)号：US20040094722A1

公开(公告)日：2004-05-20

申请号：US10613094

申请日：2003-07-07

Applicant: ASML NETHERLANDS B.V.

Inventor： Theodorus H.J. Bisschops ,  Jakob Vijfvinkel ,  Hermanus M.J.R. Soemers ,  Johannes C. Driessen ,  Michael J.M. Renkens ,  Adrianus G. Bouwer

IPC: G21K001/08 ,  H01J003/14 ,  H01J003/26 ,  H01J049/42 ,  G21G005/00 ,  G03B027/54 ,  G03B027/60 ,  G03B027/62 ,  G03B027/64

CPC classification number: F16C29/025 ,  F16C32/0614 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70716 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841

Abstract: A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing

Abstract translation: 用于真空室的轴承包括将加压气体排放到两个构件之间的间隙中的气体轴承，以在这些构件之间保持预定的间隔。 为了避免形成气体轴承的气体是真空室中的不可接受的泄漏，在真空室和气体轴承之间提供真空泵

公开(公告)号：US20040184014A1

公开(公告)日：2004-09-23

申请号：US10743265

申请日：2003-12-23

Applicant: ASML NETHERLANDS B.V.

Inventor： Levinus Pieter Bakker ,  Marcel Mathijs Theodore Marie Dierichs ,  Johannes Maria Freriks ,  Frank Jeroen Pieter Schuurmans ,  Jakob Vijfvinkel ,  Wilhelmus Josephus Box

IPC: G03F007/20 ,  G03B027/52

CPC classification number: B82Y10/00 ,  G03F7/70166 ,  G03F7/70916

Abstract: A contamination barrier that passes through radiation from a radiation source and captures debris coming from the radiation source is disclosed. The contamination barrier includes an inner ring, an outer ring, and a plurality of lamellas. The lamellas extend in a radial direction from a main axis, and each of the lamellas is positioned in a respective plane that include the main axis. At least one outer end of each of the lamellas is slidably connected to at least one of the inner and outer ring.

Abstract translation: 公开了一种通过来自辐射源的辐射并捕获来自辐射源的碎片的污染屏障。 污染屏障包括内环，外环和多个薄片。 薄片从主轴沿径向方向延伸，并且每个薄片位于包括主轴线的相应平面中。 每个薄片的至少一个外端可滑动地连接到内圈和外圈中的至少一个。

公开(公告)号：US20040001188A1

公开(公告)日：2004-01-01

申请号：US10607545

申请日：2003-06-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Eric W.A. Janssen ,  Marcel J.M. Renkens ,  Jakob Vijfvinkel ,  Ronald M. Schneider ,  Theo H.J. Bisschops ,  Rob Tabor

IPC: G03B027/52

CPC classification number: F16C29/025 ,  F16C32/0603 ,  F16C33/748 ,  F16C2300/62 ,  F16F15/0275 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/709

Abstract: A lithographic projection apparatus comprises a vacuum chamber having a wall enclosing at least one of first and second object tables, the or each object table within the vacuum chamber being connected to positioning means for positioning the object table with respect to a projection system of the apparatus. The positioning means is provided with a pneumatic gravity compensator comprising a piston associated with the object table; a gas-filled pressure chamber, the gas in the pressure chamber acting on the movable member to at least partially counteract the weight of the object table; a gas bearing; and evacuating means for evacuating gas escaping through a gap between the movable member and a bearing surface of a cylindrical housing towards the vacuum chamber. A partially flexible rod connects the piston to the object table.

Abstract translation: 平版印刷投影装置包括真空室，该真空室具有包围第一和第二目标表中的至少一个的真空室，真空室内的每个物体台被连接到用于相对于设备的投影系统定位物体台的定位装置 。 定位装置设置有气动重力补偿器，该气动重力补偿器包括与对象台相关联的活塞; 充气压力室，压力室中的气体作用在可移动构件上，以至少部分地抵消物体台的重量; 气体轴承; 以及用于将通过可动构件和圆柱形壳体的支承表面之间的间隙排出的气体排出到真空室的抽空装置。 部分柔性杆将活塞连接到物体台。