公开(公告)号：US11372338B2

公开(公告)日：2022-06-28

申请号：US16979056

申请日：2019-02-13

申请人： ASML NETHERLANDS B.V.

发明人： Ivo Matteo Leonardus Weijden ,  Jeroen Van Dongen ,  Cornelis Johannes Henricus Lambregts ,  Theo Wilhelmus Maria Thijssen ,  Ruud Rudolphus Johannes Catharinus De Wit ,  Hans Marinus Struijs ,  Erik Mathijs Maria Crombag ,  Roy Werkman ,  Maria Helena Schut ,  Erwin Riemens ,  Menno Meeldijk

IPC分类号： G03F7/20 ,  G01N21/95 ,  G03F9/00 ,  H01L21/66

摘要： A method for determining a preferred control strategy relating to control of a manufacturing process for manufacturing an integrated circuit. The method includes: obtaining process data associated with a design of said integrated circuit; and obtaining a plurality of candidate control strategies configured to control the manufacturing process based on the process data, each candidate control strategy including an associated cost metric based on an associated requirement to implement the candidate control strategy. A quality metric related to an expected performance of the manufacturing process is determined for each candidate control strategies, and a preferred control strategy is selected based on the determined quality metrics and associated cost metrics for each candidate control strategy.