公开(公告)号：US11942304B2

公开(公告)日：2024-03-26

申请号：US17856848

申请日：2022-07-01

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai

IPC: H01J37/244 ,  H01L27/146

CPC classification number: H01J37/244 ,  H01L27/14603 ,  H01L27/14609 ,  H01J2237/2446

Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element, and a switching region therebetween configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.

公开(公告)号：US11508547B2

公开(公告)日：2022-11-22

申请号：US16435145

申请日：2019-06-07

Applicant: ASML Netherlands B.V.

Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai ,  Kenichi Kanai

IPC: H01J37/244 ,  G01T1/24 ,  H01J37/28 ,  H01J37/285 ,  H01L31/08

Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.

公开(公告)号：US12030772B2

公开(公告)日：2024-07-09

申请号：US16841044

申请日：2020-04-06

Applicant: ASML Netherlands B.V.

Inventor： Yongxin Wang ,  Rui-Ling Lai ,  Qian Zhang

IPC: B81B7/00 ,  B81B3/00

CPC classification number: B81B3/004 ,  B81B3/0083 ,  B81B7/008 ,  B81B2201/047

Abstract: The present disclosure describes an image forming element having a semiconductor chip with micro-electro-mechanical-system (MEMS) devices and voltage generators, each voltage generator being configured to generate a voltage used by one or more of the MEMS devices. A floating ground may be used to add a voltage to the voltage generated by the voltage generators. The semiconductor chip may include electrical connections, where each voltage generator is configured to provide the voltage to the one or more MEMS devices through the electrical connections. The MEMS devices may define a boundary in the semiconductor chip within which the MEMS devices, the voltage generators, and the electrical connections are located. Each MEMS device may generate an electrostatic field to manipulate an electron beamlet of a multi-beam charged particle microscope. The MEMS devices may be organized into groups based on a distance to a reference location (e.g., optical axis) in the semiconductor chip.

公开(公告)号：US11862427B2

公开(公告)日：2024-01-02

申请号：US17944121

申请日：2022-09-13

Applicant: ASML Netherlands B.V.

Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai

IPC: H01J37/244 ,  H01L27/146

CPC classification number: H01J37/244 ,  H01L27/14609

Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.

公开(公告)号：US11430629B2

公开(公告)日：2022-08-30

申请号：US16648288

申请日：2018-09-14

Applicant: ASML Netherlands B.V.

Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai

IPC: H01J37/244 ,  H01L27/146

Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.

公开(公告)号：US12230470B2

公开(公告)日：2025-02-18

申请号：US16800946

申请日：2020-02-25

Applicant: ASML Netherlands B.V.

Inventor： Yongxin Wang ,  Rui-Ling Lai

IPC: H01J37/244 ,  H01L27/144 ,  H01L27/146 ,  H01L31/115 ,  H01L31/18

Abstract: A detector may be provided with a sensing element or an array of sensing elements, each of the sensing elements may have a corresponding gain element. A substrate may be provided having a sensing element and a gain element integrated together. The gain element may include a section in which, along a direction perpendicular to an incidence direction of an electron beam, a region of first conductivity is provided adjacent to a region of second conductivity, and a region of third conductivity may be provided adjacent to the region of second conductivity. The sensing element may include a section in which, along the incidence direction, a region of fourth conductivity is provided adjacent to an intrinsic region of the substrate, and the region of second conductivity may be provided adjacent to the intrinsic region.

公开(公告)号：US12205792B2

公开(公告)日：2025-01-21

申请号：US17970469

申请日：2022-10-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai ,  Kenichi Kanai

IPC: H01J37/244 ,  G01T1/24 ,  H01J37/28 ,  H01J37/285 ,  H01L31/08

Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.

公开(公告)号：US11476085B2

公开(公告)日：2022-10-18

申请号：US16648385

申请日：2018-09-14

Applicant: ASML Netherlands B.V.

Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai

IPC: G01J1/00 ,  H01J37/244 ,  H01L27/146

Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.