公开(公告)号：US11201032B2

公开(公告)日：2021-12-14

申请号：US17022504

申请日：2020-09-16

申请人： ASML NETHERLANDS B.V.

发明人： Juying Dou ,  Zheng Fan ,  Tzu-Yi Kuo ,  Zhongwei Chen

IPC分类号： H01J37/073 ,  H01J9/04 ,  H01J37/065 ,  H01J1/304 ,  H01J1/14 ,  H01J9/02 ,  H01J37/26

摘要： Electron emitters and method of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

公开(公告)号：US11688579B2

公开(公告)日：2023-06-27

申请号：US17549854

申请日：2021-12-13

申请人： ASML Netherlands B.V.

发明人： Juying Dou ,  Zheng Fan ,  Tzu-Yi Kuo ,  Zhong-wei Chen

IPC分类号： H01J37/073 ,  H01J37/065 ,  H01J1/304 ,  H01J1/14 ,  H01J9/02 ,  H01J9/04 ,  H01J37/26

CPC分类号： H01J37/073 ,  H01J1/14 ,  H01J1/304 ,  H01J9/025 ,  H01J9/042 ,  H01J37/065 ,  H01J37/26 ,  H01J2201/196 ,  H01J2201/30403 ,  H01J2201/30426 ,  H01J2201/30449 ,  H01J2201/30484 ,  H01J2201/30492 ,  H01J2209/0223 ,  H01J2237/06308 ,  H01J2237/06316 ,  H01J2237/06341

摘要： Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

公开(公告)号：US20210142975A1

公开(公告)日：2021-05-13

申请号：US17022504

申请日：2020-09-16

申请人： ASML NETHERLANDS B.V.

发明人： Juying Dou ,  Zheng Fan ,  Tzu-Yi Kuo ,  Zhongwei Chen

IPC分类号： H01J37/073 ,  H01J37/065 ,  H01J1/304 ,  H01J1/14 ,  H01J9/02 ,  H01J9/04

摘要： Electron emitters and method of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

公开(公告)号：US10784071B2

公开(公告)日：2020-09-22

申请号：US16324518

申请日：2017-07-31

申请人： ASML Netherlands B.V.

发明人： Juying Dou ,  Zheng Fan ,  Tzu-Yi Kuo ,  Zhongwei Chen

IPC分类号： H01J37/073 ,  H01J9/04 ,  H01J37/065 ,  H01J1/304 ,  H01J1/14 ,  H01J9/02 ,  H01J37/26

摘要： Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.