公开(公告)号：US11003095B2

公开(公告)日：2021-05-11

申请号：US16332002

申请日：2017-08-31

申请人： ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

发明人： Krijn Frederik Bustraan ,  Yang-Shan Huang ,  Antonius Franciscus Johannes De Groot ,  Minkyu Kim ,  Jasper Anne Frido Marikus Simons ,  Theo Anjes Maria Ruijl ,  Ronald Josephus Maria Lamers

IPC分类号： G03F7/20

摘要： A positioning system for positioning an object. The positioning system includes a stage, a balance mass and an actuator system. The stage is for holding the object. The actuator system is arranged to drive the stage in a first direction while driving the balance mass in a second direction opposite to the first direction. The stage is moveable in the first direction in a movement range. When the stage is moving in the first direction and is at an end of the movement range, the positioning system is arranged to collide the stage frontally into the balance mass.

公开(公告)号：US09897926B2

公开(公告)日：2018-02-20

申请号：US15115876

申请日：2015-01-20

申请人： ASML Netherlands B.V.

发明人： Wilhelmus Henricus Theodorus Maria Aangenent ,  Lucas Franciscus Koorneef ,  Theo Anjes Maria Ruijl ,  Stanley Constant Johannes Martinus Van Den Berg ,  Stan Henricus Van Der Meulen ,  Jan Van Eijk ,  Pieter Hubertus Godefrida Wullms ,  Richard Henricus Adrianus Van Lieshout

IPC分类号： B64C17/06 ,  F16M7/00 ,  G03B27/58 ,  G03B27/62 ,  H02K41/02 ,  G03F7/20 ,  H01L21/68

CPC分类号： G03F7/70716 ,  G03F7/70758 ,  G03F7/709 ,  H01L21/68

摘要： A stage positioning system, includes a first body, a second body and a coupling arranged to couple the first body and the second body to each other. The coupling includes a visco-elastic element arranged to couple the first body and the second body to each other. The stage positioning system may further include a sensor to provide a signal representative of a position of the first body. The stage positioning system may further include an actuator to move the first body. The second body may be arranged to couple the actuator and the coupling to each other.

公开(公告)号：US10228626B2

公开(公告)日：2019-03-12

申请号：US15736297

申请日：2016-04-28

申请人： ASML Netherlands B.V.

发明人： Antonius Franciscus Johannes De Groot ,  Theo Anjes Maria Ruijl ,  Christiaan Louis Valentin ,  Christian Werner

IPC分类号： G03F7/20 ,  G03B27/58 ,  H01L21/027 ,  H01L21/68

摘要： A movable support configured to support an object, the support including: a support plane to support the object, an actuator assembly to move the movable support in a first direction and in a second direction perpendicular to the first direction, wherein the first direction and the second direction extend in a plane parallel to the support plane, wherein the actuator assembly includes: a first actuator configured to exert a first actuation force in a first actuation direction, the first actuation direction being parallel to the support plane, a second actuator configured to exert a second actuation force in a second actuation direction, the second actuation direction being parallel to the support plane, wherein the first actuation direction and the second actuation direction are arranged non-parallel and non-perpendicular with respect to each other.