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公开(公告)号：US09209595B2
公开(公告)日：2015-12-08
申请号：US14593278
申请日：2015-01-09
Applicant: ASML Netherlands B.V.
Inventor： Kevin Zhang , Christo Liebenberg , Alexander Schafgans
CPC classification number: H01S3/227 , H01S3/036 , H01S3/104 , H01S3/134 , H01S3/2232 , H01S3/2316 , H05G2/008
Abstract: An extreme ultraviolet light system includes an optical amplifier system and a catalytic conversion system. Each optical amplifier of the optical amplifier system includes a gain medium in the form of a gas mixture that produces an amplified light beam. The optical amplifier system includes a fluid input and a fluid output through which the gas mixture flows. The catalytic conversion system is fluidly connected to the fluid output of the optical amplifier system and to the fluid input of the optical amplifier system. The catalytic conversion system includes a catalytic converter that includes a housing; a substrate within the housing including openings through which the gas mixture can flow; and a catalyst applied as a coating to the interior surfaces of the openings of the substrate, the catalyst including particles of metal. The particles of metal can be nanoparticles of precious metal.
Abstract translation: 极紫外光系统包括光放大器系统和催化转化系统。 光放大器系统的每个光放大器包括产生放大光束的气体混合物形式的增益介质。 光放大器系统包括流体输入和气体混合物流过的流体输出。 催化转化系统流体地连接到光放大器系统的流体输出和光放大器系统的流体输入。 催化转化系统包括催化转化器，其包括壳体; 壳体内的衬底包括开口，气体混合物可通过该开口流动; 以及作为涂层施加到衬底的开口的内表面的催化剂，所述催化剂包括金属颗粒。 金属颗粒可以是贵金属的纳米颗粒。
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公开(公告)号：US20150222083A1
公开(公告)日：2015-08-06
申请号：US14593278
申请日：2015-01-09
Applicant: ASML Netherlands B.V.
Inventor： Kevin Zhang , Christo Liebenberg , Alexander Schafgans
IPC: H01S3/227
CPC classification number: H01S3/227 , H01S3/036 , H01S3/104 , H01S3/134 , H01S3/2232 , H01S3/2316 , H05G2/008
Abstract: An extreme ultraviolet light system includes an optical amplifier system and a catalytic conversion system. Each optical amplifier of the optical amplifier system includes a gain medium in the form of a gas mixture that produces an amplified light beam. The optical amplifier system includes a fluid input and a fluid output through which the gas mixture flows. The catalytic conversion system is fluidly connected to the fluid output of the optical amplifier system and to the fluid input of the optical amplifier system. The catalytic conversion system includes a catalytic converter that includes a housing; a substrate within the housing including openings through which the gas mixture can flow; and a catalyst applied as a coating to the interior surfaces of the openings of the substrate, the catalyst including particles of metal. The particles of metal can be nanoparticles of precious metal.
Abstract translation: 极紫外光系统包括光放大器系统和催化转化系统。 光放大器系统的每个光放大器包括产生放大光束的气体混合物形式的增益介质。 光放大器系统包括流体输入和气体混合物流过的流体输出。 催化转化系统流体地连接到光放大器系统的流体输出和光放大器系统的流体输入。 催化转化系统包括催化转化器，其包括壳体; 壳体内的衬底包括开口，气体混合物可通过该开口流动; 以及作为涂层施加到衬底的开口的内表面的催化剂，所述催化剂包括金属颗粒。 金属颗粒可以是贵金属的纳米颗粒。
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公开(公告)号：US09927292B2
公开(公告)日：2018-03-27
申请号：US14694635
申请日：2015-04-23
Applicant: ASML Netherlands B.V.
Inventor： Christo Liebenberg
CPC classification number: G01J1/4257 , B23K26/043 , G01J1/429 , G03F7/70258
Abstract: A system includes a plurality of sensors at distinct and separate locations, each of the distinct and separate locations being equidistant from a region that is configured to pass light that propagates along a beam path, the sensors being configured to sense radiation from an optical element positioned to interact with light that propagates on the beam path; and a controller including one or more electronic processors and a computer-readable medium, the computer-readable medium including instructions that, when executed, cause the one or more electronic processors to receive an output from each of the sensors, the output of each sensor including an indication of an intensity of the radiation detected by the sensor, and analyze the received output to determine a position of the light that propagates along the beam path.
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公开(公告)号：US20160313179A1
公开(公告)日：2016-10-27
申请号：US14694635
申请日：2015-04-23
Applicant: ASML Netherlands B.V.
Inventor： Christo Liebenberg
CPC classification number: G01J1/4257 , B23K26/043 , G01J1/429 , G03F7/70258
Abstract: A system includes a plurality of sensors at distinct and separate locations, each of the distinct and separate locations being equidistant from a region that is configured to pass light that propagates along a beam path, the sensors being configured to sense radiation from an optical element positioned to interact with light that propagates on the beam path; and a controller including one or more electronic processors and a computer-readable medium, the computer-readable medium including instructions that, when executed, cause the one or more electronic processors to receive an output from each of the sensors, the output of each sensor including an indication of an intensity of the radiation detected by the sensor, and analyze the received output to determine a position of the light that propagates along the beam path.
Abstract translation: 系统包括在不同和分开的位置的多个传感器，每个不同的和分开的位置与被配置为通过沿着光束路径传播的光的区域等距离地设置，所述传感器被配置为感测来自定位的光学元件的辐射 与在光束路径上传播的光进行交互; 以及包括一个或多个电子处理器和计算机可读介质的控制器，所述计算机可读介质包括指令，所述指令在执行时使所述一个或多个电子处理器从每个所述传感器接收输出，每个传感器的输出 包括由传感器检测到的辐射的强度的指示，并且分析所接收的输出以确定沿着光束路径传播的光的位置。
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