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1.发明授权Coriolis type flow measuring system with analog to digital converters having an adjustable sampling frequency 有权具有可调取样频率的模数转换器的科里奥利流量测量系统公开(公告)号：US07729885B2
公开(公告)日：2010-06-01
申请号：US12205048
申请日：2008-09-05
CPC分类号： G01F1/8486 , G01F1/8413 , G01F1/8427 , G01F1/8431 , G01F1/8436
摘要： Coriolis type flow measuring system for measuring the mass flow rate of a flowing medium, includes a flow tube and sensors associated with the flow tube for generating analog signals corresponding to the movement of the tube, analog to digital conversion elements for converting the analog sensor signals into digitized signals with a sampling frequency, and elements for calculating the mass flow rate from the digitized signals, which system is provided with members for causing the sampling of the sensor signals to take place with a number of different frequencies, elements for continuously measuring the rate at which the flow changes, and elements for selecting a predefined sampling frequency in dependence on the rate of change thus measured.
摘要翻译： 用于测量流动介质的质量流量的科里奥利型流量测量系统包括流管和与流管相关联的传感器，用于产生对应于管的运动的模拟信号，用于转换模拟传感器信号的模数转换元件 具有采样频率的数字化信号和用于从数字化信号计算质量流率的元件，该系统设置有用于使用多个不同频率进行传感器信号的采样的部件，用于连续测量 流量变化的速率，以及用于根据如此测量的变化率来选择预定义采样频率的元件。
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公开(公告)号：US08102540B2
公开(公告)日：2012-01-24
申请号：US12613861
申请日：2009-11-06
申请人： Dannis Michel Brouwer , Aditya Mehendale , Lars Kristiansen , Marvin Ernst Eckhard Klein , Marcel Ronald Katerberg
发明人： Dannis Michel Brouwer , Aditya Mehendale , Lars Kristiansen , Marvin Ernst Eckhard Klein , Marcel Ronald Katerberg
IPC分类号： G01B11/14
CPC分类号： G01F1/8427
摘要： A Coriolis flow sensor with at least one vibrating flow tube through which a medium flows, includes elements for exciting the tube, and optical detection element for determining the movements of one or several points of the tube based on the principle of reflection of a light beam against the photosensitive surface of a light sensor. The light beam is directed at the tube wall, at a layer provided on this wall, or at an element fastened against this wall, wherein elements for shaping the beam are arranged for making the convergence of the beam in the direction of movement of the tube associated with the Coriolis forces smaller than the convergence in the direction of movement of the tube associated with the excitation forces. The sensitivity in the detection of the small movements of the tube caused by the Coriolis forces is enhanced.
摘要翻译： 具有介质流过的至少一个振动流管的科里奥利流量传感器包括用于激发管的元件和用于基于光束的反射原理来确定管的一个或多个点的运动的光学检测元件 抵靠光传感器的感光表面。 光束被引导到管壁，设置在该壁上的层或紧固在该壁上的元件，其中用于使梁成形的元件被布置成使梁在管的移动方向上会聚 与科里奥利力相关联，其小于与激励力相关联的管的运动方向的收敛。 检测由科里奥利力引起的细小运动的灵敏度得到提高。
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公开(公告)号：US07685888B2
公开(公告)日：2010-03-30
申请号：US12205066
申请日：2008-09-05
申请人： Wybren Jouwsma , Aditya Mehendale
发明人： Wybren Jouwsma , Aditya Mehendale
IPC分类号： G01F1/84
CPC分类号： G01F1/8481 , G01F1/8413 , G01F1/8427 , G01F1/8431 , G01F1/8436
摘要： A flow measuring system of the Coriolis type for measuring a mass flow, with a flow tube and with excitation elements for causing the flow tube to rotate about an axis of rotation, with at least three sensors arranged free of the flow tube for generating analog signals that correspond to the movement of the tube, and with elements for digitizing the analog signals and for computing the mass flow from the digitized sensor signals. The computation elements are arranged for using exclusively the time information from the sensor signals. The accurate time information of the sensors is used by algorithms in digital electronic circuits for accurately determining the ratio between amplitudes due to excitation and those due to Coriolis forces. The mass flow is derived from this ratio.
摘要翻译： 用于测量质量流量的科里奥利流量测量系统，具有流管和用于使流管围绕旋转轴线旋转的激励元件，至少三个传感器布置成没有流管用于产生模拟信号 其对应于管的运动，以及用于将模拟信号数字化并用于从数字化的传感器信号计算质量流的元件。 计算元件被安排为专门用于来自传感器信号的时间信息。 传感器的准确时间信息由数字电子电路中的算法用于精确地确定由激励引起的振幅与科里奥利力之间的比值之间的比率。 质量流量来自该比例。
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公开(公告)号：US07340965B2
公开(公告)日：2008-03-11
申请号：US11412174
申请日：2006-04-27
IPC分类号： G01F1/84
CPC分类号： G01F1/8409 , G01F1/8413 , G01F1/8422 , G01F1/8472 , G01F1/8481 , G01F1/8486
摘要： A mass flowmeter of the Coriolis type with a tube that forms a mechanically closed loop through which a medium flows during operation, and with preferably electromagnetic, contactless excitation elements for causing the loop to rotate in an oscillatory mode about an axis of rotation during operation. The loop has a starting point and an end point. The starting and end points are situated close together and are connected to a flexible inlet tube and a flexible outlet tube, respectively, which extend preferably in parallel and close together. The loop is resiliently suspended from the frame of the flowmeter via the flexible inlet and outlet tubes, which preferably form one integral piece with the tube of the loop.
摘要翻译： 科里奥利型的质量流量计，其具有管，该管形成机械闭合回路，介质在操作期间流过该回路，并且优选地具有电磁的非接触激励元件，用于使得环路在振荡模式下围绕旋转轴线在操作期间旋转。 循环有起点和终点。 起始点和终点分别靠近在一起并且分别连接到柔性入口管和柔性出口管，其优选平行并且靠近在一起延伸。 该回路通过柔性入口管和出口管弹性地悬挂在流量计的框架上，优选地与回路管形成一个整体。
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5.发明授权Support and positioning structure, semiconductor equipment system and method for positioning 有权支撑定位结构，半导体设备系统及定位方法公开(公告)号：US08952342B2
公开(公告)日：2015-02-10
申请号：US12970842
申请日：2010-12-16
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , B82Y10/00 , B82Y40/00 , H01J37/09 , H01J37/3177 , H01J2237/0264 , H01J2237/202
摘要： The invention relates to a charged particle system provided with a support and positioning structure for supporting and positioning a target on a table, the support and positioning structure comprising a first member and a second member and at least one motor so as to move the first member relative to the second member, wherein a shield is present to shield at least one charged particle beam from electromagnetic fields generated by said at least one motor, the support and positioning structure further comprising a spring mechanically coupling the first member and the second member for at least partially bearing the weight of the first member, table and target.
摘要翻译： 本发明涉及一种具有支撑和定位结构的带电粒子系统，用于将靶材支撑并定位在桌子上，支撑和定位结构包括第一构件和第二构件以及至少一个马达，以使第一构件 相对于第二构件，其中存在用于屏蔽来自由所述至少一个电动机产生的电磁场的至少一个带电粒子束的屏蔽，所述支撑和定位结构还包括弹簧，其将所述第一构件和所述第二构件机械地联接在一起 最少部分地承载第一构件，工作台和目标的重量。
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公开(公告)号：US07617740B2
公开(公告)日：2009-11-17
申请号：US11984253
申请日：2007-11-15
IPC分类号： G01F1/84
CPC分类号： G01F1/8486 , G01F1/8413 , G01F1/8427 , G01F1/844 , G01F1/8472
摘要： Coriolis mass flowmeter comprising a flow tube, at least one tube position sensor provided with a light source and with a light detector for receiving light from the light source, and drive means for causing the tube to move about an axis, the above being arranged such that the tube or a projection fastened to the tube, for example a vane, moves through a light path between the light source and the light detector, wherein a first screen with a first light-transmitting opening is placed at the side of the light source and a second screen with a second light-transmitting opening is placed at the side of the light detector, wherein the first and the second opening are identical and are correspondingly oriented, and wherein the openings are mutually parallel and aligned so as to form a prismatic light beam on the detector.
摘要翻译： 科里奥利质量流量计包括流量管，至少一个管位置传感器，其设置有光源，并具有用于接收来自光源的光的光检测器，以及用于使管围绕轴线移动的驱动装置， 固定在管上的管子或突起，例如叶片，通过光源和光检测器之间的光路移动，其中具有第一透光开口的第一屏幕被放置在光源的一侧 并且具有第二透光开口的第二屏幕被放置在所述光检测器的侧面，其中所述第一和第二开口相同并相应地定向，并且其中所述开口相互平行并对准，以便形成棱镜 光束在探测器上。
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公开(公告)号：US20090064797A1
公开(公告)日：2009-03-12
申请号：US12205066
申请日：2008-09-05
申请人： WYBREN JOUWSMA , Aditya Mehendale
发明人： WYBREN JOUWSMA , Aditya Mehendale
IPC分类号： G01F1/84
CPC分类号： G01F1/8481 , G01F1/8413 , G01F1/8427 , G01F1/8431 , G01F1/8436
摘要： A flow measuring system of the Coriolis type for measuring a mass flow, with a flow tube and with excitation means for causing the flow tube to rotate about an axis of rotation, with at least three sensors arranged free of the flow tube for generating analog signals that correspond to the movement of the tube, and with means for digitizing the analog signals and for computing the mass flow from the digitized sensor signals. The computation means are arranged for using exclusively the time information from the sensor signals. The accurate time information of the sensors is used by algorithms in digital electronic circuits for accurately determining the ratio between amplitudes due to excitation and those due to Coriolis forces. The mass flow is derived from this ratio.
摘要翻译： 用于测量质量流量的科里奥利流量测量系统，具有流管和用于使流管围绕旋转轴线旋转的激励装置，其中至少三个传感器布置成没有流管用于产生模拟信号 这对应于管的移动，并且具有用于数字化模拟信号和用于从数字化的传感器信号计算质量流的装置。 计算装置被布置为专门用于来自传感器信号的时间信息。 传感器的准确时间信息由数字电子电路中的算法用于精确地确定由激励引起的振幅与科里奥利力之间的比值之间的比率。 质量流量来自该比例。
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公开(公告)号：US20090013800A1
公开(公告)日：2009-01-15
申请号：US12167257
申请日：2008-07-03
CPC分类号： G01F1/849 , G01F1/8413 , G01F1/8427 , G01F1/8431 , G01F1/844 , G01F1/8472 , G01F1/8481
摘要： Coriolis mass flowmeter with a Coriolis tube and with an optical detection device, which optical detection device comprises at least one optical sensor for generating a signal that is representative of the movement of the Coriolis tube, said optical sensor comprising a light source and a photosensitive sensor, wherein the optical detection device comprises means for applying a constant voltage across the photosensitive sensor during operation independently of the current generated by the photosensitive sensor in response to incident light, as well as means for determining the value of the current generated by the photosensitive sensor and converting it into an output signal.
摘要翻译： 科里奥利质量流量计具有科里奥利管和光学检测装置，该光学检测装置包括至少一个用于产生代表科里奥利管的运动的信号的光学传感器，所述光学传感器包括光源和光敏传感器 ，其中所述光学检测装置包括用于在独立于由光敏传感器响应入射光产生的电流的操作期间在光敏传感器两端施加恒定电压的装置，以及用于确定由光敏传感器产生的电流值的装置 并将其转换为输出信号。
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公开(公告)号：US07464610B2
公开(公告)日：2008-12-16
申请号：US12043977
申请日：2008-03-07
IPC分类号： G01F1/84
CPC分类号： G01F1/8422 , G01F1/8427 , G01F1/8431 , G01F1/8472 , G01F1/8486
摘要： A mass flowmeter of the Coriolis type with a tube through which a medium flows during operation and with excitation elements for causing the entire tube or part thereof to perform a rotational vibration about a primary axis of rotation during operation. The excitation elements are electromagnetic and do not make contact with the tube during operation and have no components that are fastened to the tube. The tube is made of an electrically conducting material, and the excitation elements include first members for causing an electric current to flow through the tube during operation and second elements for generating a magnetic field at the area of a portion of the tube. The magnetic field is perpendicular to the direction of the current and in operation either the current or the magnetic field changes its sign periodically.
摘要翻译： 具有科里奥利型的质量流量计，其中具有介质在操作期间流动的管和用于使整个管或其一部分在操作期间围绕主旋转轴进行旋转振动的激励元件的管。 励磁元件是电磁的，并且在操作期间不与管接触，并且没有固定到管的部件。 管由导电材料制成，并且激发元件包括用于在操作期间使电流流过管的第一构件和用于在管的一部分区域处产生磁场的第二元件。 磁场垂直于电流的方向，并且在运行中，电流或磁场周期性地改变其符号。
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公开(公告)号：US20060243067A1
公开(公告)日：2006-11-02
申请号：US11412174
申请日：2006-04-27
申请人： Aditya Mehendale , Joost Lotters , Jan Zwikker
发明人： Aditya Mehendale , Joost Lotters , Jan Zwikker
IPC分类号： G01F1/84
CPC分类号： G01F1/8409 , G01F1/8413 , G01F1/8422 , G01F1/8472 , G01F1/8481 , G01F1/8486
摘要： A mass flowmeter of the Coriolis type with a tube that forms a mechanically closed loop through which a medium flows during operation, and with preferably electromagnetic, contactless excitation elements for causing the loop to rotate in an oscillatory mode about an axis of rotation during operation. The loop has a starting point and an end point. The starting and end points are situated close together and are connected to a flexible inlet tube and a flexible outlet tube, respectively, which extend preferably in parallel and close together. The loop is resiliently suspended from the frame of the flowmeter via the flexible inlet and outlet tubes, which preferably form one integral piece with the tube of the loop.
摘要翻译： 科里奥利型的质量流量计，其具有管，该管形成机械闭合回路，介质在操作期间流过该回路，并且优选地具有电磁的非接触激励元件，用于使得环路在振荡模式下围绕旋转轴线在操作期间旋转。 循环有起点和终点。 起始点和终点分别靠近在一起并且分别连接到柔性入口管和柔性出口管，其优选平行并且靠近在一起延伸。 该回路通过柔性入口管和出口管弹性地悬挂在流量计的框架上，优选地与回路管形成一个整体。
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