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    Patterning thin film superconductors using focused beam techniques
    3.
    发明授权
    Patterning thin film superconductors using focused beam techniques 失效
    使用聚焦光束技术构图薄膜超导体

    公开(公告)号：US4952556A

    公开(公告)日：1990-08-28

    申请号：US226220

    申请日：1988-07-29

    申请人： Joseph V. Mantese ,  Aboud H. Hamdi ,  Adolph L. Micheli ,  Antonio B. Catalan

    发明人： Joseph V. Mantese ,  Aboud H. Hamdi ,  Adolph L. Micheli ,  Antonio B. Catalan

    IPC分类号： C23C18/12 ,  H01L39/24

    CPC分类号： H01L39/2464 ,  C23C18/06 ,  C23C18/1208 ,  C23C18/1283 ,  C23C18/14 ,  H01L39/2451 ,  Y10S430/146

    摘要： Patterned films of superconducting materials are formed using focused beam techniques, such as electron beam, ion beam, and laser beam techniques. A solution comprising the neodecanoates of yttrium, barium, and copper is formed which is soluble in an organic solvent. The solution is spun onto an appropriate substrate. The solution is dried and subsequently selectively exposed using focused beam techniques, so that the exposed regions are no longer soluble in the organic solvent. The solution is immersed in the organic solvent, so that the only the exposed, insoluble regions remain on the substrate. The solution is then heated at a temperature sufficient to decompose the neodecanoates, about 500.degree. C., and then heated again, preferably using rapid thermal annealing techniques, to promote recrystallization and grain growth of the remaining metal oxides. The resulting patterned film exhibits superconductive characteristics.

    摘要翻译： 使用聚焦束技术形成超导材料的图案化膜，例如电子束，离子束和激光束技术。 形成了可溶于有机溶剂的包含钇，钡和铜的新癸酸的溶液。 将溶液旋转到合适的底物上。 将溶液干燥并随后使用聚焦束技术选择性地暴露，使得暴露区域不再溶于有机溶剂。 将溶液浸入有机溶剂中，使得仅有暴露的不溶性区域保留在基材上。 然后将溶液在足以分解约500℃的新癸酸酯的温度下加热，然后再次加热，优选使用快速热退火技术，以促进剩余金属氧化物的再结晶和晶粒生长。 所得到的图案化膜表现出超导特性。

    Selective laser pyrolysis of metallo-organics as a method of forming patterned thin film superconductors
    5.
    发明授权
    Selective laser pyrolysis of metallo-organics as a method of forming patterned thin film superconductors 失效
    金属有机物的选择性激光热解作为形成图案化薄膜超导体的方法

    公开(公告)号：US4916115A

    公开(公告)日：1990-04-10

    申请号：US209496

    申请日：1988-06-20

    申请人： Joseph V. Mantese ,  Antonio B. Catalan ,  Jeffrey A. Sell ,  Martin S. Meyer ,  Andrew M. Mance

    发明人： Joseph V. Mantese ,  Antonio B. Catalan ,  Jeffrey A. Sell ,  Martin S. Meyer ,  Andrew M. Mance

    IPC分类号： C04B35/45 ,  C04B41/50 ,  C04B41/85 ,  C23C18/14 ,  H01L39/24

    CPC分类号： C04B41/009 ,  C04B35/4504 ,  C04B41/5074 ,  C04B41/85 ,  C23C18/14 ,  H01L39/2451 ,  H01L39/2464 ,  Y10S430/146

    摘要： Fine line superconductors of yttrium-barium-copper were formed on strontium titanate substrates by the completely non-vacuum techniques of metallo-organic deposition in selective laser pyrolysis. Lines 125 micrometers wide were written in a film of metal neodecanoates, using an argon laser, prior to complete pyrolysis. An organic dye which absorbs selective laser light wavelengths, is added to the metallo-organic solution comprising the metal neodecanoates prior to laser exposure, so as to enhance absorption of the laser light at the regions of the metallo-organic film which are subsequently exposed to the laser light. The increased light absorbance at the exposed regions, results in at least partial pyrolysis of the exposed metal neodecanoates. Regions of the metallo-organic film not exposed to laser pyrolysis is developed away using a xylene wash. Subsequent complete pyrolysis of the metal neodecanoates and rapid thermal annealing produced lines having superconducting onsets above 90 K and zero resistance at 40 K.

    摘要翻译： 通过选择性激光热解中金属有机沉积的完全非真空技术在<100>钛酸锶基体上形成钇钡铜的细线超导体。 在完全热解之前，使用氩激光将125微米宽的线写入新癸酸金属膜中。 吸收选择性激光波长的有机染料在激光曝光之前添加到包含新癸酸金属的金属有机溶液中，以增强激光在金属 - 有机膜的区域的吸收，随后暴露于 激光灯。 暴露区域的增加的吸光度导致暴露的新癸酸金属的至少部分热解。 没有暴露于激光热解的金属有机膜的区域被二甲苯洗涤除去。 随后的新癸酸金属的完全热解和快速热退火生产的线路具有超过90K的超导和40K的零电阻。