公开(公告)号：US09450175B2

公开(公告)日：2016-09-20

申请号：US14603265

申请日：2015-01-22

Applicant: Agency for Science, Technology and Research

Inventor： Phoi Chin Goh ,  Kui Yao

IPC: H01L41/318 ,  H01L41/08 ,  C04B35/634 ,  C01G33/00 ,  C04B35/495 ,  C04B35/626 ,  C04B35/632 ,  H01L41/187

CPC classification number: H01L41/318 ,  C01G33/00 ,  C01G33/006 ,  C01P2002/50 ,  C01P2002/72 ,  C01P2002/89 ,  C01P2006/32 ,  C01P2006/40 ,  C04B35/495 ,  C04B35/6264 ,  C04B35/632 ,  C04B35/63444 ,  C04B35/63488 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3255 ,  C04B2235/44 ,  C04B2235/441 ,  C04B2235/449 ,  H01L41/0805 ,  H01L41/1873

Abstract: The present invention discloses a method of preparing a lead-free piezoelectric thin film comprising the steps of: providing a precursor solution comprising at least one alkali metal ion, a polyamino carboxylic acid, and an amine; depositing the precursor solution on a substrate to form a film; and annealing the film. The present invention also provides a lead-free piezoelectric thin film prepared according to the method, a precursor solution for use in the method and a method of preparing the precursor solution.

Abstract translation: 本发明公开了一种制备无铅压电薄膜的方法，包括以下步骤：提供包含至少一种碱金属离子，聚氨基羧酸和胺的前体溶液; 将前体溶液沉积在基底上以形成膜; 并退火膜。 本发明还提供根据该方法制备的无铅压电薄膜，用于该方法的前体溶液和制备前体溶液的方法。