Method for detecting surface impurities by X-ray fluorescence analysis

    公开(公告)号:US10705034B2

    公开(公告)日:2020-07-07

    申请号:US15337153

    申请日:2016-10-28

    Abstract: A method for detecting surface impurities on a surface of a component by X-ray fluorescence analysis uses a hand spectroscope for application to the surface of a component. The hand spectroscope comprises an X-ray source, a fluorescent radiation detector, an analyzer and a display. The method comprises irradiating the surface of the component with X-rays using the X-ray source; detecting fluorescent radiation, which is emitted by the surface of the component as a result of the irradiation with the X-rays, using the fluorescent radiation detector; measuring a radiation spectrum of the detected fluorescent radiation; generating an evaluation result by analyzing the measured radiation spectrum using the analyzer, the evaluation result comprising a quantitative measure of the surface impurity of the surface due to predetermined characteristic substances; and outputting the generated evaluation result on the display.

    TESTING OF COMPONENTS FOR CONTAMINATIONS
    2.
    发明申请
    TESTING OF COMPONENTS FOR CONTAMINATIONS 审中-公开
    污染组分的测试

    公开(公告)号:US20160334380A1

    公开(公告)日:2016-11-17

    申请号:US15151795

    申请日:2016-05-11

    Abstract: A method for testing a component for contamination. The method comprises a heating of a specimen surface of the component under a measuring bell defining a measurement volume, an at least two-time measuring of a contamination of the measurement volume with at least one contaminant, and a purging of the measurement volume with gas. An apparatus for testing a component for contamination is also disclosed. The apparatus comprises a measuring bell configured to form a measurement volume about the component or contacting the component. A heating element is configured to heat at least one specimen surface of the component. A purging unit is configured to purge the measurement volume with gas. A sensor system is configured to measure a contamination of the measurement volume with at least one contaminant.

    Abstract translation: 一种用于测试污染成分的方法。 该方法包括在限定测量体积的测量钟下加热组件的样本表面,至少两次测量具有至少一种污染物的测量体积的污染物,以及用气体吹扫测量体积 。 还公开了一种用于测试污染成分的装置。 该装置包括测量钟,其配置成形成关于部件的测量体积或接触该部件。 加热元件构造成加热组件的至少一个样品表面。 清洗单元配置成用气体吹扫测量体积。 传感器系统被配置成用至少一种污染物测量测量体积的污染。

    SURFACE EXAMINATION OF COMPONENTS
    3.
    发明申请
    SURFACE EXAMINATION OF COMPONENTS 审中-公开
    组件的表面检查

    公开(公告)号:US20160334377A1

    公开(公告)日:2016-11-17

    申请号:US15152230

    申请日:2016-05-11

    Abstract: An apparatus used for the surface examination of components. The apparatus comprises: a radiation source configured to convert at least one non-volatile substance at least partially into a gas by irradiating a sample surface of a component; and a detector unit configured to qualitatively and/or quantitatively detect the at least one substance converted into gas. A method provided for a surface examination of components. The method comprises irradiating a sample surface of a component with a radiation source configured to convert at least one non-volatile substance at least partially into a gas; and a qualitative and/or quantitative detection of the at least one substance converted into gas via a detector unit.

    Abstract translation: 用于表面检查部件的装置。 该装置包括:辐射源,被配置为通过照射部件的样品表面将至少一种非挥发性物质至少部分地转化成气体; 以及检测器单元,其被配置为定性和/或定量地检测转化为气体的至少一种物质。 一种用于组件表面检查的方法。 该方法包括用配置成将至少一种非挥发性物质至少部分地转化为气体的辐射源照射部件的样品表面; 以及通过检测器单元定性和/或定量地检测转化成气体的至少一种物质。

    DEVICE AND METHOD FOR EXAMINING LAYER MATERIAL FOR CONTAMINATION
    4.
    发明申请
    DEVICE AND METHOD FOR EXAMINING LAYER MATERIAL FOR CONTAMINATION 审中-公开
    用于检测层状材料的污染物的装置和方法

    公开(公告)号:US20160334309A1

    公开(公告)日:2016-11-17

    申请号:US15151723

    申请日:2016-05-11

    Abstract: A device used to examine layer material for contamination. The device comprises a heating device to heat a test area of the layer material and a detector device to detect at least one contaminant desorbed from the layer material. The heating device comprises at least one infra-red heating element. A method comprises heating a test area of the layer material and detecting at least one contaminant desorbed from the layer material. The heating takes place via an infra-red heating element.

    Abstract translation: 用于检查污染层的材料的装置。 该装置包括用于加热层材料的测试区域的加热装置和用于检测从层材料解吸的至少一种污染物的检测器装置。 加热装置包括至少一个红外加热元件。 一种方法包括加热层材料的测试区域并检测从层材料解吸的至少一种污染物。 加热通过红外加热元件进行。

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