公开(公告)号：US08278163B2

公开(公告)日：2012-10-02

申请号：US12507985

申请日：2009-07-23

申请人： Akio Machida ,  Toshio Fujino ,  Tadahiro Kono ,  Katsuji Takagi ,  Shinsuke Haga

发明人： Akio Machida ,  Toshio Fujino ,  Tadahiro Kono ,  Katsuji Takagi ,  Shinsuke Haga

IPC分类号： H01L21/268 ,  G21K5/10

CPC分类号： H01L21/02691 ,  B23K26/0608 ,  B23K26/066 ,  B23K26/0676 ,  H01L21/02678 ,  H01L21/268

摘要： A semiconductor processing apparatus includes: a stage on which a substrate having a semiconductor film to be processed is to be mounted; a supply section that supplies a plurality of energy beams onto the semiconductor film mounted on the stage in such a way that irradiation points of the energy beams are aligned at given intervals; and a control section that moves the plurality of energy beams and the substrate relative to each other in a direction not in parallel to alignment of the irradiation points of the plurality of energy beams supplied by the supply section, and scans the semiconductor film with the irradiation points of the plurality of energy beams in parallel to thereby control a heat treatment on the semiconductor film.

摘要翻译： 一种半导体处理装置，包括：要安装具有要加工的半导体膜的衬底的阶段; 供给部，其以使得能量束的照射点以给定间隔对准的方式将多个能量束提供到安装在台上的半导体膜上; 以及控制部，其使所述多个能量束和所述基板相对于与所述供给部供给的所述多个能量束的照射点的排列不平行的方向移动，并且利用所述照射来扫描所述半导体膜 多个能量束的点平行，从而控制半导体膜上的热处理。

公开(公告)号：US20100093112A1

公开(公告)日：2010-04-15

申请号：US12574024

申请日：2009-10-06

申请人： Katsuji Takagi ,  Akio Machida ,  Toshio Fujino ,  Tadahiro Kono ,  Norio Fukasawa ,  Shinsuke Haga

发明人： Katsuji Takagi ,  Akio Machida ,  Toshio Fujino ,  Tadahiro Kono ,  Norio Fukasawa ,  Shinsuke Haga

IPC分类号： H01L21/66 ,  B23K26/00

CPC分类号： B23K26/03 ,  H01L22/26

摘要： An embodiment of the invention provides a laser annealing method, including the steps of radiating a laser beam to an amorphous film on a substrate while scanning the laser beam for the amorphous film, crystallizing the amorphous film, detecting a light quantity of laser beam reflected from the substrate and a scanning speed of the laser beam while the radiation and the scanning of the laser beam are carried out for the amorphous film, and controlling a radiation level and the scanning speed of the laser beam based on results of comparison of the light quantity of laser beam reflected from the substrate, and the scanning speed of the laser beam with respective preset references.

摘要翻译： 本发明的一个实施例提供了一种激光退火方法，包括以下步骤：扫描激光束为非晶膜时，在基板上的非晶膜上照射激光，使非晶膜结晶，检测从 基板和激光束的扫描速度，同时对非晶膜进行激光束的辐射和扫描，并且基于光量的比较结果控制激光束的辐射水平和扫描速度 从基板反射的激光束和激光束的扫描速度具有各自的预设参考。

公开(公告)号：US20100051830A1

公开(公告)日：2010-03-04

申请号：US12507985

申请日：2009-07-23

申请人： Akio Machida ,  Toshio Fujino ,  Tadahiro Kono ,  Katsuji Takagi ,  Shinsuke Haga

发明人： Akio Machida ,  Toshio Fujino ,  Tadahiro Kono ,  Katsuji Takagi ,  Shinsuke Haga

IPC分类号： H01L21/02

CPC分类号： H01L21/02691 ,  B23K26/0608 ,  B23K26/066 ,  B23K26/0676 ,  H01L21/02678 ,  H01L21/268

摘要： A semiconductor processing apparatus includes: a stage on which a substrate having a semiconductor film to be processed is to be mounted; a supply section that supplies a plurality of energy beams onto the semiconductor film mounted on the stage in such a way that irradiation points of the energy beams are aligned at given intervals; and a control section that moves the plurality of energy beams and the substrate relative to each other in a direction not in parallel to alignment of the irradiation points of the plurality of energy beams supplied by the supply section, and scans the semiconductor film with the irradiation points of the plurality of energy beams in parallel to thereby control a heat treatment on the semiconductor film.

摘要翻译： 一种半导体处理装置，包括：要安装具有要加工的半导体膜的衬底的阶段; 供给部，其以使得能量束的照射点以给定间隔对准的方式将多个能量束提供到安装在台上的半导体膜上; 以及控制部，其使所述多个能量束和所述基板相对于与所述供给部供给的所述多个能量束的照射点的排列不平行的方向移动，并且利用所述照射来扫描所述半导体膜 多个能量束的点平行，从而控制半导体膜上的热处理。

公开(公告)号：US08357620B2

公开(公告)日：2013-01-22

申请号：US12574024

申请日：2009-10-06

申请人： Katsuji Takagi ,  Akio Machida ,  Toshio Fujino ,  Tadahiro Kono ,  Norio Fukasawa ,  Shinsuke Haga

发明人： Katsuji Takagi ,  Akio Machida ,  Toshio Fujino ,  Tadahiro Kono ,  Norio Fukasawa ,  Shinsuke Haga

IPC分类号： H01L21/00

CPC分类号： B23K26/03 ,  H01L22/26

摘要： An embodiment of the invention provides a laser annealing method, including the steps of radiating a laser beam to an amorphous film on a substrate while scanning the laser beam for the amorphous film, crystallizing the amorphous film, detecting a light quantity of laser beam reflected from the substrate and a scanning speed of the laser beam while the radiation and the scanning of the laser beam are carried out for the amorphous film, and controlling a radiation level and the scanning speed of the laser beam based on results of comparison of the light quantity of laser beam reflected from the substrate, and the scanning speed of the laser beam with respective preset references.

摘要翻译： 本发明的一个实施例提供了一种激光退火方法，包括以下步骤：扫描激光束为非晶膜时，在基板上的非晶膜上照射激光，使非晶膜结晶，检测从 基板和激光束的扫描速度，同时对非晶膜进行激光束的辐射和扫描，并且基于光量的比较结果控制激光束的辐射水平和扫描速度 从基板反射的激光束和激光束的扫描速度具有各自的预设参考。

公开(公告)号：US20070171778A1

公开(公告)日：2007-07-26

申请号：US11649843

申请日：2007-01-05

申请人： Kimihiro Saito ,  Katsuji Takagi ,  Tsutomu Ishimoto

发明人： Kimihiro Saito ,  Katsuji Takagi ,  Tsutomu Ishimoto

IPC分类号： G11B7/00

CPC分类号： G11B7/1353 ,  G11B7/0901 ,  G11B7/0908 ,  G11B7/094 ,  G11B7/0943 ,  G11B7/0953 ,  G11B7/0956 ,  G11B7/131 ,  G11B7/1356 ,  G11B7/1387 ,  G11B11/10543 ,  G11B11/10576

摘要： An optical recording/reproducing apparatus includes an optical pickup and a control section. The optical pickup includes: a detecting section; an optical system that radiates light from a light source onto an optical recording medium as near-field light by a condenser lens having a numerical aperture of 1 or more, and introduces light reflected by the optical recording medium toward the detecting section; and a drive section that drives the condenser lens. The optical recording/reproducing apparatus performs control for recording and/or reproducing onto/from the optical recording medium based on an optical output detected by the detecting section of the optical pickup. The optical system includes a beam splitter that reflects both P-and S-polarized components of reflected light from the optical recording medium, and a separating section that separates the P-and S-polarized components reflected by the beam splitter. The detecting section individually detects the P-and S-polarized components separated by the separating section.

摘要翻译： 光学记录/再现装置包括光学拾取器和控制部分。 光学拾取器包括：检测部分; 光学系统，其通过数值孔径为1以上的聚光透镜将光从光源照射到光记录介质上作为近场光，并将由光记录介质反射的光引入检测部; 以及驱动聚光透镜的驱动部。 光学记录/再现装置基于由光学拾取器的检测部分检测到的光输出，对从光记录介质进行记录和/或再现的控制。 光学系统包括分束器，其反射来自光学记录介质的反射光的P偏振分量和S偏振分量，以及分离部分，其分离由分束器反射的P偏振分量和S偏振分量。 检测部分分别检测由分离部分分离的P偏振分量和S偏振分量。

公开(公告)号：US20120201953A1

公开(公告)日：2012-08-09

申请号：US13360160

申请日：2012-01-27

申请人： Katsuji Takagi ,  Yuichi Aki

发明人： Katsuji Takagi ,  Yuichi Aki

IPC分类号： C23C16/52 ,  B32B3/00

CPC分类号： H05K3/1283 ,  H05K3/0008 ,  H05K2203/107 ,  H05K2203/163 ,  Y10T428/24802

摘要： A conductive substrate includes substrate made of a resin material, and a conductive layer formed on the substrate by baking a conductive paste which is coated on the substrate at a predetermined position, wherein the conductive layer is formed through baking by applying second laser light to the conductive paste of which a position on the substrate is detected based on a difference in reflectance depending on the application positions of first laser light applied to the substrate.

摘要翻译： 导电性基板包括由树脂材料制成的基板和通过在预定位置烘烤涂覆在基板上的导电浆料形成在基板上的导电层，其中通过对第二激光施加第二激光而形成导电层 根据施加到基板的第一激光的施加位置，基于反射率的差异检测基板上的位置的导电糊。

公开(公告)号：US3948038A

公开(公告)日：1976-04-06

申请号：US557013

申请日：1975-03-10

申请人： Katsuji Takagi

发明人： Katsuji Takagi

IPC分类号： G04B37/00 ,  G04B37/08

CPC分类号： G04B37/00 ,  G04B37/08

摘要： A watchcase coupling structure including an outer rim and coupling pins adapted to couple a front cap and a rear cap, wherein the coupling pins may be mounted in the outer rim and the rear cap without relying upon a threading-in method. Each of these coupling pins may take various configurations. Specifically, it may be the one which has an eccentricity by an amount corresponding to a margin required to adjust the force with which the packing interposed between the front cap and the rear cap is clamped or the one which is provided on its head with a slant portion to facilitate the operation of mounting. Furthermore, it may be the one which is provided on the front end with a notch or the like or the one which has a flange to prevent the pin from falling off. To employ the pin having the flange, the outer rim is provided with a keyhole-shaped notch and the circular head of the pin is symmetrically cut away to present a pair of parallel surfaces so that the pin head may be soothly guided along said keyhole-shaped notch.

摘要翻译： 一种表壳联接结构，其包括适于联接前盖和后盖的外缘和联接销，其中所述联接销可以安装在所述外边缘和所述后盖中，而不依赖于穿线方式。 这些连接销中的每一个可以采取各种配置。 具体地说，它可以是具有偏心量，该偏心量对应于调节插入在前盖和后盖之间的密封件被夹紧的力所需的余量，或者在其头部上设置倾斜的力 部分便于安装操作。 此外，也可以是在前端设置有切口等，也可以是具有用于防止销脱落的凸缘的凸缘。 为了使用具有凸缘的销，外边缘设置有锁眼形凹口，并且销的圆形头被对称地切除以呈现一对平行表面，使得销头可以沿着所述钥匙孔顺畅地被引导， 形槽。