公开(公告)号：US07078330B2

公开(公告)日：2006-07-18

申请号：US10790757

申请日：2004-03-03

申请人： Akira Maeda ,  Takeyuki Maegawa ,  Shigeru Matsuno ,  Takuo Ozawa ,  Takanori Sone ,  Shoji Miyashita ,  Yasumichi Hatanaka ,  Masato Koyama ,  Takahiro Nagamine ,  Susumu Arai

发明人： Akira Maeda ,  Takeyuki Maegawa ,  Shigeru Matsuno ,  Takuo Ozawa ,  Takanori Sone ,  Shoji Miyashita ,  Yasumichi Hatanaka ,  Masato Koyama ,  Takahiro Nagamine ,  Susumu Arai

IPC分类号： H01L21/44

CPC分类号： H01L24/12 ,  H01L24/11 ,  H01L2224/05001 ,  H01L2224/05026 ,  H01L2224/05571 ,  H01L2224/13099 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01012 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01045 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/01327 ,  H01L2924/014 ,  H01L2924/10253 ,  H01L2924/12042 ,  H05K3/244 ,  H05K3/3463 ,  H05K3/363 ,  H01L2924/00 ,  H01L2224/05611 ,  H01L2924/00014 ,  H01L2224/05144 ,  H01L2224/05147 ,  H01L2224/05155

摘要： A metal electrode is formed on a substrate. The metal electrode includes a first layer, a second layer, and a third layer lying, from an outermost surface of the metal electrode toward the substrate, in this order. The first layer contains tin as a principal constituent and the second layer contains a metallic element which produces an eutectic reaction with tin, wherein the melting point of the first layer is higher than the melting point of the second layer. The third layer is an underlying metallic layer for the first and second layers.

摘要翻译： 在基板上形成金属电极。 金属电极包括从金属电极的最外表面朝向衬底的第一层，第二层和第三层。 第一层含有锡作为主要成分，第二层含有与锡产生共晶反应的金属元素，其中第一层的熔点高于第二层的熔点。 第三层是第一层和第二层的底层金属层。

公开(公告)号：US08138442B2

公开(公告)日：2012-03-20

申请号：US12093836

申请日：2005-11-16

申请人： Tatsushi Sato ,  Yoshihito Imai ,  Teiji Takahashi ,  Takeshi Sakata ,  Tomoko Sendai ,  Yoichiro Nishimoto ,  Shigeru Matsuno ,  Takeyuki Maegawa ,  Takaaki Iwata

发明人： Tatsushi Sato ,  Yoshihito Imai ,  Teiji Takahashi ,  Takeshi Sakata ,  Tomoko Sendai ,  Yoichiro Nishimoto ,  Shigeru Matsuno ,  Takeyuki Maegawa ,  Takaaki Iwata

IPC分类号： B23H7/02 ,  H01L21/301 ,  H01L21/306 ,  B23H9/00

CPC分类号： B23H7/02 ,  B23H9/00

摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.

摘要翻译： 本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。 具有体积电阻率等于或大于0.5且OHgr·cm且等于或小于5Ω的体积电阻率，硬脆材料的放电加工是通过施加具有 脉冲宽度等于或高于1微秒并且等于或低于4微秒，并且在将线电极加工时的峰值电流等于或高于10A并等于或低于50A的线 并且在线电极和待加工对象之间产生放电脉冲。

公开(公告)号：US20090212026A1

公开(公告)日：2009-08-27

申请号：US12093836

申请日：2005-11-16

申请人： Tatsushi Sato ,  Yoshihito Imai ,  Teiji Takahashi ,  Takeshi Sakata ,  Tomoko Sendai ,  Yoichiro Nishimoto ,  Shigeru Matsuno ,  Takeyuki Maegawa ,  Takaaki Iwata

发明人： Tatsushi Sato ,  Yoshihito Imai ,  Teiji Takahashi ,  Takeshi Sakata ,  Tomoko Sendai ,  Yoichiro Nishimoto ,  Shigeru Matsuno ,  Takeyuki Maegawa ,  Takaaki Iwata

IPC分类号： B23H1/00

CPC分类号： B23H7/02 ,  B23H9/00

摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.

摘要翻译： 本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。 通过施加具有脉冲宽度的脉冲电压来执行体积电阻率等于或高于0.5Ω·cm且等于或小于5Ω·cm的高体积电阻率，硬脆性材料的放电加工 等于或高于1个音箱并且等于或低于4个音箱，并且在对线电极进行等于或高于10A且等于或小于50A的线电极加工时具有峰值电流，以及 在线电极和待加工对象之间产生放电脉冲。

公开(公告)号：US20080295770A1

公开(公告)日：2008-12-04

申请号：US12219583

申请日：2008-07-24

申请人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

发明人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

IPC分类号： B05C11/10

CPC分类号： F16K11/207 ,  B01D1/0082 ,  C23C16/448 ,  C23C16/4486 ,  F16K31/1221 ,  Y10S261/65

摘要： In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.

公开(公告)号：US20070085226A1

公开(公告)日：2007-04-19

申请号：US11604235

申请日：2006-11-27

申请人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

发明人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

IPC分类号： B01F3/04

CPC分类号： F16K11/207 ,  B01D1/0082 ,  C23C16/448 ,  C23C16/4486 ,  F16K31/1221 ,  Y10S261/65

摘要： In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.

摘要翻译： 在液体物质供给装置中，三端口二阀方向控制阀设置在输送管线中，物质容器和输送管线通过四端口三阀方向控制阀连接在一起，使得四端口 三阀方向控制阀和物质容器可以作为一个单元从输送管线中取出。 此外，在蒸发器中，设置有用于包围内部导管的端部的孔部件，在内部导管的端部，将由气体和与其混合的液体物质构成的混合物流动，将用于雾化的气体通过间隙喷射到蒸发室内 限定在内部管道和孔口构件之间。 此外，可以根据液体物质的性质独立地控制蒸发室中的汽化表面的温度。

公开(公告)号：US07731162B2

公开(公告)日：2010-06-08

申请号：US12219583

申请日：2008-07-24

申请人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

发明人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

IPC分类号： B01F3/04

CPC分类号： F16K11/207 ,  B01D1/0082 ,  C23C16/448 ,  C23C16/4486 ,  F16K31/1221 ,  Y10S261/65

摘要： In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.

摘要翻译： 在液体物质供给装置中，三端口二阀方向控制阀设置在输送管线中，物质容器和输送管线通过四端口三阀方向控制阀连接在一起，使得四端口 三阀方向控制阀和物质容器可以作为一个单元从输送管线中取出。 此外，在蒸发器中，设置有用于包围内部导管的端部的孔部件，在内部导管的端部，将由气体和与其混合的液体物质构成的混合物流动，将用于雾化的气体通过间隙喷射到蒸发室内 限定在内部管道和孔口构件之间。 此外，可以根据液体物质的性质独立地控制蒸发室中的汽化表面的温度。

公开(公告)号：US20090045531A1

公开(公告)日：2009-02-19

申请号：US12219584

申请日：2008-07-24

申请人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

发明人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

IPC分类号： B01F3/04

CPC分类号： F16K11/207 ,  B01D1/0082 ,  C23C16/448 ,  C23C16/4486 ,  F16K31/1221 ,  Y10S261/65

摘要： In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.

公开(公告)号：US07637482B2

公开(公告)日：2009-12-29

申请号：US12219584

申请日：2008-07-24

申请人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

发明人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

IPC分类号： B01F3/04

CPC分类号： F16K11/207 ,  B01D1/0082 ,  C23C16/448 ,  C23C16/4486 ,  F16K31/1221 ,  Y10S261/65

摘要： In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.

摘要翻译： 在液体物质供给装置中，三端口二阀方向控制阀设置在输送管线中，物质容器和输送管线通过四端口三阀方向控制阀连接在一起，使得四端口 三阀方向控制阀和物质容器可以作为一个单元从输送管线中取出。 此外，在蒸发器中，设置有用于包围内部导管的端部的孔部件，在内部导管的端部，将由气体和与其混合的液体物质构成的混合物流动，将用于雾化的气体通过间隙喷射到蒸发室内 限定在内部管道和孔口构件之间。 此外，可以根据液体物质的性质独立地控制蒸发室中的汽化表面的温度。

公开(公告)号：US07422198B2

公开(公告)日：2008-09-09

申请号：US11604235

申请日：2006-11-27

申请人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

发明人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

IPC分类号： B01F3/04

CPC分类号： F16K11/207 ,  B01D1/0082 ,  C23C16/448 ,  C23C16/4486 ,  F16K31/1221 ,  Y10S261/65

摘要： In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.

摘要翻译： 在液体物质供给装置中，三端口二阀方向控制阀设置在输送管线中，物质容器和输送管线通过四端口三阀方向控制阀连接在一起，使得四端口 三阀方向控制阀和物质容器可以作为一个单元从输送管线中取出。 此外，在蒸发器中，设置有用于包围内部导管的端部的孔部件，在内部导管的端部，将由气体和与其混合的液体物质构成的混合物流动，将用于雾化的气体通过间隙喷射到蒸发室内 限定在内部管道和孔口构件之间。 此外，可以根据液体物质的性质独立地控制蒸发室中的汽化表面的温度。

公开(公告)号：US07163197B2

公开(公告)日：2007-01-16

申请号：US09957470

申请日：2001-09-21

申请人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

发明人： Naoki Yoshioka ,  Tatsushi Kawamoto ,  Mitsushi Kawao ,  Shigeru Matsuno ,  Akira Yamada ,  Shoji Miyashita ,  Fusaoki Uchikawa

IPC分类号： B01F3/04

CPC分类号： F16K11/207 ,  B01D1/0082 ,  C23C16/448 ,  C23C16/4486 ,  F16K31/1221 ,  Y10S261/65

摘要： In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.

摘要翻译： 在液体物质供给装置中，三端口二阀方向控制阀设置在输送管线中，物质容器和输送管线通过四端口三阀方向控制阀连接在一起，使得四端口 三阀方向控制阀和物质容器可以作为一个单元从输送管线中取出。 此外，在蒸发器中，设置有用于包围内部导管的端部的孔部件，在内部导管的端部，将由气体和与其混合的液体物质构成的混合物流动，将用于雾化的气体通过间隙喷射到蒸发室内 限定在内部管道和孔口构件之间。 此外，可以根据液体物质的性质独立地控制蒸发室中的汽化表面的温度。