摘要:
In a vibration gyroscope 1, a vibrator 2 is mounted to a mounting substrate 7 through support pins 6a and 6b. The mounting substrate 7 and a support substrate 10 are disposed opposite by inserting protrusions 11a and 11b of the support substrate 10 into second insertion holes 9a and 9b of the mounting substrate 7 and by supporting the mounting substrate 7 with convex molded sections 14a and 14b. The space between the substrates 7 and 10 are filled with elastic paste made up of synthetic resin such as urethan and silicone, or the like. The paste is dried to form a vibration absorbing member 13. Alternatively, the vibration absorbing member 13 is formed on the surface of a mounting substrate 22.
摘要:
A sensor for detecting a substance in liquid includes a sensing circuit including a sensing surface acoustic wave (SAW) element in which a reaction film to react with a substance in liquid, a reference circuit including a reference SAW element including an IDT and not including a reaction film, a first signal source driving the sensing circuit, a second signal source driving the reference circuit and being independent of the first signal source, and a differential circuit arranged to output a differential output between an output of the sensing circuit and an output of the reference circuit. The frequency of a first frequency signal output from the first signal source is different from the frequency of a second frequency signal output from the second signal source, thereby making a driving frequency for the sensing SAW element and a driving frequency for the reference SAW element substantially the same as or different from one another.
摘要:
A surface-acoustic-wave-sensor-included oscillator circuit does not cause separation of an electrode film due to application of a bias voltage and can reliably accurate operate even if liquid is adhered thereto. The surface-acoustic-wave-sensor-included oscillator circuit includes interdigital electrode disposed on a piezoelectric substrate and a reaction film that is arranged so as to cover the interdigital electrodes and bound to a target substance or a binding material to be bound to the target substance. A surface acoustic wave sensor that is capable of detecting a bit of mass loading on the basis of a variation in frequency is connected as a resonator in the surface-acoustic-wave-sensor-included oscillator circuit. Direct-current cutting capacitors are connected in series to the surface acoustic wave sensor, and the direct-current cutting capacitors respectively define impedance matching circuits in the surface-acoustic-wave-sensor-included oscillator circuit.
摘要:
A surface acoustic wave sensor detects a mass load on a resonator-type surface acoustic wave filter on the basis of a change in frequency and includes an IDT electrode arranged on a piezoelectric substrate to excite surface waves, an insulating film arranged so as to cover the IDT electrode, and a reaction film which is disposed on the insulating film and which reacts with a target substance to be detected or a binding substance that binds to a target substance to be detected. The reaction film is composed of a metal or a metal oxide.
摘要:
A sensor for detecting a substance in liquid includes a sensing oscillation circuit and a reference oscillation circuit. The sensing oscillation circuit includes a sensing SAW element in which a reaction film arranged so as to cover at least one IDT and to react with a substance in liquid is disposed and a first amplifier circuit. The reference oscillation circuit includes a reference SAW element and a second amplifier circuit. The reference SAW element includes at least one IDT and no reaction film. The oscillation frequency of the sensing oscillation circuit and the oscillation frequency of the reference oscillation circuit are separated by at least about 200×k2 (ppm), where k2(%) is the electromechanical coupling coefficient of a piezoelectric substrate used in each of the sensing SAW element and the reference SAW element.
摘要:
In a sensor for detecting a substance in liquid, recesses are provided in the upper surface of a base substrate. The recesses respectively accommodate SAW elements. A resin layer having openings is arranged such that the sensing portions at the upper surfaces of the SAW elements are exposed in the openings. A reaction film made of a material capable of binding to a target substance is also arranged so as to cover the sensing portion of at least one of the SAW elements. A liquid containing a target substance is fed from the openings.
摘要:
A vibrating gyroscope in which harmonic components can be removed relatively easily and which can detect a rotational angular velocity accurately. The vibrating gyroscope 10 comprises a vibrator 12 in which detecting pieces 16a and 16b and a driving piece 16c are created on sides of a vibrating member 14, inverting amplifier circuits 24 and 26 for amplifying output signals of the detecting pieces 16a and 16b, a comparator circuit 32 for shaping waveform of output signals of the inverting amplifier circuits 24 and 26, a phase compensating circuit 34 for adjusting a phase of the output signal of the comparator circuit 32 and for feeding the output signal back to the driving piece 16c to stably vibrate the vibrating member, a differential circuit 38 for finding a difference of the output signals of the inverting amplifier circuits 24 and 26 and a synchronous detector circuit 40 for detecting the output signal of the differential circuit 38 in synchronism with the signal of the comparator circuit 32.
摘要:
A surface-acoustic-wave-sensor-included oscillator circuit does not cause separation of an electrode film due to application of a bias voltage and can reliably accurate operate even if liquid is adhered thereto. The surface-acoustic-wave-sensor-included oscillator circuit includes interdigital electrode disposed on a piezoelectric substrate and a reaction film that is arranged so as to cover the interdigital electrodes and bound to a target substance or a binding material to be bound to the target substance. A surface acoustic wave sensor that is capable of detecting a bit of mass loading on the basis of a variation in frequency is connected as a resonator in the surface-acoustic-wave-sensor-included oscillator circuit. Direct-current cutting capacitors are connected in series to the surface acoustic wave sensor, and the direct-current cutting capacitors respectively define impedance matching circuits in the surface-acoustic-wave-sensor-included oscillator circuit.
摘要:
An oscillator which oscillates at a predetermined frequency includes a first inverting amplifier and a second inverting amplifier connected in antiparallel with each other, a surface acoustic wave resonator connected in parallel with one of the first inverting amplifier and the second inverting amplifier, and a filter connected between the first inverting amplifier and the second inverting amplifier for blocking a direct-current signal while allowing a signal of the predetermined frequency to pass.
摘要:
A vibrating gyroscope has a mounting substrate carrying a vibrator. The mounting substrate is supported and fixed by a plurality of connecting members at a level above a circuit board. The supporting members also provide electrical connection between a wiring on the mounting substrate and a circuitry including an oscillation circuit and a detection circuit on the circuit board. Each connecting member has one end fixed to a point on the mounting substrate substantially in the middle of the path of propagation of vibration which is between supporting pins and which detours around a slit formed in the mounting substrate.