公开(公告)号：US06631643B2

公开(公告)日：2003-10-14

申请号：US10169499

申请日：2002-07-03

申请人： Alan R Malvern ,  Ian D Hopkin ,  Kevin Townsend ,  Nicolaas F Derooij

发明人： Alan R Malvern ,  Ian D Hopkin ,  Kevin Townsend ,  Nicolaas F Derooij

IPC分类号： G01P15125

CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P15/132 ,  G01P2015/0814

摘要： The accelerometer is linear having a substantially planar plate-like proof mass (9) mounted by four or more flexible mounting legs (8) each co-planar with the proof mass (9) to a substantially planar plate-like support (10) fixedly mounted relative to the proof mass (9) and co-planar therewith. In this way the proof mass (9) is mounted for linear movement in a sensing direction in the plane containing the proof mass (9), mounting legs (8) and support (10) to sense acceleration change applied to the accelerometer. At least two spaced apart substantially planar capacitor plates (11) each co-planar with the proof mass, mounting legs and support, are provided for sensing linear movement of the proof mass (9) in the sensing direction C. The proof mass (9), mounting legs (8), support (10) and capacitor blades (11) are formed from a single sheet of silicon and the mounting legs (8) extend substantially perpendicularly to the sensing direction C. Restoring means are provided for returning the proof mass (9) in the sensing direction C towards a null position.

摘要翻译： 加速度计是线性的，其具有由四个或更多个柔性安装腿（ 8 ）安装的基本上平面的板状证明块（ 9 PDAT>）与检测质量（ 9 ）共平面到基本平面的板状支撑体（ 10 ）相对于检验质量块（ 9 ）固定安装并与其共面。 以这种方式，安装检测质量（ 9 ）以在包含检测质量的平面（ 9 ）的感测方向上线性移动， ），安装腿（ 8 ）并支持（ 10 ）以检测应用于加速度计的加速度变化。 提供与校验质量块，安装腿和支撑件共面的至少两个间隔开的大致平面的电容器板（ 11 ），用于检测校准质量块的线性运动 感测方向C上的 9 ）。校验质量（ 9 ），安装腿（ 8 ），支持（ 10 ）和电容器刀片（ 11 ）由 单片硅和安装腿（ 8 ）基本上垂直于感测方向C延伸。提供恢复装置用于使检测质量（ 9 ）在感测方向C朝向零位置。

公开(公告)号：US06282958B1

公开(公告)日：2001-09-04

申请号：US09417105

申请日：1999-10-13

申请人： Christopher P Fell ,  Kevin Townsend ,  Ian D Hopkin

发明人： Christopher P Fell ,  Kevin Townsend ,  Ian D Hopkin

IPC分类号： G01P904

CPC分类号： G01C19/5684

摘要： An angular rate sensor or gyro includes a ring-like resonator (1) mounted by support beams (2) extending from the inner periphery of the ring (1) to a boss (4) on a base (3). The support beams (2) are flexible and allow the resonator (1) to vibrate in response to an electrostatic drive (6, 8) in a substantially undamped oscillation mode to permit the resonator to move relative to the support in response to turning rate. The support beams (2) and resonator (1) are made from crystalline silicon. Electrostatic sensors (7, 9) are provided for sensing movement of the resonator (1). The drive (6, 8) and sensors (7, 9) have plate-like elements made from crystalline silicon having surfaces located substantially normal to the plane of the resonator (1) at a spacing from the adjacent outer periphery of the resonator (1). The ratio of the thickness of the resonator (1) at the outer periphery (1b) to the width of the spacing (11) between the periphery (1b) and the element surfaces (10) is in the range of from 10:1 to 40:1.

摘要翻译： 角速率传感器或陀螺仪包括由从环（1）的内周延伸到基座（3）上的凸台（4）的支撑梁（2）安装的环形谐振器（1）。 支撑梁（2）是柔性的，并且允许谐振器（1）响应于基本无阻尼的振荡模式中的静电驱动（6,8）振动，以允许谐振器响应于转速而相对于支撑件移动。 支撑梁（2）和谐振器（1）由晶体硅制成。 静电传感器（7,9）用于感测谐振器（1）的移动。 驱动器（6,8）和传感器（7,9）具有由晶体硅制成的板状元件，其具有基本上垂直于谐振器（1）的平面的表面，其间隔与谐振器（1）的相邻外周隔开 ）。 在外周（1b）处的谐振器（1）的厚度与周边（1b）和元件表面（10）之间的间隔（11）的宽度的比率在10:1至 40：1。