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公开(公告)号：US10139230B2
公开(公告)日：2018-11-27
申请号：US15076062
申请日：2016-03-21
IPC分类号： G01C19/5726 , G01C19/5755 , G01C19/5762 , G01C19/5776 , G01P15/125
摘要： The invention relates to a detection circuit for reading out at least one position signal of a micromechanical capacitive sensor having at least one oscillating element that can be excited so as to move in an oscillating manner. In particular, the invention relates to a sensor that is operated in a closed control loop by using the detection circuit according to the invention. The invention further relates to a method for operating such a sensor. During operation, a first input connection of the detection circuit (100) is connected to an output connection of the capacitive sensor (106) and an output connection of the detection circuit (100) is connected to a loop filter of a control loop (102), wherein the control loop feeds back a feedback voltage for providing a restoring force in dependence on an output voltage of the control loop (102) to a second input connection of the detection circuit (100). The detection circuit (100) comprises at least one further feedback branch (Rfb, Cfb), and the output voltage of the control loop (102) is modulated onto an in-phase input voltage of the detection circuit.
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2.发明申请Method and Circuit For The Time-Continuous Detection Of The Position Of The Sensor Mass With Simultaneous Feedback For Capacitive Sensors 审中-公开用于电容式传感器同时反馈的传感器质量位置的时间连续检测的方法和电路公开(公告)号：US20160202061A1
公开(公告)日：2016-07-14
申请号：US15076062
申请日：2016-03-21
IPC分类号： G01C19/5726 , G01C19/5755
CPC分类号： G01C19/5726 , G01C19/5755 , G01C19/5762 , G01C19/5776 , G01P15/125
摘要： The invention relates to a detection circuit for reading out at least one position signal of a micromechanical capacitive sensor having at least one oscillating element that can be excited so as to move in an oscillating manner. In particular, the invention relates to a sensor that is operated in a closed control loop by using the detection circuit according to the invention. The invention further relates to a method for operating such a sensor. During operation, a first input connection of the detection circuit (100) is connected to an output connection of the capacitive sensor (106) and an output connection of the detection circuit (100) is connected to a loop filter of a control loop (102), wherein the control loop feeds back a feedback voltage for providing a restoring force in dependence on an output voltage of the control loop (102) to a second input connection of the detection circuit (100). The detection circuit (100) comprises at least one further feedback branch (Rfb, Cfb), and the output voltage of the control loop (102) is modulated onto an in-phase input voltage of the detection circuit.
摘要翻译： 本发明涉及一种用于读出具有至少一个振荡元件的微机电电容传感器的至少一个位置信号的检测电路，该振荡元件可被激励以便以振荡方式移动。 特别地，本发明涉及通过使用根据本发明的检测电路在闭合控制环路中操作的传感器。 本发明还涉及一种用于操作这种传感器的方法。 在操作期间，检测电路（100）的第一输入连接连接到电容传感器（106）的输出连接，检测电路（100）的输出连接被连接到控制回路（102）的环路滤波器 ），其中所述控制回路反馈反馈电压，以根据所述控制回路（102）的输出电压提供到所述检测电路（100）的第二输入连接的恢复力。 检测电路（100）包括至少一个另外的反馈分支（Rfb，Cfb），并且控制回路（102）的输出电压被调制到检测电路的同相输入电压。
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