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公开(公告)号：US11268828B2
公开(公告)日：2022-03-08
申请号：US16875712
申请日：2020-05-15
发明人： Michael Maurer , Yiannos Manoli
IPC分类号： G01C25/00 , G01C19/5726 , G01C19/5712 , G01C19/5776
摘要： The present invention relates to a circuit arrangement and a method for reading a capacitive vibratory gyroscope with an at least primary mass and at least one secondary mass that is connected to the primary mass, wherein the primary mass is excited to a primary vibration during operation, and wherein the secondary mass is deflected out of a resting position in a direction that is transversal to the primary vibration when the vibratory gyro-scope rotates around a sensitive axis. The circuit arrangement comprises a delta-sigma modulator with at least one control loop to perform a force feedback that resets the secondary mass into its resting state by applying a reset signal, wherein the reset signal forms a modulator output signal of the delta-sigma modulator, a correction unit that receives the modulator output signal and that is operated to generate a corrected modulator output signal that corresponds to an actually acting feedback force, a demodulator that is connected to the correction unit for demodulation of the corrected modulator output signal, and a filter arrangement to filter the demodulated signals and to output a rotary rate signal.
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公开(公告)号：US20200150144A1
公开(公告)日：2020-05-14
申请号：US16682328
申请日：2019-11-13
摘要： A method adapts a resonant frequency of a first filter of a closed control loop to a given frequency. The method includes feeding an output signal of a delta sigma modulator of the closed control loop into a frequency adaptation circuit and determining a first noise spectrum of the output signal in a first frequency band and a second noise spectrum of the output signal in a second frequency band. The first frequency band and the second frequency band are arranged symmetrically with respect to the given frequency. The method includes comparing the first noise spectrum with the second noise spectrum, generating an adaptation signal that causes a frequency adaptation of the resonant frequency if the first noise spectrum differs from the second noise spectrum, and outputting the adaptation signal from the frequency adaptation circuit to a control input of the first filter for adapting the resonant frequency.
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3.发明申请公开(公告)号：US20170276484A1
公开(公告)日：2017-09-28
申请号：US15465216
申请日：2017-03-21
IPC分类号： G01C19/5776 , H03M3/00
CPC分类号： G01C19/5776 , H03M3/402 , H03M3/422 , H03M3/43 , H03M3/458
摘要： The present invention relates to a method for adjusting the resonance frequency of a loop filter in a delta-sigma modulator, e.g. in an angular rate sensor, to a predetermined frequency value, wherein the sigma-delta modulator comprises an input terminal, which is connected to the loop filter, a quantizer, which is connected to an output of the loop filter, and a feedback branch, which couples an output of the quantizer back to the input terminal. The method comprises the following steps: Optional rough adjustment of the resonance frequency of the filter by means of the regulating variable of a second oscillator, input of a filter input signal of the loop filter into a frequency adjustment circuit, determination of a noise spectrum of the filter input signal in a first frequency band and a second frequency band, wherein the first frequency band and the second frequency band are arranged symmetrically around the predetermined frequency, comparison of the noise spectra and creation of an adjustment signal that leads to a frequency adjustment when the noise spectra deviate from one another, and feedback of the adjustment signal of the frequency adjustment circuit to a control input of the loop filter for setting the filter frequency in response to the comparative result.
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公开(公告)号：US10139230B2
公开(公告)日：2018-11-27
申请号：US15076062
申请日：2016-03-21
IPC分类号： G01C19/5726 , G01C19/5755 , G01C19/5762 , G01C19/5776 , G01P15/125
摘要： The invention relates to a detection circuit for reading out at least one position signal of a micromechanical capacitive sensor having at least one oscillating element that can be excited so as to move in an oscillating manner. In particular, the invention relates to a sensor that is operated in a closed control loop by using the detection circuit according to the invention. The invention further relates to a method for operating such a sensor. During operation, a first input connection of the detection circuit (100) is connected to an output connection of the capacitive sensor (106) and an output connection of the detection circuit (100) is connected to a loop filter of a control loop (102), wherein the control loop feeds back a feedback voltage for providing a restoring force in dependence on an output voltage of the control loop (102) to a second input connection of the detection circuit (100). The detection circuit (100) comprises at least one further feedback branch (Rfb, Cfb), and the output voltage of the control loop (102) is modulated onto an in-phase input voltage of the detection circuit.
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5.发明申请公开(公告)号：US20170102248A1
公开(公告)日：2017-04-13
申请号：US15287321
申请日：2016-10-06
发明人： Michael Maurer , Yiannos Manoli
IPC分类号： G01C25/00 , G01C19/5712
CPC分类号： G01C25/005 , G01C19/5712 , G01C19/5726 , G01C19/5776
摘要： The present invention relates to a circuit arrangement and a method for reading a capacitive vibratory gyroscope with an at least primary mass and at least one secondary mass that is connected to the primary mass, wherein the primary mass is excited to a primary vibration during operation, and wherein the secondary mass is deflected out of a resting position in a direction that is transversal to the primary vibration when the vibratory gyroscope rotates around a sensitive axis. The circuit arrangement comprises a delta-sigma modulator with at least one control loop to perform a force feedback that resets the secondary mass into its resting state by applying a reset signal, wherein the reset signal forms a modulator output signal of the delta-sigma modulator, a correction unit that receives the modulator output signal and that is operated to generate a corrected modulator output signal that corresponds to an actually acting feedback force, a demodulator that is connected to the correction unit for demodulation of the corrected modulator output signal, and a filter arrangement to filter the demodulated signals and to output a rotary rate signal.
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6.发明申请公开(公告)号：US20200278219A1
公开(公告)日：2020-09-03
申请号：US16875712
申请日：2020-05-15
发明人： Michael Maurer , Yiannos Manoli
IPC分类号： G01C25/00 , G01C19/5726 , G01C19/5712
摘要： The present invention relates to a circuit arrangement and a method for reading a capacitive vibratory gyroscope with an at least primary mass and at least one secondary mass that is connected to the primary mass, wherein the primary mass is excited to a primary vibration during operation, and wherein the secondary mass is deflected out of a resting position in a direction that is transversal to the primary vibration when the vibratory gyro-scope rotates around a sensitive axis. The circuit arrangement comprises a delta-sigma modulator with at least one control loop to perform a force feedback that resets the secondary mass into its resting state by applying a reset signal, wherein the reset signal forms a modulator output signal of the delta-sigma modulator, a correction unit that receives the modulator output signal and that is operated to generate a corrected modulator output signal that corresponds to an actually acting feedback force, a demodulator that is connected to the correction unit for demodulation of the corrected modulator output signal, and a filter arrangement to filter the demodulated signals and to output a rotary rate signal.
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公开(公告)号：US10677611B2
公开(公告)日：2020-06-09
申请号：US15287321
申请日：2016-10-06
发明人： Michael Maurer , Yiannos Manoli
IPC分类号： B41J3/00 , G01C25/00 , G01C19/5726 , G01C19/5712 , G01C19/5776
摘要： The present invention relates to a circuit arrangement and a method for reading a capacitive vibratory gyroscope with an at least primary mass and at least one secondary mass that is connected to the primary mass, wherein the primary mass is excited to a primary vibration during operation, and wherein the secondary mass is deflected out of a resting position in a direction that is transversal to the primary vibration when the vibratory gyroscope rotates around a sensitive axis. The circuit arrangement comprises a delta-sigma modulator with at least one control loop to perform a force feedback that resets the secondary mass into its resting state by applying a reset signal, wherein the reset signal forms a modulator output signal of the delta-sigma modulator, a correction unit that receives the modulator output signal and that is operated to generate a corrected modulator output signal that corresponds to an actually acting feedback force, a demodulator that is connected to the correction unit for demodulation of the corrected modulator output signal, and a filter arrangement to filter the demodulated signals and to output a rotary rate signal.
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公开(公告)号：US20150268262A1
公开(公告)日：2015-09-24
申请号：US14730659
申请日：2015-06-04
发明人： Stefan Rombach , Maximilian Marx , Yiannos Manoli
CPC分类号： G01P1/04 , G01C19/5726 , G01P3/22
摘要： A circuit for activating a capacitive MEMS structure is provided, with the capacitive MEMS structure having an oscillator element and an electrostatic excitation unit with a first input connection and a second input connection. The circuit includes a high voltage generator, a first pump capacitor, a second pump capacitor, a control unit, and a low voltage operation amplifier. The high voltage generator generates a high voltage and connects to the first input connection and the second input connection. The first pump capacitor is connected to the high voltage generator and includes a first connection connected to the first input connection. The second pump capacitor connects to the high voltage generator and includes a first connection connected to the second input connection. The control unit connects to a second connection of the first pump capacitor and a second connection of the second pump capacitor. The low voltage operation amplifier connects to the control unit.
摘要翻译： 提供了一种用于激活电容式MEMS结构的电路，其中电容MEMS结构具有振荡器元件和具有第一输入连接和第二输入连接的静电激励单元。 该电路包括高压发生器，第一泵电容器，第二泵电容器，控制单元和低电压运算放大器。 高电压发生器产生高电压并连接到第一输入连接和第二输入连接。 第一泵电容器连接到高压发生器并且包括连接到第一输入连接的第一连接。 第二泵电容器连接到高压发生器并且包括连接到第二输入连接的第一连接。 控制单元连接到第一泵电容器的第二连接和第二泵电容器的第二连接。 低压运算放大器连接到控制单元。
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公开(公告)号：US11513135B2
公开(公告)日：2022-11-29
申请号：US16682328
申请日：2019-11-13
IPC分类号： H03L7/093 , G01P3/48 , H03M3/00 , G01C19/5776
摘要： A method adapts a resonant frequency of a first filter of a closed control loop to a given frequency. The method includes feeding an output signal of a delta sigma modulator of the closed control loop into a frequency adaptation circuit and determining a first noise spectrum of the output signal in a first frequency band and a second noise spectrum of the output signal in a second frequency band. The first frequency band and the second frequency band are arranged symmetrically with respect to the given frequency. The method includes comparing the first noise spectrum with the second noise spectrum, generating an adaptation signal that causes a frequency adaptation of the resonant frequency if the first noise spectrum differs from the second noise spectrum, and outputting the adaptation signal from the frequency adaptation circuit to a control input of the first filter for adapting the resonant frequency.
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10.发明授权公开(公告)号：US10533854B2
公开(公告)日：2020-01-14
申请号：US15465216
申请日：2017-03-21
IPC分类号： G01R31/00 , G01C19/5776 , H03M3/00
摘要： A method for adjusting the resonance frequency of a loop filter in a delta-sigma modulator includes input of a filter input signal of a loop filter into a frequency adjustment circuit and determination of a noise spectrum of the filter input signal in a first frequency band and a second frequency band. The first frequency band and the second frequency band are arranged symmetrically around the predetermined frequency. The method includes comparison of the noise spectra and creation of an adjustment signal that leads to a frequency adjustment when the noise spectra deviate from one another. The method also includes feedback of the adjustment signal of the frequency adjustment circuit to a control input of the loop filter for setting the filter frequency in response to the comparative result.
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