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    METHOD FOR CREATING A MAGNETIC WRITE POLE HAVING A STEPPED PERPENDICULAR POLE VIA CMP-ASSISTED LIFTOFF
    1.
    发明申请
    METHOD FOR CREATING A MAGNETIC WRITE POLE HAVING A STEPPED PERPENDICULAR POLE VIA CMP-ASSISTED LIFTOFF 有权
    通过CMP辅助提升器创建具有阶梯式贯穿孔的磁性写入点的方法

    公开(公告)号：US20100155366A1

    公开(公告)日：2010-06-24

    申请号：US12343044

    申请日：2008-12-23

    申请人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Yinshi Liu ,  Vladimir Nikitin ,  Trevor W. Olson ,  Hicham Moulay Sougrati ,  Yuan Yao

    发明人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Yinshi Liu ,  Vladimir Nikitin ,  Trevor W. Olson ,  Hicham Moulay Sougrati ,  Yuan Yao

    IPC分类号： B44C1/22

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

    摘要： A method for manufacturing a magnetic write head having a stepped, recessed, high magnetic moment pole connected with a write pole. The stepped pole structure helps to channel magnetic flux to the write pole without leaking write field to the magnetic medium. This allows the write head to maintain a high write field strength at very small bit sizes. The method includes depositing a dielectric layer and a first CMP layer over substrate that can include a magnetic shaping layer. A mask is formed over the dielectric layer, the mask having an opening to define the stepped pole structure. The image of the mask is transferred into the dielectric layer. A high magnetic moment material is deposited and a chemical mechanical polishing is performed to planarize the magnetic material and dielectric layer.

    摘要翻译： 一种用于制造具有与写入极连接的阶梯式，凹入的高磁矩极的磁性写入头的方法。 阶梯式极点结构有助于将磁通量传递到写入极，而不会将写入场泄漏到磁性介质。 这允许写头在非常小的位尺寸下保持高的写场强度。 该方法包括在可包括磁性成形层的衬底上沉积介电层和第一CMP层。 在电介质层上形成掩模，掩模具有限定阶梯极结构的开口。 掩模的图像被转移到电介质层中。 沉积高磁矩材料并执行化学机械抛光以使磁性材料和电介质层平坦化。

    Method for creating a magnetic write pole having a stepped perpendicular pole via CMP-assisted liftoff
    2.
    发明授权
    Method for creating a magnetic write pole having a stepped perpendicular pole via CMP-assisted liftoff 有权
    通过CMP辅助提升来形成具有阶梯式垂直极的磁性写入极的方法

    公开(公告)号：US08066893B2

    公开(公告)日：2011-11-29

    申请号：US12343044

    申请日：2008-12-23

    申请人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Yinshi Liu ,  Vladimir Nikitin ,  Trevor W. Olson ,  Hicham Moulay Sougrati ,  Yuan Yao

    发明人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Yinshi Liu ,  Vladimir Nikitin ,  Trevor W. Olson ,  Hicham Moulay Sougrati ,  Yuan Yao

    IPC分类号： B44C1/22 ,  B23P15/00

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

    摘要： A method for manufacturing a magnetic write head having a stepped, recessed, high magnetic moment pole connected with a write pole. The stepped pole structure helps to channel magnetic flux to the write pole without leaking write field to the magnetic medium. This allows the write head to maintain a high write field strength at very small bit sizes. The method includes depositing a dielectric layer and a first CMP layer over substrate that can include a magnetic shaping layer. A mask is formed over the dielectric layer, the mask having an opening to define the stepped pole structure. The image of the mask is transferred into the dielectric layer. A high magnetic moment material is deposited and a chemical mechanical polishing is performed to planarize the magnetic material and dielectric layer.

    摘要翻译： 一种用于制造具有与写入极连接的阶梯式，凹入的高磁矩极的磁性写入头的方法。 阶梯式极点结构有助于将磁通量传递到写入极，而不会将写入场泄漏到磁性介质。 这允许写头在非常小的位尺寸下保持高的写场强度。 该方法包括在可包括磁性成形层的衬底上沉积介电层和第一CMP层。 在电介质层上形成掩模，掩模具有限定阶梯极结构的开口。 掩模的图像被转移到电介质层中。 沉积高磁矩材料并执行化学机械抛光以使磁性材料和电介质层平坦化。

    METHODS FOR CREATING A STEPPED PERPENDICULAR MAGNETIC POLE VIA MILLING AND/OR METAL LIFTOFF
    3.
    发明申请
    METHODS FOR CREATING A STEPPED PERPENDICULAR MAGNETIC POLE VIA MILLING AND/OR METAL LIFTOFF 失效
    用于通过铣削和/或金属提升来形成步进的贯通磁体的方法

    公开(公告)号：US20100159154A1

    公开(公告)日：2010-06-24

    申请号：US12341866

    申请日：2008-12-22

    申请人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Vladimir Nikitin ,  Trevor W. Olson ,  John Bruce Piggott, JR. ,  Yuan Yao

    发明人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Vladimir Nikitin ,  Trevor W. Olson ,  John Bruce Piggott, JR. ,  Yuan Yao

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

    摘要： A method in one embodiment includes forming a layer of a nonmagnetic material above an upper surface of a substrate; forming a resist structure above the layer of nonmagnetic material, wherein the resist structure has an undercut; removing a portion of the layer of nonmagnetic material not covered by the resist structure; depositing a layer of magnetic material above the substrate adjacent a remaining portion of the layer of nonmagnetic material such that at least portions of the layer of magnetic material and the remaining portion of the layer of nonmagnetic material lie in a common plane; removing the resist structure; and forming a write pole above the layer of magnetic material and the remaining portion of the layer of nonmagnetic material. Additional methods are also presented.

    摘要翻译： 一个实施例中的方法包括在衬底的上表面上方形成非磁性材料层; 在非磁性材料层之上形成抗蚀剂结构，其中抗蚀剂结构具有底切; 去除未被抗蚀剂结构覆盖的非磁性材料层的一部分; 在所述基板的上方邻近所述非磁性材料层的剩余部分沉积一层磁性材料，使得所述磁性材料层和所述非磁性材料层的剩余部分的至少部分位于公共平面中; 去除抗蚀剂结构; 以及在磁性材料层和非磁性材料层的剩余部分之上形成写入极。 还介绍了其他方法。

    Methods for creating a stepped perpendicular magnetic pole via milling and/or metal liftoff
    4.
    发明授权
    Methods for creating a stepped perpendicular magnetic pole via milling and/or metal liftoff 失效
    通过铣削和/或金属提升创建阶梯式垂直磁极的方法

    公开(公告)号：US08551347B2

    公开(公告)日：2013-10-08

    申请号：US12341866

    申请日：2008-12-22

    申请人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Vladimir Nikitin ,  Trevor W. Olson ,  John Bruce Piggott, Jr. ,  Yuan Yao

    发明人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Vladimir Nikitin ,  Trevor W. Olson ,  John Bruce Piggott, Jr. ,  Yuan Yao

    IPC分类号： G11B5/127 ,  B44C1/22

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

    摘要： A method in one embodiment includes forming a layer of a nonmagnetic material above an upper surface of a substrate; forming a resist structure above the layer of nonmagnetic material, wherein the resist structure has an undercut; removing a portion of the layer of nonmagnetic material not covered by the resist structure; depositing a layer of magnetic material above the substrate adjacent a remaining portion of the layer of nonmagnetic material such that at least portions of the layer of magnetic material and the remaining portion of the layer of nonmagnetic material lie in a common plane; removing the resist structure; and forming a write pole above the layer of magnetic material and the remaining portion of the layer of nonmagnetic material. Additional methods are also presented.

    摘要翻译： 一个实施例中的方法包括在衬底的上表面上方形成非磁性材料层; 在非磁性材料层之上形成抗蚀剂结构，其中抗蚀剂结构具有底切; 去除未被抗蚀剂结构覆盖的非磁性材料层的一部分; 在所述基板的上方邻近所述非磁性材料层的剩余部分沉积一层磁性材料，使得所述磁性材料层和所述非磁性材料层的剩余部分的至少部分位于公共平面中; 去除抗蚀剂结构; 以及在磁性材料层和非磁性材料层的剩余部分之上形成写入极。 还介绍了其他方法。

    Trailing plated step
    7.
    发明授权
    Trailing plated step 有权
    追踪电镀步

    公开(公告)号：US08449752B2

    公开(公告)日：2013-05-28

    申请号：US12569973

    申请日：2009-09-30

    申请人： Christian R. Bonhôte ,  Trevor W. Olson ,  Aron Pentek ,  Thomas J. A. Roucoux

    发明人： Christian R. Bonhôte ,  Trevor W. Olson ,  Aron Pentek ,  Thomas J. A. Roucoux

    IPC分类号： C25D5/02 ,  G11B5/127 ,  G11B5/187

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

    摘要： Methods for fabrication of magnetic write heads, and more specifically to fabrication of magnetic poles and trailing magnetic pole steps. A write pole may first be patterned on a substrate. Then a side gap material may be patterned along sidewall portions of the write pole. Thereafter, a masking layer may be deposited and patterned to expose a portion of the write pole. A trailing magnetic pole step may be formed on the exposed portion of the write pole.

    摘要翻译： 用于制造磁写头的方法，更具体地说是制造磁极和后磁极台阶。 写极可以首先在衬底上图案化。 然后，侧面间隙材料可以沿着写入极的侧壁部分被图案化。 此后，可以沉积和图案化掩模层以暴露写入极的一部分。 可以在写入极的暴露部分上形成尾部磁极台阶。

    TRAILING PLATED STEP
    8.
    发明申请
    TRAILING PLATED STEP 有权
    跟踪步骤

    公开(公告)号：US20110076393A1

    公开(公告)日：2011-03-31

    申请号：US12569973

    申请日：2009-09-30

    申请人： Christian R. Bonhôte ,  Trevor W. Olson ,  Aron Pentek ,  Thomas J. A. Roucoux

    发明人： Christian R. Bonhôte ,  Trevor W. Olson ,  Aron Pentek ,  Thomas J. A. Roucoux

    IPC分类号： G11B5/17

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

    摘要： Methods for fabrication of magnetic write heads, and more specifically to fabrication of magnetic poles and trailing magnetic pole steps. A write pole may first be patterned on a substrate. Then a side gap material may be patterned along sidewall portions of the write pole. Thereafter, a masking layer may be deposited and patterned to expose a portion of the write pole. A trailing magnetic pole step may be formed on the exposed portion of the write pole.

    摘要翻译： 用于制造磁写头的方法，更具体地说是制造磁极和后磁极台阶。 写极可以首先在衬底上图案化。 然后，侧面间隙材料可以沿着写入极的侧壁部分被图案化。 此后，可以沉积和图案化掩模层以暴露写入极的一部分。 可以在写入极的暴露部分上形成尾部磁极台阶。

    MAGNETIC WRITE HEADS FOR HARD DISK DRIVES AND METHOD OF FORMING SAME
    9.
    发明申请
    MAGNETIC WRITE HEADS FOR HARD DISK DRIVES AND METHOD OF FORMING SAME 审中-公开
    用于硬盘驱动器的磁头写头及其形成方法

    公开(公告)号：US20110075299A1

    公开(公告)日：2011-03-31

    申请号：US12569962

    申请日：2009-09-30

    申请人： Trevor W. Olson ,  Aron Pentek ,  Thomas J. A. Roucoux

    发明人： Trevor W. Olson ,  Aron Pentek ,  Thomas J. A. Roucoux

    IPC分类号： G11B5/60 ,  G11B5/127 ,  C23C14/34

    CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/6005

    摘要： Embodiments provide a write pole and a magnetic shield for write heads. The write pole includes a trailing step, while the magnetic shield includes a slanted bump. The slanted bump and the trailing step provides maximize magnetic flux for writing to a magnetic media such as a magnetic storage disk in a hard disk drive, while avoiding saturation. One embodiment of a method for forming the write pole includes depositing non-magnetic gap material on the write pole and trailing step. An ion beam milling process is used to form a taper in the non-magnetic gap material. The magnetic shield is then deposited on the taper, forming the slanted bump of the shield.

    摘要翻译： 实施例提供写磁头的写极和磁屏蔽。 写入极包括后续步骤，而磁屏蔽包括倾斜的凸起。 倾斜凸起和后续步骤提供最大化的磁通量，以便在硬盘驱动器中的磁性介质（例如磁存储盘）上写入，同时避免饱和。 用于形成写入极的方法的一个实施例包括在写入极和后续步骤上沉积非磁隙材料。 使用离子束铣削工艺在非磁隙材料中形成锥形。 磁屏蔽然后沉积在锥形上，形成屏蔽的倾斜凸起。