Apparatus and method for autofocus
    1.
    发明授权
    Apparatus and method for autofocus 有权
    自动对焦的装置和方法

    公开(公告)号:US06486457B1

    公开(公告)日:2002-11-26

    申请号:US09415184

    申请日:1999-10-07

    IPC分类号: G02B2764

    CPC分类号: G02B26/128 G02B7/28 G02B7/32

    摘要: A laser generates a collimated laser beam which passes through a lens off-axis. The beam is focused at a focal plane on a substrate surface. A first position sensitive detector receives the laser beam reflected from the substrate surface through the lens to generate a first signal proportional to lateral beam offset. A beam splitter may be provided to direct a portion of the laser beam before passing through the lens toward a second position sensitive detector to generate a second signal proportional to laser beam pointing instability. Apparatus computes the difference between the first and second signals, the difference being a defocused error signal. It is preferred that the first position sensitive detector be located at a distance from the lens that is at least twice the lens focal length.

    摘要翻译: 激光器产生通过透镜离轴的准直激光束。 光束聚焦在基板表面上的焦平面上。 第一位置敏感检测器接收通过透镜从衬底表面反射的激光束,以产生与横向光束偏移成比例的第一信号。 可以设置分束器以在通过透镜之前将激光束的一部分引向第二位置敏感检测器以产生与激光束指向不稳定性成比例的第二信号。 设备计算第一和第二信号之间的差异,差值是散焦误差信号。 优选的是,第一位置敏感检测器位于离透镜一定距离处,该距离至少是透镜焦距的两倍。

    Apparatus and method for scanning a surface
    4.
    发明授权
    Apparatus and method for scanning a surface 失效
    用于扫描表面的装置和方法

    公开(公告)号:US06902112B2

    公开(公告)日:2005-06-07

    申请号:US10620918

    申请日:2003-07-15

    IPC分类号: G01N21/64 G06K7/14

    CPC分类号: G01N21/6452 G01N2021/6463

    摘要: Apparatus and method for scanning a surface. An optical system generates a light beam to illuminate a surface. A carrier supports the surface for reciprocating motion with respect to the light beam to form one axis of a raster. A propulsion system moves the carrier at a substantially constant speed and a position sensor provides an output signal representing the surface position with respect to the light beam. A control system responsive to the output signal modulates a sample period reciprocally to carrier speed to achieve substantially constant scan length per sample and to control data acquisition timing.

    摘要翻译: 用于扫描表面的装置和方法。 光学系统产生光束照射表面。 载体支撑表面相对于光束往复运动以形成光栅的一个轴。 推进系统以基本恒定的速度移动载体,并且位置传感器提供表示相对于光束的表面位置的输出信号。 响应于输出信号的控制系统将采样周期相互调制为载波速度,以实现每个采样的基本上恒定的扫描长度并且控制数据采集定时。

    Apparatus and method for scanning a surface

    公开(公告)号:US06592036B2

    公开(公告)日:2003-07-15

    申请号:US10124138

    申请日:2002-04-16

    IPC分类号: G06K714

    CPC分类号: G01N21/6452 G01N2021/6463

    摘要: Apparatus and method for scanning a surface. An optical system generates a light beam to illuminate a surface. A carrier supports the surface for reciprocating motion with respect to the light beam to form one axis of a raster. A propulsion system moves the carrier at a substantially constant speed and a position sensor provides an output signal representing the surface position with respect to the light beam. A control system responsive to the output signal modulates a sample period reciprocally to carrier speed to achieve substantially constant scan length per sample and to control data acquisition timing.

    Apparatus and method for scanning a surface

    公开(公告)号:US06371370B1

    公开(公告)日:2002-04-16

    申请号:US09317654

    申请日:1999-05-24

    IPC分类号: G06K714

    摘要: Apparatus and method for scanning a surface. An optical system generates a light beam to illuminate a surface. A carrier supports the surface for reciprocating motion with respect to the light beam to form one axis of a raster. A propulsion system moves the carrier at a substantially constant speed and a position sensor provides an output signal representing the surface position with respect to the light beam. A control system responsive to the output signal modulates a sample period reciprocally to carrier speed to achieve substantially constant scan length per sample and to control data acquisition timing.

    Large dynamic range light detection
    8.
    发明授权
    Large dynamic range light detection 失效
    大动态范围光检测

    公开(公告)号:US06355921B1

    公开(公告)日:2002-03-12

    申请号:US09313102

    申请日:1999-05-17

    IPC分类号: H01J4014

    摘要: System for large dynamic range light detection. In one aspect, the system includes a hybrid counting/integrating system for processing a signal from a photomultiplier tube. In another aspect, large dynamic range is achieved in a cascaded detector system utilizing at least one asymmetric beam splitter for delivering a larger fraction of incident light to one photomultiplier tube and for delivering a smaller fraction of the incident light to another photomultiplier tube.

    摘要翻译: 大动态范围光检测系统。 一方面,该系统包括用于处理来自光电倍增管的信号的混合计数/积分系统。 在另一方面,在级联检测器系统中实现了大的动态范围,该系统利用至少一个非对称分束器将较大部分的入射光传送到一个光电倍增管,并将较小部分的入射光传送到另一个光电倍增管。

    Scanning system with calibrated detection and method

    公开(公告)号:US06740871B1

    公开(公告)日:2004-05-25

    申请号:US10602469

    申请日:2003-06-23

    IPC分类号: G01N2164

    摘要: A self-calibrating scanning system and method are used in the analysis of biomolecules on a microarray. The self-calibrating scanning system comprises an excitation light source, an optical portion, a detection portion and a calibration portion that includes a calibration apparatus and compensation portion. The calibration apparatus comprises a light source having a highly reproducible or calibrated light based on a preselected or reference light level. The calibration apparatus emits the calibrated light that is measured by the detection portion of the scanning equipment. If the detection components are stable, the components will measure a constant output value for the calibrated light over time. As a detection component changes with time, the output value will change for the same calibrated light. The method comprises the steps of initially calibrating the detection portion of the scanning system and subsequently calibrating the detection portion to compensate for sensitivity changes.

    Scanning system with calibrated detection and method
    10.
    发明授权
    Scanning system with calibrated detection and method 失效
    具有校准检测和方法的扫描系统

    公开(公告)号:US06956203B2

    公开(公告)日:2005-10-18

    申请号:US10852904

    申请日:2004-05-24

    IPC分类号: G01N21/27 G01N21/64

    摘要: A self-calibrating scanning system and method are used in the analysis of biomolecules on a microarray. The self-calibrating scanning system comprises an excitation light source, an optical portion, a detection portion and a calibration portion that includes a calibration apparatus and compensation portion. The calibration apparatus comprises a light source having a highly reproducible or calibrated light based on a preselected or reference light level. The calibration apparatus emits the calibrated light that is measured by the detection portion of the scanning equipment. If the detection components are stable, the components will measure a constant output value for the calibrated light over time. As a detection component changes with time, the output value will change for the same calibrated light. The method comprises the steps of initially calibrating the detection portion of the scanning system and subsequently calibrating the detection portion to compensate for sensitivity changes.

    摘要翻译: 自动校准扫描系统和方法用于分析微阵列上的生物分子。 自校准扫描系统包括激发光源,光学部分,检测部分和包括校准装置和补偿部分的校准部分。 校准装置包括基于预选或参考光级别具有高度可再现或校准的光的光源。 校准装置发射由扫描设备的检测部分测量的校准光。 如果检测组件稳定,则组件将随着时间的推移测量校准光的恒定输出值。 当检测组件随时间变化时,相同的校准光的输出值将发生变化。 该方法包括以下步骤:首先校准扫描系统的检测部分,随后校准检测部分以补偿灵敏度变化。