公开(公告)号：US20070114206A1

公开(公告)日：2007-05-24

申请号：US11654669

申请日：2007-01-18

申请人： Andrej Mitrovic ,  Maolin Long ,  Paul Moroz ,  Steven Fink ,  William Jones

发明人： Andrej Mitrovic ,  Maolin Long ,  Paul Moroz ,  Steven Fink ,  William Jones

IPC分类号： G01L21/30

CPC分类号： H01L21/67248 ,  G05D23/1934 ,  H01J37/32522 ,  H01L21/67069 ,  H01L21/67109

摘要： A device and method for controlling the temperature of a plasma chamber inside wall or other surfaces exposed to the plasma by a plurality of temperature control systems. A plasma process within the plasma chamber can be controlled by independently controlling the temperature of segments of the wall or other surfaces.

公开(公告)号：US20070131650A1

公开(公告)日：2007-06-14

申请号：US11654564

申请日：2007-01-18

申请人： Andrej Mitrovic ,  Maolin Long ,  Paul Moroz ,  Steven Fink ,  William Jones

发明人： Andrej Mitrovic ,  Maolin Long ,  Paul Moroz ,  Steven Fink ,  William Jones

IPC分类号： B44C1/22

CPC分类号： H01L21/67248 ,  G05D23/1934 ,  H01J37/32522 ,  H01L21/67069 ,  H01L21/67109

摘要： A device and method for controlling the temperature of a plasma chamber inside wall or other surfaces exposed to the plasma by a plurality of temperature control systems. A plasma process within the plasma chamber can be controlled by independently controlling the temperature of segments of the wall or other surfaces.

摘要翻译： 一种用于通过多个温度控制系统控制暴露于等离子体的壁内或其他表面内的等离子体室的温度的装置和方法。 可以通过独立地控制壁或其它表面的段的温度来控制等离子体室内的等离子体处理。

公开(公告)号：US20070113976A1

公开(公告)日：2007-05-24

申请号：US11654568

申请日：2007-01-18

申请人： Andrej Mitrovic ,  Maolin Long ,  Paul Moroz ,  Steven Fink ,  William Jones

发明人： Andrej Mitrovic ,  Maolin Long ,  Paul Moroz ,  Steven Fink ,  William Jones

IPC分类号： C23F1/00 ,  H01L21/306

CPC分类号： H01L21/67248 ,  G05D23/1934 ,  H01J37/32522 ,  H01L21/67069 ,  H01L21/67109

摘要： A device and method for controlling the temperature of a plasma chamber inside wall or other surfaces exposed to the plasma by a plurality of temperature control systems. A plasma process within the plasma chamber can be controlled by independently controlling the temperature of segments of the wall or other surfaces.

公开(公告)号：US20060060303A1

公开(公告)日：2006-03-23

申请号：US11236535

申请日：2005-09-28

申请人： Steven Fink ,  Paul Moroz ,  Eric Strang ,  Andrej Mitrovic

发明人： Steven Fink ,  Paul Moroz ,  Eric Strang ,  Andrej Mitrovic

IPC分类号： B08B6/00 ,  H01L21/306 ,  C23C16/00

CPC分类号： H01J37/3244 ,  H01J2237/022

摘要： A plasma processing system includes a chamber containing a plasma processing region and a chuck constructed and arranged to support a substrate within the chamber in the processing region. The plasma processing system further includes at least one gas injection passage in communication with the chamber and configured to facilitate removal of particles from the chamber by passing purge gas therethrough. In one embodiment, the plasma processing system can include an electrode configured to attract or repel particles in the chamber by electrostatic force when the electrode is biased with DC or RF power. A method of processing a substrate in a plasma processing system includes removing particles in a chamber of the plasma processing system by supplying purge gas through at least one gas injection passage in communication with the chamber.

摘要翻译： 等离子体处理系统包括容纳等离子体处理区域的腔室和构造和布置成在处理区域内的腔室内支撑衬底的卡盘。 等离子体处理系统还包括至少一个与室连通的气体注入通道，并且构造成便于通过吹扫气体从腔室中除去颗粒。 在一个实施例中，等离子体处理系统可以包括电极，其被配置为当电极用DC或RF功率偏置时通过静电力吸引或排斥腔室中的颗粒。 一种在等离子体处理系统中处理衬底的方法，包括通过与室连通的至少一个气体注入通道供应净化气体来去除等离子体处理系统的腔室中的颗粒。

公开(公告)号：US20050225248A1

公开(公告)日：2005-10-13

申请号：US10811912

申请日：2004-03-30

申请人： Steven Fink ,  Andrej Mitrovic ,  Paula Calabrese

发明人： Steven Fink ,  Andrej Mitrovic ,  Paula Calabrese

IPC分类号： C23C14/00 ,  H01J7/24 ,  H01J17/26 ,  H01J37/32 ,  H01L21/00

CPC分类号： H01L21/67069 ,  H01J37/32458 ,  H01J37/32972

摘要： An optical window deposition shield including a backing plate having a through hole, and a honeycomb structure having a plurality of adjacent cells configured to allow optical viewing through the honeycomb structure. Each cell of the honeycomb structure has an aspect ratio of length to diameter sufficient to impede a processing plasma from traveling through the full length of the cell. A coupling device configured to couple the honeycomb core structure to the backing plate such that the honeycomb structure is aligned with at least a portion of the through hole in the backing plate. The optical window deposition shield shields the optical viewing window of a plasma processing apparatus from contact with the plasma.

摘要翻译： 一种光学窗口沉积屏蔽，包括具有通孔的背板，以及具有多个相邻单元的蜂窝结构，所述多个相邻单元被配置为允许通过蜂窝结构进行光学观察。 蜂窝结构体的每个单元具有足以阻碍加工等离子体行进通过电池整个长度的长度与直径的纵横比。 耦合装置，其被配置为将蜂窝芯结构耦合到背板，使得蜂窝结构与背板中的通孔的至少一部分对齐。 光学窗口沉积屏蔽屏蔽了等离子体处理设备的光学观察窗口与等离子体的接触。

公开(公告)号：US20060191484A1

公开(公告)日：2006-08-31

申请号：US11065065

申请日：2005-02-25

申请人： Andrej Mitrovic ,  Steven Fink

发明人： Andrej Mitrovic ,  Steven Fink

IPC分类号： C23F1/00 ,  C23C16/00

CPC分类号： H01L21/67069 ,  C23F4/00 ,  H01J37/32477

摘要： An apparatus for processing semiconductors includes a processing chamber including a plurality of chamber walls, a substrate holder, positioned within the processing chamber and configured to support the substrate, and a linear displacement device, coupled between a base wall of the plurality of walls and the substrate holder and configured to move the substrate holder relative to the base wall. A shielding part extending from the substrate holder to be in close parallel relation with at least one of the plurality of walls such that a first area of the processing chamber is substantially shielded from a processing environment to which the substrate is exposed.

摘要翻译： 一种用于处理半导体的设备包括处理室，其包括多个室壁，位于处理室内并被配置为支撑衬底的衬底保持器，以及线性位移装置，其连接在多个壁的底壁和 衬底保持器并且构造成相对于底壁移动衬底保持器。 从衬底保持器延伸成与多个壁中的至少一个紧密平行的屏蔽部分，使得处理室的第一区域基本上与衬底暴露于的处理环境屏蔽。

公开(公告)号：US08439757B2

公开(公告)日：2013-05-14

申请号：US13271660

申请日：2011-10-12

申请人： James Russell Hornsby ,  Joseph L. McGowan ,  Michael C. Reynolds ,  Steven Fink ,  Robert W. Jeffway, Jr. ,  Steven R. Casino

发明人： James Russell Hornsby ,  Joseph L. McGowan ,  Michael C. Reynolds ,  Steven Fink ,  Robert W. Jeffway, Jr. ,  Steven R. Casino

IPC分类号： A63F9/24 ,  A63H30/04

CPC分类号： A63H11/00 ,  A63H2200/00

摘要： An entertainment device is configured to receive a limited range wireless signal from at least one other entertainment device when adjacently arranged in close physical proximity to at least one other entertainment device, and to responsively operate in a first mode or a second mode based on whether the other entertainment device is adjacent a first side or second side. In the first mode, the entertainment device initiates one or more wireless activation signals to control an audio/visual element of another entertainment device. In the second mode, the entertainment device receives wireless activation signals from another entertainment device to control activation of an audio/visual element of the receiving entertainment device. Each device is interchangeable between operation in the first mode of controlling at least one other entertainment device and the second mode of being controlled by another entertainment device based on position of one entertainment device relative to the other.

摘要翻译： 娱乐设备被配置为当相邻地布置成与至少一个其他娱乐设备紧密物理接近时，从至少一个其他娱乐设备接收有限范围的无线信号，并且基于是否响应于第一模式或第二模式来响应地操作 其他娱乐装置相邻于第一侧或第二侧。 在第一模式中，娱乐设备启动一个或多个无线激活信号以控制另一娱乐设备的音频/视频元素。 在第二模式中，娱乐装置从另一娱乐装置接收无线激活信号，以控制接收娱乐装置的音频/视频元素的激活。 每个设备可以在控制至少一个其他娱乐设备的第一模式中的操作和基于一个娱乐设备相对于另一娱乐设备的位置由另一个娱乐设备控制的第二模式之间进行互换。

公开(公告)号：US08011994B2

公开(公告)日：2011-09-06

申请号：US12270027

申请日：2008-11-13

申请人： Steven Fink ,  Neil Hamilton ,  Michael Hoeting ,  Yannick Poirier

发明人： Steven Fink ,  Neil Hamilton ,  Michael Hoeting ,  Yannick Poirier

IPC分类号： A63H17/267 ,  A63H18/00

CPC分类号： A63H18/028 ,  A63H18/026

摘要： An aspect of the present invention provides a toy assembly system comprising a central compartment configured to house a plurality of toy bodies, each toy body having magnetic hubs arranged in an outer region of the body. The system can include outer compartments that house ferromagnetic outer components (e.g., ferromagnetic spheres) separate from the toy bodies and a release mechanism configured to release during a single operation a single toy body and a set of outer components, wherein the single toy body and the set of outer components self-assemble and automatically align. Another aspect provides a toy track system comprising a launch portion configured to magnetically retain the magnetic vehicle in a launch position, a release configured to release the vehicle from the launch position, and a track portion coupled to the launch portion and configured to guide the released vehicle along a predetermined path.

摘要翻译： 本发明的一个方面提供一种玩具组合系统，其包括构造成容纳多个玩具体的中央室，每个玩具本体具有布置在身体的外部区域中的磁性轮毂。 系统可以包括容纳与玩具主体分开的铁磁外部部件（例如，铁磁球体）的外部隔室和被配置为在单个操作期间释放单个玩具主体和一组外部部件的释放机构，其中，单个玩具主体和 外部组件的组合自组装并自动对齐。 另一方面提供了一种玩具轨道系统，其包括被配置为将磁性车辆磁性地保持在发射位置的发射部分，被配置为将发射位置释放车辆的释放部以及耦合到发射部分的轨道部分， 车辆沿预定路径。

公开(公告)号：US20060225654A1

公开(公告)日：2006-10-12

申请号：US11091775

申请日：2005-03-29

申请人： Steven Fink

发明人： Steven Fink

IPC分类号： C23F1/00 ,  C23C16/00

CPC分类号： H01L21/67069 ,  C04B30/02 ,  H01J37/32477 ,  C04B14/06 ,  C04B14/303 ,  C04B14/306 ,  C04B14/46 ,  C04B14/38

摘要： The present invention provides a disposable component for a plasma processing system, wherein the component includes a non-refractory ceramic fiber, refractory ceramic fiber, alumina, alumina-silica, or zirconia, or any combination of two or more thereof in the form of a rigid material, flexible material, paper, cloth, felt, mat, screen, sheet, tape, blanket, fiber, woven fiber, or nonwoven fiber, or any combination of two or more thereof.

摘要翻译： 本发明提供了一种用于等离子体处理系统的一次性部件，其中所述部件包括非耐火陶瓷纤维，耐火陶瓷纤维，氧化铝，氧化铝 - 二氧化硅或氧化锆，或其两种或多种的任何组合，其形式为 刚性材料，柔性材料，纸，布，毡，垫，丝网，片，带，毯，纤维，编织纤维或非织造纤维，或其两种或多种的任意组合。

公开(公告)号：US20050220568A1

公开(公告)日：2005-10-06

申请号：US10813067

申请日：2004-03-31

申请人： Steven Fink

发明人： Steven Fink

IPC分类号： F16B5/10 ,  F16B21/00 ,  F16B21/02

CPC分类号： F16B21/02 ,  F16B5/10

摘要： A fastening component for fastening together a first component and a second component used in a plasma processing tool. The fastening component includes a first surface configured to be exposed to plasma processing performed in the plasma processing tool, and a second surface configured to contact the first component. Also included is a stem extending from the second surface and configured to at least partially protrude through the first component and the second component. The fastening component further includes a locking pin extending from at least one side of the stem and configured to contact the second component. The first surface, the second surface, the stem, and/or the locking pin are made of or coated with a material that is highly resistant to erosion resulting from plasma processing.

摘要翻译： 用于将第一部件和用于等离子体处理工具中的第二部件紧固在一起的紧固部件。 紧固部件包括构造成暴露于等离子体处理工具中执行的等离子体处理的第一表面和被配置为接触第一部件的第二表面。 还包括从第二表面延伸并构造成至少部分地突出穿过第一部件和第二部件的杆。 紧固部件还包括从杆的至少一侧延伸并构造成接触第二部件的锁定销。 第一表面，第二表面，杆和/或锁定销由对等离子体处理产生的侵蚀高度抵抗的材料制成或涂覆。