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    END EFFECTOR TO SUBSTRATE OFFSET DETECTION AND CORRECTION
    3.
    发明申请
    END EFFECTOR TO SUBSTRATE OFFSET DETECTION AND CORRECTION 审中-公开
    终止效应以抵消偏移检测和校正

    公开(公告)号：US20100034621A1

    公开(公告)日：2010-02-11

    申请号：US12432359

    申请日：2009-04-29

    申请人： Raymond S. Martin ,  Anthony C. Bonora ,  Michael Krolak

    发明人： Raymond S. Martin ,  Anthony C. Bonora ,  Michael Krolak

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67772 ,  H01L21/67265 ,  H01L21/68707

    摘要： A port door providing an interface into a processing tool is provided. The port door includes first and second arms pivotably mounted on a top edge of the port door. The first and second arms are configured to extend from a plane of the port door towards a carrier containing substrates for the processing tool. The first arm has an emitter transmitting a beam that is split into a plurality of sub-beams within the first arm. The second arm has a plurality of sensors receiving corresponding sub-beams, wherein one of sub-beams provides information as to a position of an end effector relative to a gap between the substrates in the carrier.

    摘要翻译： 提供了一种提供加工工具的接口的端口门。 端口门包括可枢转地安装在端口门的顶部边缘上的第一和第二臂。 第一和第二臂构造成从端口门的平面延伸到包含用于处理工具的基底的载体。 第一臂具有发射器的发射器，该射束分裂成第一臂内的多个子光束。 第二臂具有多个传感器，其接收对应的子光束，其中一个子光束提供关于末端执行器相对于载体中的基板之间的间隙的位置的信息。

    Interface between conveyor and semiconductor process tool load port
    4.
    发明授权
    Interface between conveyor and semiconductor process tool load port 有权
    输送机和半导体加工工具加载口之间的接口

    公开(公告)号：US07771151B2

    公开(公告)日：2010-08-10

    申请号：US11178072

    申请日：2005-07-08

    申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    IPC分类号： H01L21/68

    CPC分类号： H01L21/67766 ,  H01L21/67736 ,  H01L21/67769 ,  H01L21/67775 ,  Y10S414/14 ,  Y10T74/20305

    摘要： The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.

    摘要翻译： 本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。 工具装载设备可以服务于单个装载端口或多个装载端口。 无论如何，工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。 工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。 在另一个实施例中，工具装载装置与x驱动组件联接，该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个 加载端口。

    Direct tool loading
    5.
    发明授权
    Direct tool loading 失效
    直接加载工具

    公开(公告)号：US07410340B2

    公开(公告)日：2008-08-12

    申请号：US11064880

    申请日：2005-02-24

    申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    IPC分类号： B65G1/133

    CPC分类号： H01L21/67775 ,  H01L21/67736 ,  Y10S414/14

    摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.

    摘要翻译： 本发明包括容器运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。

    Workpiece handling robot
    6.
    发明授权
    Workpiece handling robot 有权
    工件处理机器人

    公开(公告)号：US06634851B1

    公开(公告)日：2003-10-21

    申请号：US09483625

    申请日：2000-01-14

    申请人： Anthony C. Bonora ,  Roger G. Hine ,  Michael Krolak ,  John F. Grilli

    发明人： Anthony C. Bonora ,  Roger G. Hine ,  Michael Krolak ,  John F. Grilli

    IPC分类号： B25J1804

    CPC分类号： H01L21/68707 ,  B25J9/042 ,  B25J9/104 ,  B25J18/02 ,  B25J18/04 ,  B25J19/0079 ,  H01L21/67742 ,  Y10T74/20323

    摘要： A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link. An elbow drive is mounted to the proximal link, extending down into the mast section, for driving rotation of the distal link with respect to the proximal link. Torque is transmitted from the elbow drive to the distal link by steel straps wrapped around a drive pulley from the elbow drive and a driven pulley in the distal link. Similarly, torque is transmitted from the distal link to the end effector via a second set of steel straps wrapped around pulleys provided in the distal link and end effector, respectively.

    摘要翻译： 公开了一种晶片处理机器人，用于在晶片制造厂内的工艺工具和/或工件存储位置之间输送诸如半导体晶片和平板显示器的工件。 机器人包括一个底座，它包括一个刚性骨架，为机器人提供了很大程度的结构稳定性。 基座还包括桅杆，用于平移桅杆的线性驱动系统和用于旋转桅杆的台肩驱动系统。 肩部驱动系统包括用于提供桅杆部分的刚性，平滑和精确的输出旋转的谐波驱动减速系统。 机器人还包括固定地安装到桅杆上以使桅杆旋转的近端链节和可旋转地安装到近端连杆的远端连杆。 用于支撑各种工件的端部执行器旋转地安装到远端连杆的远端。 肘部驱动器安装到近端连杆，向下延伸到桅杆部分中，用于驱动远端连杆相对于近端连杆的旋转。 扭矩由弯头驱动器和远端连杆的从动皮带轮缠绕在驱动皮带轮周围的钢带从弯头传动装置传递到远端连杆。 类似地，扭矩通过分别缠绕在设置在远端连杆和端部执行器中的滑轮周围的第二组钢带从远端连杆传递到末端执行器。

    Universal modular wafer transport system
    7.
    发明授权
    Universal modular wafer transport system 有权
    通用模块化晶圆输送系统

    公开(公告)号：US07841820B2

    公开(公告)日：2010-11-30

    申请号：US11938236

    申请日：2007-11-09

    申请人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

    发明人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

    IPC分类号： B65G54/02

    CPC分类号： H01L21/67778 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/68707 ,  Y10S414/139

    摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.

    摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内行进的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。

    Variable lot size load port
    8.
    发明授权
    Variable lot size load port 失效
    可变批量负载端口

    公开(公告)号：US07597523B2

    公开(公告)日：2009-10-06

    申请号：US11774750

    申请日：2007-07-09

    申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine ,  Theodore W. Rogers

    发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine ,  Theodore W. Rogers

    IPC分类号： B65G49/07

    CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

    摘要： A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.

    摘要翻译： 可变批量装载端口组件包括工具接口，前进板和密封板。 工具界面大致垂直延伸，并且具有前表面，大体平行于前表面的后表面和孔。 前进板位于孔下方的工具界面的前部。 前进板大致水平地延伸并且被配置为支撑前开口统一舱（FOUP）。 推进板在缩回位置和高级位置之间平移。 前进位置靠近工具界面，缩回位置与工具界面间隔开。 密封板具有固定到工具接口的上端，并且下端覆盖孔的一部分以形成减小的孔。 密封板成形为与安装到前进板的选定容量的FOUP的前凸缘形成邻近密封件并且被带到前进位置。

    Direct tool loading
    9.
    发明授权
    Direct tool loading 失效
    直接加载工具

    公开(公告)号：US07445415B2

    公开(公告)日：2008-11-04

    申请号：US11177645

    申请日：2005-07-08

    申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    IPC分类号： B65G1/133

    CPC分类号： H01L21/67775 ,  H01L21/67736 ,  Y10S414/14

    摘要： The present invention comprises a load port for providing access to an article that is stored in a container having a container door removably coupled to a container shell. The load port preferably loads/unloads a container directly from a container transport system. In one embodiment, the load port includes a plate having an opening, a container support plate, a drive assembly for moving the support plate vertically and a shroud to partially enclose the opening. The shroud, which may be affixed to the mounting plate, has an open top and bottom. The shroud contains a mechanism for retaining the container shell at a controllable height. During operation, a container is raised from the transport system into the shroud until the container shell is retained by the mechanism. After the container shell is uncoupled from the container door, the container support plate is lowered until the article is accessible through the opening. The container shell remains located at the controllable height. The container shell, in combination with the shroud, creates a mini-environment isolating the article from ambient conditions in the fabrication facility.

    摘要翻译： 本发明包括一个负载端口，用于提供对存储在具有可拆卸地联接到容器壳体的容器门的容器中的物品的通路。 负载端口优选地从容器运输系统直接装载/卸载容器。 在一个实施例中，负载端口包括具有开口的板，容器支撑板，用于垂直移动支撑板的驱动组件和用于部分地封闭开口的护罩。 可以固定到安装板的护罩具有敞开的顶部和底部。 护罩包含用于将容器壳保持在可控高度的机构。 在操作期间，容器从运输系统升起到护罩中，直到容器壳体被机构保持。 在容器壳与容器门分离后，容器支撑板被降低直到制品通过开口接近。 容器壳保持位于可控高度。 容器壳与护罩组合形成了将制品与制造设备中的环境条件隔离的迷你环境。