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公开(公告)号：US4739298A
公开(公告)日：1988-04-19
申请号：US706889
申请日：1985-02-28
CPC分类号： G01L9/0055 , Y10T29/49103
摘要： A high temperature transducer consists of a first section having a base layer of monocrystalline silicon which layer is coated with an oxide. A thin layer of a high temperature glass is sputtered on the oxide layer of the base layer. A second section is formed by diffusing a wafer of N type silicon to form a p+ layer. The first and second sections are bonded together by an anodic bond where the p+ layer is secured to the glass layer to form a composite structure. The N type material is then removed and piezoresistive deivces are formed in the p+ layer. This structure provides a high temperature transducer which exhibits stable operating parameters over a wide operating range.
摘要翻译： 高温换能器由具有单层硅基底层的第一部分组成，该层被氧化物涂覆。 将高温玻璃的薄层溅射在基底层的氧化物层上。 通过扩散N型硅晶片形成p +层来形成第二部分。 第一和第二部分通过阳极结合在一起，其中p +层被固定到玻璃层以形成复合结构。 然后去除N型材料并在p +层中形成压阻电流。 该结构提供了一个在宽工作范围内表现出稳定运行参数的高温换能器。
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公开(公告)号：US4483196A
公开(公告)日：1984-11-20
申请号：US472851
申请日：1983-03-07
CPC分类号： G01L9/0052 , G01L9/0002
摘要： A pressure transducer employs a tubular glass structure of a "D" shaped cross section, with the arcuate section of the "D" shaped configuration being substantially thicker than the base section. A sensor array is positioned on the underside of the base section while a pressure conducting fluid is directed through the tubular member to provide deflection of the base to cause the sensor array to provide an output indicative of pressure variations in the fluid medium. The sensor array as positioned on the underside of the base is both electrically and mechanically isolated from the pressure conducting medium.
摘要翻译： 压力传感器采用“D”形横截面的管状玻璃结构，“D”形构造的弓形部分基本上比基部部分厚。 传感器阵列定位在基部的下侧，同时压力传导流体被引导通过管状构件以提供基部的偏转，以使传感器阵列提供指示流体介质中的压力变化的输出。 位于基座下侧的传感器阵列与导电介质电气和机械隔离。
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公开(公告)号：US4236137A
公开(公告)日：1980-11-25
申请号：US21960
申请日：1979-03-19
CPC分类号： G01L9/0054 , G01L9/0042
摘要： A pressure transducer employs a semiconductor diaphragm with a top surface having located thereon a central boss area of a trapezoidal cross section surrounded or "framed" by a continuous groove of a predetermined width. Piezoresistive sensors are formed on the bottom surface of said diaphragm with a first sensor adjacent the outer edge of said groove and another sensor parallel to said first sensor and adjacent the inner edge of said groove, said groove operative as a stress concentrating area to enable said sensors to provide a relatively large linear output upon application of a force to said diaphragm.
摘要翻译： 压力传感器采用半导体膜片，其上表面具有由预定宽度的连续凹槽包围或“框起”的梯形横截面的中心凸台区域。 压电传感器形成在所述隔膜的底表面上，第一传感器邻近所述槽的外边缘，另一个传感器平行于所述第一传感器并与所述槽的内边缘相邻，所述凹槽用作应力集中区域，以使所述 传感器，以在向所述隔膜施加力时提供相对较大的线性输出。
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4.发明授权Semiconductor pressure transducer or other product employing layers of single crystal silicon 失效半导体压力传感器或采用单晶硅层的其他产品
公开(公告)号：US4406992A
公开(公告)日：1983-09-27
申请号：US255461
申请日：1981-04-20
CPC分类号： G01L1/2293 , G01L9/0055
摘要： A monocrystalline silicon substrate has formed on a surface a grating pattern manifested by a series of parallel grooves, a layer of dielectric is thermally grown on said surface to replicate said pattern on an opposite surface of said dielectric and a layer of silicon deposited on said opposite surface of said dielectric is single crystal silicon determined by said grating. The structure formed enables the deposited single crystal layer to be selectively treated to provide at least one piezoresistive sensing element to thereby provide a transducer having both the force collector or substrate and the sensing elements of single crystal silicon and dielectrically isolated by means of said dielectric layer.
摘要翻译： 单晶硅衬底在表面上形成由一系列平行凹槽表现的光栅图案，电介质层在所述表面上热生长以在所述电介质的相对表面上复制所述图案，并且沉积在所述相对面上的硅层 所述电介质的表面是由所述光栅确定的单晶硅。 所形成的结构使得能够选择性地处理沉积的单晶层以提供至少一个压阻感测元件，从而提供具有集电器或基板以及单晶硅的感测元件的换能器，并通过所述介电层介电隔离 。
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公开(公告)号：US4476726A
公开(公告)日：1984-10-16
申请号：US409537
申请日：1982-08-19
CPC分类号： G01L9/0054
摘要： A bridge array employing piezoresistive sensors responsive to the longitudinal piezoresistive effect generally exhibits a positive nonlinearity over a pressure range, while a bridge array employing piezoresistive sensors employing the transverse piezoresistive effect exhibits a negative nonlinearity over the pressure range. A composite pressure transducer is provided by interconnecting a longitudinal and transverse bridge array in a common composite configuration. The resulting transducer exhibits linear operation over the pressure range due to the cancellation of said nonlinearities from the connected arrays.
摘要翻译： 使用响应于纵向压阻效应的压阻式传感器的桥式阵列通常在压力范围内呈现正的非线性，而采用压阻式传感器的桥式阵列采用横向压阻效应，在压力范围内呈现负的非线性。 复合压力传感器通过将公共复合结构中的纵向和横向桥接阵列相互连接来提供。 由于所连接的阵列的所述非线性的消除，所得的换能器在压力范围内呈现线性运行。
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公开(公告)号：US4456901A
公开(公告)日：1984-06-26
申请号：US298275
申请日：1981-08-31
IPC分类号： G01L1/22 , G01L9/00 , H01L21/265 , H01L21/762 , H01L29/84
CPC分类号： G01L1/2293 , G01L9/0055 , H01L21/26506 , H01L21/76243 , H01L29/84
摘要： A transducer structure is disclosed which comprises a single crystal semiconductor diaphragm dielectrically isolated by a layer of silicon dioxide from a single crystal gage configuration. The methods depicted employ high dose oxygen which is ion implanted into a monocrystalline wafer to form a buried layer of silicon dioxide with the top surface of the wafer being monocrystalline silicon. An additional layer of silicon is epitaxially grown on the top of the wafer to enable the etching or formation of a desired gage pattern.
摘要翻译： 公开了一种换能器结构，其包括通过单晶计配置的二氧化硅层介电隔离的单晶半导体隔膜。 所描述的方法使用高剂量氧，其被离子注入到单晶晶片中以形成二氧化硅的掩埋层，其中晶片的顶表面是单晶硅。 在晶片的顶部外延生长附加的硅层，以便蚀刻或形成期望的量具图案。
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公开(公告)号：US4445108A
公开(公告)日：1984-04-24
申请号：US425244
申请日：1982-09-28
CPC分类号： G01L9/0055
摘要： There is disclosed a spreading resistance piezoresistive transducer which employs a planar diaphragm member fabricated from a semiconductor material and having deposited on a surface thereof at least three contact areas. A first contact area is located central to the diaphragm with a second area near the periphery of the diaphragm. A third contact is of a larger area and is positioned between the first and second contacts. A source of biasing potential is applied between the first and second contacts to cause current flow indicative of the spreading resistance between the contacts. The value of the spreading resistance varies in accordance with a force applied to the diaphragm.
摘要翻译： 公开了一种扩展电阻压阻式换能器，其使用由半导体材料制造并且在其表面上沉积至少三个接触区域的平面隔膜构件。 第一接触区域位于隔膜的中心，具有靠近隔膜周边的第二区域。 第三触点具有较大的面积并位于第一和第二触点之间。 偏置电位源施加在第一和第二触点之间以引起指示触点之间的扩展电阻的电流。 扩展电阻的值根据施加到隔膜的力而变化。
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公开(公告)号：US4764747A
公开(公告)日：1988-08-16
申请号：US124089
申请日：1987-11-23
CPC分类号： G01L19/0645 , G01L19/147
摘要： A glass header structure for a pressure transducer employs a cylindrical member fabricated from a borosilicate glass having a thermal expansion coefficient which matches silicon. The glass header has a central aperture which extends from the top to the bottom surface. Positioned about the central aperture are four smaller apertures located at 90 degree intervals and each containing an elongated terminal pin. The pins are of a nail head configuration with a flat top head of a larger diameter than the diameter of the apertures and of the main pin body. Affixed to the flat top surfaces of the terminal pins by means of ball bonding are wires which connect to the terminal areas of a semiconductor pressure transducer which is mounted over the central aperture of the header. In this manner, the glass header serves to electrically and mechanically isolate the semiconductor transducer from the external environment and to further provide isolation of the transducer from voltage and heating effects which are produced during the assembly process necessary to fabricate a complete transducer unit.
摘要翻译： 用于压力传感器的玻璃头部结构采用由具有与硅相匹配的热膨胀系数的硼硅酸盐玻璃制成的圆柱形构件。 玻璃头部具有从顶部延伸到底部表面的中心孔。 围绕中心孔定位的是四个较小的孔，位于90度的间隔处，每个孔包含细长的端子销。 销具有指甲头构型，其具有直径大于孔和主销体直径的平顶头。 通过滚珠接合固定在端子销的平坦顶面上的是连接到安装在集管的中心孔上的半导体压力传感器的端子区域的导线。 以这种方式，玻璃接头用于将半导体换能器与外部环境电气和机械隔离，并进一步提供换能器与制造完整换能器单元所需组装过程中产生的电压和加热效应的隔离。
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公开(公告)号：US4481497A
公开(公告)日：1984-11-06
申请号：US437109
申请日：1982-10-27
CPC分类号： G01L19/148 , G01L9/0055 , Y10T29/49103
摘要： A hybrid transducer employing a ceramic substrate having on a surface a suitable geometry for defining an active or clamped area, a semiconductor strain gage is positioned on said substrate within said active area and connections are made to said gage by conductors printed on said substrate by thick or thin film techniques. Thick film printing techniques or thin film deposition techniques are employed to print the conductors, terminal areas, compensating resistors and stop members.
摘要翻译： 一种采用陶瓷衬底的混合传感器，其在表面上具有用于限定有源或夹紧区域的合适几何形状，半导体应变计定位在所述有源区域内的所述衬底上，并且通过厚度印刷在所述衬底上的导体与所述量规连接 或薄膜技术。 使用厚膜印刷技术或薄膜沉积技术来印刷导体，端子区域，补偿电阻器和阻挡件。
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公开(公告)号：US4516430A
公开(公告)日：1985-05-14
申请号：US558033
申请日：1983-12-05
IPC分类号： A61B5/0215 , A61B5/0428 , G01L9/00 , G01L1/22
CPC分类号： A61B5/04282 , A61B5/0215 , G01L9/0055
摘要： There is disclosed a medical transducer apparatus which employs composite planar members each of which is fabricated from a highly insulative material. The members are positioned in congruency and a first member which may be a composite member has a diaphragm area located on the surface thereof to which a piezoresistive gage is bonded. The gage is surrounded by an aperture in another member to enable leads from the gage to be directed to an interconnection and circuit board also fabricated from an insulator material. The structure provides isolation to the patient in regard to the biasing source used for the gage array and also provides isolation based on external voltage which serves to protect the transducer during operation.
摘要翻译： 公开了一种医疗用换能器装置，其采用由高绝缘材料制成的复合平面构件。 构件一致地定位，并且可以是复合构件的第一构件具有位于其压电压力表所粘合的表面上的隔膜区域。 量具被另一个构件中的孔包围，以使得量具的引线被引导到也由绝缘体材料制成的互连和电路板。 该结构提供了与用于量具阵列的偏置源相对于患者的隔离，并且还提供了基于外部电压的隔离，其用于在操作期间保护换能器。
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