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公开(公告)号：US20170089942A1
公开(公告)日：2017-03-30
申请号：US14866378
申请日：2015-09-25
Applicant: Apple Inc.
Inventor： Kuan-Lin Chen , Yun-Ju Lai
IPC: G01P15/08 , G01C19/5783 , G01P15/097
CPC classification number: G01P15/0802 , G01C19/5783 , G01P15/08 , G01P2015/0882
Abstract: Mechanical low pass filters for motion sensors and methods for making same are disclosed. In some implementations, a motion sensor package comprises: a substrate; one or more mechanically compliant dampers formed on the substrate; one or more mechanically compliant metal springs formed on the one or more dampers and the substrate; and a sensor stack attached to the one or more metal springs, wherein the one or more metal springs and dampers provide a mechanical suspension system having a resonant frequency that is higher than a sensing bandwidth of a motion sensor in the sensor stack and lower than a resonant frequency of the motion sensor.
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公开(公告)号：US20170089943A1
公开(公告)日：2017-03-30
申请号：US15210838
申请日：2016-07-14
Applicant: Apple Inc.
Inventor： Kuan-Lin Chen , Yun-Ju Lai
IPC: G01P15/08 , G01C19/5783 , G01P15/097
CPC classification number: G01P15/0802 , B81B7/0048 , B81B2201/0235 , B81B2201/0242 , G01C19/5783 , G01P1/003 , G01P2015/0882 , H01L2224/48091 , H01L2924/00014
Abstract: Mechanical low pass filters for motion sensors and methods for making the same are disclosed. In an implementation, a motion sensor package comprises: a substrate; one or more viscous dampers formed on the substrate; one or more mechanically compliant metal springs formed on the substrate; and a sensor stack attached to the one or more metal springs, the sensor stack overlying the one or more viscous dampers and forming a gap between the sensor stack and the one or more viscous dampers and channels between the one or more viscous dampers and metal springs, wherein the one or more metal springs and the one or more viscous dampers provide a mechanical suspension system having a resonant frequency that is higher than a sensing bandwidth of a motion sensor in the sensor stack and lower than a resonant frequency of the motion sensor.
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公开(公告)号：US10345330B2
公开(公告)日：2019-07-09
申请号：US15210838
申请日：2016-07-14
Applicant: Apple Inc.
Inventor： Kuan-Lin Chen , Yun-Ju Lai
IPC: G01P1/00 , G01P15/00 , G01P15/08 , G01C19/5783 , B81B7/00
Abstract: Mechanical low pass filters for motion sensors and methods for making the same are disclosed. In an implementation, a motion sensor package comprises: a substrate; one or more viscous dampers formed on the substrate; one or more mechanically compliant metal springs formed on the substrate; and a sensor stack attached to the one or more metal springs, the sensor stack overlying the one or more viscous dampers and forming a gap between the sensor stack and the one or more viscous dampers and channels between the one or more viscous dampers and metal springs, wherein the one or more metal springs and the one or more viscous dampers provide a mechanical suspension system having a resonant frequency that is higher than a sensing bandwidth of a motion sensor in the sensor stack and lower than a resonant frequency of the motion sensor.
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公开(公告)号：US10324105B2
公开(公告)日：2019-06-18
申请号：US14866378
申请日：2015-09-25
Applicant: Apple Inc.
Inventor： Kuan-Lin Chen , Yun-Ju Lai
Abstract: Mechanical low pass filters for motion sensors and methods for making same are disclosed. In some implementations, a motion sensor package comprises: a substrate; one or more mechanically compliant dampers formed on the substrate; one or more mechanically compliant metal springs formed on the one or more dampers and the substrate; and a sensor stack attached to the one or more metal springs, wherein the one or more metal springs and dampers provide a mechanical suspension system having a resonant frequency that is higher than a sensing bandwidth of a motion sensor in the sensor stack and lower than a resonant frequency of the motion sensor.
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