公开(公告)号：US20170089942A1

公开(公告)日：2017-03-30

申请号：US14866378

申请日：2015-09-25

申请人： Apple Inc.

发明人： Kuan-Lin Chen ,  Yun-Ju Lai

IPC分类号： G01P15/08 ,  G01C19/5783 ,  G01P15/097

CPC分类号： G01P15/0802 ,  G01C19/5783 ,  G01P15/08 ,  G01P2015/0882

摘要： Mechanical low pass filters for motion sensors and methods for making same are disclosed. In some implementations, a motion sensor package comprises: a substrate; one or more mechanically compliant dampers formed on the substrate; one or more mechanically compliant metal springs formed on the one or more dampers and the substrate; and a sensor stack attached to the one or more metal springs, wherein the one or more metal springs and dampers provide a mechanical suspension system having a resonant frequency that is higher than a sensing bandwidth of a motion sensor in the sensor stack and lower than a resonant frequency of the motion sensor.

公开(公告)号：US20170089943A1

公开(公告)日：2017-03-30

申请号：US15210838

申请日：2016-07-14

申请人： Apple Inc.

发明人： Kuan-Lin Chen ,  Yun-Ju Lai

IPC分类号： G01P15/08 ,  G01C19/5783 ,  G01P15/097

CPC分类号： G01P15/0802 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5783 ,  G01P1/003 ,  G01P2015/0882 ,  H01L2224/48091 ,  H01L2924/00014

摘要： Mechanical low pass filters for motion sensors and methods for making the same are disclosed. In an implementation, a motion sensor package comprises: a substrate; one or more viscous dampers formed on the substrate; one or more mechanically compliant metal springs formed on the substrate; and a sensor stack attached to the one or more metal springs, the sensor stack overlying the one or more viscous dampers and forming a gap between the sensor stack and the one or more viscous dampers and channels between the one or more viscous dampers and metal springs, wherein the one or more metal springs and the one or more viscous dampers provide a mechanical suspension system having a resonant frequency that is higher than a sensing bandwidth of a motion sensor in the sensor stack and lower than a resonant frequency of the motion sensor.

公开(公告)号：US20160159638A1

公开(公告)日：2016-06-09

申请号：US14502835

申请日：2014-09-30

申请人： Apple Inc.

发明人： Kuan-Lin Chen ,  Richard Yeh

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/0086

摘要： An electronic device may include components that are formed using microelectromechanical systems (MEMS) technology. A MEMS device may include a MEMS structure bonded to a semiconductor substrate. The MEMS structure may be formed from a silicon substrate having a cavity and a moveable member suspended over the cavity and free to oscillate within the cavity. The semiconductor substrate may be a complementary metal-oxide semiconductor substrate having circuitry such as sensing electrodes. The sensing electrodes may be used to gather signals that are produced by movement of the suspended member. One or more of the electrodes on the semiconductor substrate may be covered by a dielectric film to prevent electrical shorts between adjacent electrodes on the semiconductor substrate.

摘要翻译： 电子设备可以包括使用微机电系统（MEMS）技术形成的组件。 MEMS器件可以包括结合到半导体衬底的MEMS结构。 MEMS结构可以由具有空腔的硅衬底和悬挂在空腔上的可移动构件形成并且在空腔内自由振荡。 半导体衬底可以是具有诸如感测电极的电路的互补金属氧化物半导体衬底。 感测电极可用于收集通过悬挂构件的运动产生的信号。 半导体衬底上的一个或多个电极可被绝缘膜覆盖，以防止半导体衬底上的相邻电极之间的电短路。

公开(公告)号：US10345330B2

公开(公告)日：2019-07-09

申请号：US15210838

申请日：2016-07-14

申请人： Apple Inc.

发明人： Kuan-Lin Chen ,  Yun-Ju Lai

IPC分类号： G01P1/00 ,  G01P15/00 ,  G01P15/08 ,  G01C19/5783 ,  B81B7/00

摘要： Mechanical low pass filters for motion sensors and methods for making the same are disclosed. In an implementation, a motion sensor package comprises: a substrate; one or more viscous dampers formed on the substrate; one or more mechanically compliant metal springs formed on the substrate; and a sensor stack attached to the one or more metal springs, the sensor stack overlying the one or more viscous dampers and forming a gap between the sensor stack and the one or more viscous dampers and channels between the one or more viscous dampers and metal springs, wherein the one or more metal springs and the one or more viscous dampers provide a mechanical suspension system having a resonant frequency that is higher than a sensing bandwidth of a motion sensor in the sensor stack and lower than a resonant frequency of the motion sensor.

公开(公告)号：US10324105B2

公开(公告)日：2019-06-18

申请号：US14866378

申请日：2015-09-25

申请人： Apple Inc.

发明人： Kuan-Lin Chen ,  Yun-Ju Lai

IPC分类号： G01P15/00 ,  G01P1/00 ,  G01P1/02 ,  G01P15/08 ,  G01C19/5783 ,  G01P15/02

摘要： Mechanical low pass filters for motion sensors and methods for making same are disclosed. In some implementations, a motion sensor package comprises: a substrate; one or more mechanically compliant dampers formed on the substrate; one or more mechanically compliant metal springs formed on the one or more dampers and the substrate; and a sensor stack attached to the one or more metal springs, wherein the one or more metal springs and dampers provide a mechanical suspension system having a resonant frequency that is higher than a sensing bandwidth of a motion sensor in the sensor stack and lower than a resonant frequency of the motion sensor.

公开(公告)号：US09796578B2

公开(公告)日：2017-10-24

申请号：US14502835

申请日：2014-09-30

申请人： Apple Inc.

发明人： Kuan-Lin Chen ,  Richard Yeh

IPC分类号： B81B3/00

CPC分类号： B81B3/0086

摘要： An electronic device may include components that are formed using microelectromechanical systems (MEMS) technology. A MEMS device may include a MEMS structure bonded to a semiconductor substrate. The MEMS structure may be formed from a silicon substrate having a cavity and a moveable member suspended over the cavity and free to oscillate within the cavity. The semiconductor substrate may be a complementary metal-oxide semiconductor substrate having circuitry such as sensing electrodes. The sensing electrodes may be used to gather signals that are produced by movement of the suspended member. One or more of the electrodes on the semiconductor substrate may be covered by a dielectric film to prevent electrical shorts between adjacent electrodes on the semiconductor substrate.

公开(公告)号：US20170057810A1

公开(公告)日：2017-03-02

申请号：US15253711

申请日：2016-08-31

申请人： Apple Inc.

发明人： Krishna Prasad Vummidi Murali ,  Christopher C. Painter ,  Kuan-Lin Chen

IPC分类号： B81B7/00 ,  B81C1/00

CPC分类号： B81B7/0048 ,  B81B7/008 ,  B81B7/0087 ,  B81B2203/0109 ,  B81B2203/0127 ,  B81B2203/0163 ,  B81B2207/012 ,  B81B2207/096 ,  B81C1/00325 ,  B81C2203/0792

摘要： A strain measurement platform that comprises of a strain die that can be embedded inside a package substrate or have its own substrate with through silicon vias (TSVs) is disclosed. The strain die comprises a body and a base. The base is coupled to the body with strain enhancing structures. Strain enhancing structures are formed on the strain die to amplify the strain signals locally, while also acting as strain and vibration isolators. Strain sensors are formed on or around the strain enhancing structures at locations of maximum strain. The strain sensors can be piezo-resistors, piezo-junctions or piezo-electrics. Strain enhancing structures are implemented either as compliant springs or as a thin membrane over which the base is suspended. A package stack can be mounted on top of the strain die and electrically connected to a strain measuring platform. Some example process flows for fabricating strain die are also disclosed.

摘要翻译： 公开了一种应变测量平台，其包括可嵌入封装衬底内的应变模具或具有通过硅通孔（TSV）的自己的衬底。 应变模具包括主体和基部。 基座通过应变增强结构与身体联接。 在应变模具上形成应变增强结构以局部放大应变信号，同时也用作应变和振动隔离器。 应变传感器形成在应变增强结构的最大应变位置处或周围。 应变传感器可以是压电电阻器，压电接头或压电电阻器。 应变增强结构可以作为柔性弹簧或作为悬挂基座的薄膜来实现。 包装堆叠可以安装在应变模具的顶部上并电连接到应变测量平台。 还公开了用于制造应变模的一些示例性工艺流程。

公开(公告)号：US20150346824A1

公开(公告)日：2015-12-03

申请号：US14288113

申请日：2014-05-27

申请人： Apple Inc.

发明人： Kuan-Lin Chen ,  William S. Lee

IPC分类号： G06F3/01 ,  H04N21/422 ,  H04N5/44

CPC分类号： H04N21/4222 ,  G06F1/1626 ,  G06F1/1694 ,  H04N5/144 ,  H04N5/4403 ,  H04N21/42208 ,  H04N21/42222 ,  H04N21/42224 ,  H04N2005/4425 ,  H04N2005/4432

摘要： A user may provide input to a handheld electronic device by making gestures with the handheld electronic device. The input gestures may be used to generate remote control signals for external equipment. The electronic device may include circuitry for detecting a user's movement of the handheld electronic device. The circuitry may include an accelerometer operable in normal and low power modes and a processor operable in sleep and wake modes. Motion data gathered in low power mode may be stored in a dedicated low power mode data storage structure. Motion analysis circuitry may detect a user's movement of the electronic device based on a standard deviation of the motion data. Upon detecting a user's movement of the handheld electronic device, the processor may be woken up to analyze the motion data stored in the low power mode data storage structure and to confirm the user's movement of the electronic device.

摘要翻译： 用户可以通过与手持电子设备进行手势来向手持电子设备提供输入。 输入手势可用于产生外部设备的遥控信号。 电子设备可以包括用于检测用户对手持电子设备的移动的电路。 电路可以包括可在正常和低功率模式下操作的加速度计，以及可在睡眠和唤醒模式下操作的处理器。 以低功率模式收集的运动数据可以存储在专用的低功率模式数据存储结构中。 运动分析电路可以基于运动数据的标准偏差来检测用户的电子设备的移动。 当检测到用户对手持电子设备的移动时，可以唤醒处理器以分析存储在低功率模式数据存储结构中的运动数据并确认用户的电子设备的移动。