公开(公告)号：US11714430B2

公开(公告)日：2023-08-01

申请号：US17955987

申请日：2022-09-29

Applicant: Applied Materials, Inc.

Inventor： Mitesh Sanghvi ,  Venkatanarayana Shankaramurthy ,  Peter Standish ,  Anton Baryshnikov ,  Thorsten Kril ,  Chahal Neema ,  Vishal Suresh Jamakhandi ,  Abhijit Ashok Kangude

IPC: G05D7/06 ,  G05B19/042 ,  C23C16/52

CPC classification number: G05D7/0623 ,  C23C16/52 ,  G05B19/042 ,  G05D7/0652 ,  G05B2219/25252 ,  G05B2219/25257

Abstract: A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers, selectively controlling process fluid flow to the process chamber for a first period of time corresponding to a time value of the set of time values and to a divert foreline of the process chamber for a second period of time.

公开(公告)号：US20220093426A1

公开(公告)日：2022-03-24

申请号：US17026862

申请日：2020-09-21

Applicant: Applied Materials, Inc.

Inventor： Samuel W. Shannon ,  Luke Bonecutter ,  Viren Kalsekar ,  Chahal Neema

IPC: H01L21/67 ,  H01J37/32

Abstract: Exemplary substrate processing systems may include a base. The systems may include a chamber body having a transfer region housing that defines a transfer region. The transfer region housing may include a first portion and a second portion. The systems may include a lid assembly positioned atop the chamber body. The lid assembly may include a lid and a lid stack. The systems may include one or more lift mechanisms that elevate the first portion of the transfer region housing and at least a portion of the lid assembly relative to the base. The first portion and the second portion may mate with one another when the transfer region housing is in an operational configuration. The first portion and the second portion may be separated when the first portion of the transfer region housing is elevated.

公开(公告)号：US11881416B2

公开(公告)日：2024-01-23

申请号：US17120976

申请日：2020-12-14

Applicant: Applied Materials, Inc.

Inventor： Arun Chakravarthy Chakravarthy ,  Chahal Neema ,  Abhijit A. Kangude ,  Elizabeth Neville ,  Vishal S. Jamakhandi ,  Kurt R. Langeland ,  Syed A. Alam ,  Ming Xu ,  Kenneth Le

IPC: H01L21/67 ,  H01J37/32

CPC classification number: H01L21/67017 ,  H01J37/3244 ,  H01J37/32357 ,  H01J37/32899 ,  H01L21/67167 ,  H01J2237/006

Abstract: Exemplary substrate processing systems may include a lid plate. The systems may include a gas splitter seated on the lid plate. The gas splitter may define a plurality of gas inlets and gas outlets. A number of gas outlets may be greater than a number of gas inlets. The systems may include a plurality of valve blocks that are interfaced with the gas splitter. Each valve block may define a number of gas lumens. An inlet of each of the gas lumens may be in fluid communication with one of the gas outlets. An interface between the gas splitter and each of the valve blocks may include a choke. The systems may include a plurality of output manifolds seated on the lid plate. The systems may include a plurality of output weldments that may couple an outlet of one of the gas lumens with one of the output manifolds.

公开(公告)号：US20220221880A1

公开(公告)日：2022-07-14

申请号：US17248106

申请日：2021-01-08

Applicant: Applied Materials, Inc.

Inventor： Mitesh Sanghvi ,  Venkatanarayana Shankaramurthy ,  Peter Standish ,  Anton Baryshnikov ,  Thorsten Kril ,  Chahal Neema ,  Vishal Suresh Jamakhandi ,  Abhijit Ashok Kangude

IPC: G05D7/06 ,  G05B19/042 ,  C23C16/52

Abstract: A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers: causing the process fluid to flow to the processing chamber for a first period of time corresponding to a first time value; and causing the process fluid to flow to a divert foreline of the processing chamber for a second period of time, the second period of time being based on a timestep of the operation and the time value.

公开(公告)号：US20230021640A1

公开(公告)日：2023-01-26

申请号：US17955987

申请日：2022-09-29

Applicant: Applied Materials, Inc.

Inventor： Mitesh Sanghvi ,  Venkatanarayana Shankaramurthy ,  Peter Standish ,  Anton Baryshnikov ,  Thorsten Kril ,  Chahal Neema ,  Vishal Suresh Jamakhandi ,  Abhijit Ashok Kangude

IPC: G05D7/06 ,  G05B19/042 ,  C23C16/52

Abstract: A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers, selectively controlling process fluid flow to the process chamber for a first period of time corresponding to a time value of the set of time values and to a divert foreline of the process chamber for a second period of time.

公开(公告)号：US11487304B2

公开(公告)日：2022-11-01

申请号：US17248106

申请日：2021-01-08

Applicant: Applied Materials, Inc.

Inventor： Mitesh Sanghvi ,  Venkatanarayana Shankaramurthy ,  Peter Standish ,  Anton Baryshnikov ,  Thorsten Kril ,  Chahal Neema ,  Vishal Suresh Jamakhandi ,  Abhijit Ashok Kangude

IPC: G05D7/06 ,  G05B19/042 ,  C23C16/52

Abstract: A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers: causing the process fluid to flow to the processing chamber for a first period of time corresponding to a first time value; and causing the process fluid to flow to a divert foreline of the processing chamber for a second period of time, the second period of time being based on a timestep of the operation and the time value.

公开(公告)号：US20220189793A1

公开(公告)日：2022-06-16

申请号：US17120976

申请日：2020-12-14

Applicant: Applied Materials, Inc.

Inventor： Arun Chakravarthy Chakravarthy ,  Chahal Neema ,  Abhijit A. Kangude ,  Elizabeth Neville ,  Vishal S. Jamakhandi ,  Kurt R. Langeland ,  Syed A. Alam ,  Ming Xu ,  Kenneth Le

IPC: H01L21/67 ,  H01J37/32

Abstract: Exemplary substrate processing systems may include a lid plate. The systems may include a gas splitter seated on the lid plate. The gas splitter may define a plurality of gas inlets and gas outlets. A number of gas outlets may be greater than a number of gas inlets. The systems may include a plurality of valve blocks that are interfaced with the gas splitter. Each valve block may define a number of gas lumens. An inlet of each of the gas lumens may be in fluid communication with one of the gas outlets. An interface between the gas splitter and each of the valve blocks may include a choke. The systems may include a plurality of output manifolds seated on the lid plate. The systems may include a plurality of output weldments that may couple an outlet of one of the gas lumens with one of the output manifolds.