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公开(公告)号：US12080869B2
公开(公告)日：2024-09-03
申请号：US17543360
申请日：2021-12-06
Applicant: Applied Materials, Inc.
Inventor： David Masayuki Ishikawa , Girish Kumar Gopalakrishnan Nair , Ezhiylmurugan Rangasamy , David Alvarez , Kent Qiujing Zhao
CPC classification number: H01M4/0404 , G01B7/105 , G01B11/303 , H01M4/0426 , H01M4/0471 , H01M4/382 , H01M4/661 , H01M10/0525 , G01N2021/8438 , H01M2220/20
Abstract: Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.
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Patent Agency Ranking
公开(公告)号：US20220328803A1
公开(公告)日：2022-10-13
申请号：US17658347
申请日：2022-04-07
Applicant: Applied Materials, Inc.
Inventor： SUBRAMANYA P. HERLE , Girish Kumar Gopalakrishnan Nair , Daniel Stock , Sambhu Kundu , Ezhiylmurugan Rangasamy
IPC: H01M4/04 , H01M4/38 , H01M4/1395
Abstract: A method and apparatus for fabricating electrodes used in energy storage devices are provided. In some implementations a surface of the electrode is activated for (a) a pre-treatment process to remove loosely held particles from the electrode surface; (b) a pre-treatment process to activate the surface of the electrode material for improved bonding or wetting for subsequently deposited materials; (c) a post-treatment of the pre-lithiation layer to improve subsequent bonding with additionally deposited layer, for example, passivation layers; and/or (d) a post-treatment of the pre-lithiation layer to improve/accelerate absorption of the lithium into the underlying electrode material.
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公开(公告)号：US12021219B2
公开(公告)日：2024-06-25
申请号：US17658347
申请日：2022-04-07
Applicant: Applied Materials, Inc.
Inventor： Subramanya P. Herle , Girish Kumar Gopalakrishnan Nair , Daniel Stock , Sambhu Kundu , Ezhiylmurugan Rangasamy
CPC classification number: H01M4/0492 , H01M4/0404 , H01M4/1395 , H01M4/382 , B05D3/044 , B05D3/142 , B05D5/12
Abstract: A method and apparatus for fabricating electrodes used in energy storage devices are provided. In some implementations a surface of the electrode is activated for (a) a pre-treatment process to remove loosely held particles from the electrode surface; (b) a pre-treatment process to activate the surface of the electrode material for improved bonding or wetting for subsequently deposited materials; (c) a post-treatment of the pre-lithiation layer to improve subsequent bonding with additionally deposited layer, for example, passivation layers; and/or (d) a post-treatment of the pre-lithiation layer to improve/accelerate absorption of the lithium into the underlying electrode material.
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4.发明授权公开(公告)号：US11462733B2
公开(公告)日：2022-10-04
申请号：US17194899
申请日：2021-03-08
Applicant: Applied Materials, Inc.
Abstract: Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same. In one implementation, an anode electrode structure is provided. The anode electrode structure comprises a current collector comprising copper. The anode electrode structure further comprises a lithium metal film formed on the current collector. The anode electrode structure further comprises a solid electrolyte interface (SEI) film stack formed on the lithium metal film. The SEI film stack comprises a chalcogenide film formed on the lithium metal film. In one implementation, the SEI film stack further comprises a lithium oxide film formed on the chalcogenide film. In one implementation, the SEI film stack further comprises a lithium carbonate film formed on the lithium oxide film.
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5.发明授权公开(公告)号：US11735723B2
公开(公告)日：2023-08-22
申请号：US17939121
申请日：2022-09-07
Applicant: Applied Materials, Inc.
CPC classification number: H01M4/366 , H01M4/0404 , H01M4/0423 , H01M4/134 , H01M4/382 , H01M4/62 , H01M4/661 , H01M4/667 , H01M2004/027
Abstract: Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same. In one implementation, an anode electrode structure is provided. The anode electrode structure comprises a current collector comprising copper. The anode electrode structure further comprises a lithium metal film formed on the current collector. The anode electrode structure further comprises a solid electrolyte interface (SEI) film stack formed on the lithium metal film. The SEI film stack comprises a chalcogenide film formed on the lithium metal film. In one implementation, the SEI film stack further comprises a lithium oxide film formed on the chalcogenide film. In one implementation, the SEI film stack further comprises a lithium carbonate film formed on the lithium oxide film.
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6.发明授权公开(公告)号：US10944103B2
公开(公告)日：2021-03-09
申请号：US16150111
申请日：2018-10-02
Applicant: Applied Materials, Inc.
Abstract: Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same. In one implementation, an anode electrode structure is provided. The anode electrode structure comprises a current collector comprising copper. The anode electrode structure further comprises a lithium metal film formed on the current collector. The anode electrode structure further comprises a solid electrolyte interface (SEI) film stack formed on the lithium metal film. The SEI film stack comprises a chalcogenide film formed on the lithium metal film. In one implementation, the SEI film stack further comprises a lithium oxide film formed on the chalcogenide film. In one implementation, the SEI film stack further comprises a lithium carbonate film formed on the lithium oxide film.
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