公开(公告)号：US12021219B2

公开(公告)日：2024-06-25

申请号：US17658347

申请日：2022-04-07

Applicant: Applied Materials, Inc.

Inventor： Subramanya P. Herle ,  Girish Kumar Gopalakrishnan Nair ,  Daniel Stock ,  Sambhu Kundu ,  Ezhiylmurugan Rangasamy

IPC: H01M4/04 ,  H01M4/1395 ,  H01M4/38 ,  B05D3/04 ,  B05D3/14 ,  B05D5/12

CPC classification number: H01M4/0492 ,  H01M4/0404 ,  H01M4/1395 ,  H01M4/382 ,  B05D3/044 ,  B05D3/142 ,  B05D5/12

Abstract: A method and apparatus for fabricating electrodes used in energy storage devices are provided. In some implementations a surface of the electrode is activated for (a) a pre-treatment process to remove loosely held particles from the electrode surface; (b) a pre-treatment process to activate the surface of the electrode material for improved bonding or wetting for subsequently deposited materials; (c) a post-treatment of the pre-lithiation layer to improve subsequent bonding with additionally deposited layer, for example, passivation layers; and/or (d) a post-treatment of the pre-lithiation layer to improve/accelerate absorption of the lithium into the underlying electrode material.

公开(公告)号：US12080869B2

公开(公告)日：2024-09-03

申请号：US17543360

申请日：2021-12-06

Applicant: Applied Materials, Inc.

Inventor： David Masayuki Ishikawa ,  Girish Kumar Gopalakrishnan Nair ,  Ezhiylmurugan Rangasamy ,  David Alvarez ,  Kent Qiujing Zhao

IPC: H01M4/04 ,  G01B7/06 ,  G01B11/30 ,  H01M4/38 ,  H01M4/66 ,  H01M10/0525 ,  G01N21/84

CPC classification number: H01M4/0404 ,  G01B7/105 ,  G01B11/303 ,  H01M4/0426 ,  H01M4/0471 ,  H01M4/382 ,  H01M4/661 ,  H01M10/0525 ,  G01N2021/8438 ,  H01M2220/20

Abstract: Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.

公开(公告)号：US12051810B2

公开(公告)日：2024-07-30

申请号：US17863106

申请日：2022-07-12

Applicant: Applied Materials, Inc.

Inventor： Ezhiylmurugan Rangasamy ,  Subramanya P. Herle

IPC: H01M4/62 ,  H01M4/04 ,  H01M4/134 ,  H01M4/1395 ,  H01M4/36 ,  H01M4/38 ,  H01M4/66 ,  H01M10/0525 ,  H01M10/0562 ,  H01M4/02

CPC classification number: H01M4/628 ,  H01M4/0404 ,  H01M4/134 ,  H01M4/1395 ,  H01M4/366 ,  H01M4/382 ,  H01M4/661 ,  H01M10/0525 ,  H01M10/0562 ,  H01M2004/027 ,  H01M2300/0068

Abstract: Interfacial films, which are both electronic conducting and ion conducting, for anode films are provided. The one or more protective films described herein may be mixed conduction materials, which are both electronic conducting and ion-conducting. The one or more protective films described herein may include materials selected from lithium transition metal dichalcogenides, Li9Ti5O12, or a combination thereof. The lithium transition metal dichalcogenide includes a transition metal dichalcogenide having the formula MX2, wherein M is selected from Ti, Mo, or W and X is selected from S, Se, or Te. The transition metal dichalcogenide may be selected from TiS2, MoS2, WS2, or a combination thereof. The lithium transition metal dichalcogenide may be selected from lithium-titanium-disulfide (e.g., LiTiS2), lithium-tungsten-disulfide (e.g., LiWS2), lithium-molybdenum-disulfide (e.g., LiMoS2), or a combination thereof.

公开(公告)号：US20220328803A1

公开(公告)日：2022-10-13

申请号：US17658347

申请日：2022-04-07

Applicant: Applied Materials, Inc.

Inventor： SUBRAMANYA P. HERLE ,  Girish Kumar Gopalakrishnan Nair ,  Daniel Stock ,  Sambhu Kundu ,  Ezhiylmurugan Rangasamy

IPC: H01M4/04 ,  H01M4/38 ,  H01M4/1395

Abstract: A method and apparatus for fabricating electrodes used in energy storage devices are provided. In some implementations a surface of the electrode is activated for (a) a pre-treatment process to remove loosely held particles from the electrode surface; (b) a pre-treatment process to activate the surface of the electrode material for improved bonding or wetting for subsequently deposited materials; (c) a post-treatment of the pre-lithiation layer to improve subsequent bonding with additionally deposited layer, for example, passivation layers; and/or (d) a post-treatment of the pre-lithiation layer to improve/accelerate absorption of the lithium into the underlying electrode material.

公开(公告)号：US11424454B2

公开(公告)日：2022-08-23

申请号：US16777653

申请日：2020-01-30

Applicant: Applied Materials, Inc.

Inventor： Ezhiylmurugan Rangasamy ,  Subramanya P. Herle

IPC: H01M4/62 ,  H01M4/04 ,  H01M4/38 ,  H01M4/36 ,  H01M4/66 ,  H01M4/1395 ,  H01M4/134 ,  H01M10/0525 ,  H01M10/0562 ,  H01M4/02

Abstract: Interfacial films, which are both electronic conducting and ion conducting, for anode films are provided. The one or more protective films described herein may be mixed conduction materials, which are both electronic conducting and ion-conducting. The one or more protective films described herein may include materials selected from lithium transition metal dichalcogenides, Li9Ti5O12, or a combination thereof. The lithium transition metal dichalcogenide includes a transition metal dichalcogenide having the formula MX2, wherein M is selected from Ti, Mo, or W and X is selected from S, Se, or Te. The transition metal dichalcogenide may be selected from TiS2, MoS2, WS2, or a combination thereof. The lithium transition metal dichalcogenide may be selected from lithium-titanium-disulfide (e.g., LiTiS2), lithium-tungsten-disulfide (e.g., LiWS2), lithium-molybdenum-disulfide (e.g., LiMoS2), or a combination thereof.

公开(公告)号：US20220181599A1

公开(公告)日：2022-06-09

申请号：US17532800

申请日：2021-11-22

Applicant: Applied Materials, Inc.

Inventor： Alejandro Sevilla ,  Wei-Sheng Lei ,  Girishkumar Gopalakrishnannair ,  Ezhiylmurugan Rangasamy ,  David Masayuki Ishikawa ,  Subramanya P. Herle

IPC: H01M4/04 ,  C23C16/40 ,  C23C16/56 ,  C23C16/455 ,  C23C16/50

Abstract: Exemplary processing methods may include translating a lithium film beneath a first showerhead. The methods may include introducing an oxidizer gas through the first showerhead onto the lithium film. The methods may include forming an oxide monolayer on the lithium film. The oxide monolayer may be or include the oxidizer gas adsorbed on the lithium film. The methods may include translating the lithium film beneath a second showerhead after forming the oxide monolayer. The methods may include introducing a carbon source gas through the first showerhead onto the lithium film. The methods may also include converting the oxide monolayer into a carbonate passivation layer through reaction of the oxide monolayer with the carbon source gas.