公开(公告)号：US20140175054A1

公开(公告)日：2014-06-26

申请号：US14195423

申请日：2014-03-03

Applicant: Applied Materials, Inc.

Inventor： David Keith CARLSON ,  Satheesh KUPPURAO ,  Howard BECKFORD ,  Herman DINIZ ,  Kailash Kiran PATALAY ,  Brian Hayes BURROWS ,  Jeffery Ronald CAMPBELL ,  Zuoming ZHU ,  Xiaowei LI ,  Errol Antonio SANCHEZ

IPC: C23C16/455 ,  C23C16/22

CPC classification number: C23C16/455 ,  C23C16/22 ,  C23C16/452 ,  H01L21/02532 ,  H01L21/0262 ,  Y10T137/0318

Abstract: In one embodiment, a gas distribution assembly includes an injection block having at least one inlet to deliver a precursor gas to a plurality of plenums from at least two gas sources, a perforated plate bounding at least one side of each of the plurality of plenums, at least one radiant energy source positioned within each of the plurality of plenums to provide energy to the precursor gas from one or both of the at least two gas sources and flow an energized gas though openings in the perforated plate and into a chamber, and a variable power source coupled to each of the radiant energy sources positioned within each of the plurality of plenums.

Abstract translation: 在一个实施例中，气体分配组件包括注入块，其具有至少一个入口，以将前体气体从至少两个气体源输送到多个增压室，多孔板限定多个通气室中的每一个的至少一侧， 至少一个辐射能源，其定位在所述多个增压室的每一个内，以从所述至少两个气体源中的一个或两个向所述前体气体提供能量，并且使通电气体通过所述多孔板中的开口并进入腔室，并且 可变电源耦合到位于多个通风室中的每一个内的每个辐射能源。

公开(公告)号：US20170362702A9

公开(公告)日：2017-12-21

申请号：US14195423

申请日：2014-03-03

Applicant: Applied Materials, Inc.

Inventor： David Keith CARLSON ,  Satheesh KUPPURAO ,  Howard BECKFORD ,  Herman DINIZ ,  Kailash Kiran PATALAY ,  Brian Hayes BURROWS ,  Jeffery Ronald CAMPBELL ,  Zuoming ZHU ,  Xiaowei LI ,  Errol Antonio SANCHEZ

IPC: C23C16/455 ,  C23C16/22 ,  C23C16/452 ,  H01L21/02

CPC classification number: C23C16/455 ,  C23C16/22 ,  C23C16/452 ,  H01L21/02532 ,  H01L21/0262 ,  Y10T137/0318

Abstract: In one embodiment, a gas distribution assembly includes an injection block having at least one inlet to deliver a precursor gas to a plurality of plenums from at least two gas sources, a perforated plate bounding at least one side of each of the plurality of plenums, at least one radiant energy source positioned within each of the plurality of plenums to provide energy to the precursor gas from one or both of the at least two gas sources and flow an energized gas though openings in the perforated plate and into a chamber, and a variable power source coupled to each of the radiant energy sources positioned within each of the plurality of plenums.