公开(公告)号：US20230213109A1

公开(公告)日：2023-07-06

申请号：US17565882

申请日：2021-12-30

申请人： Applied Materials, Inc.

发明人： Shivaram Chandrashekar ,  Pallab Karmakar ,  Amit Sahu ,  Kumaresan Nagarajan ,  Giridhar Kamesh

IPC分类号： F16K31/00 ,  G05D23/02 ,  H01L21/67

CPC分类号： F16K31/002 ,  G05D23/02 ,  H01L21/67017 ,  H01J37/32183

摘要： Disclosed herein is a temperature actuated valve, including a stationary member and a movable member, wherein the stationary member is configured to receive the movable member. A first flow path is defined between an outer surface of the stationary member and an inner surface of a housing and a second flow path defined by and within the movable member. The temperature actuated valve further includes at least one temperature actuated member having a first end seated against a base of the stationary member and a second end seated against a base of the movable member. The temperature actuated valve further includes a bias member having a first end connected to the base of the stationary member and a second end connected to the base of the movable member, the at least one temperature actuated member configured to compress at a first temperature and expand at a second temperature.

公开(公告)号：US11913563B2

公开(公告)日：2024-02-27

申请号：US17565882

申请日：2021-12-30

申请人： Applied Materials, Inc.

发明人： Shivaram Chandrashekar ,  Pallab Karmakar ,  Amit Sahu ,  Kumaresan Nagarajan ,  Giridhar Kamesh

IPC分类号： F16K31/00 ,  G05D23/02 ,  H01L21/67 ,  H01J37/32

CPC分类号： F16K31/002 ,  G05D23/02 ,  H01L21/67017 ,  H01J37/3244 ,  H01J37/32183 ,  H01J37/32724 ,  H01J2237/002 ,  H01J2237/2007

摘要： Disclosed herein is a temperature actuated valve, including a stationary member and a movable member, wherein the stationary member is configured to receive the movable member. A first flow path is defined between an outer surface of the stationary member and an inner surface of a housing and a second flow path defined by and within the movable member. The temperature actuated valve further includes at least one temperature actuated member having a first end seated against a base of the stationary member and a second end seated against a base of the movable member. The temperature actuated valve further includes a bias member having a first end connected to the base of the stationary member and a second end connected to the base of the movable member, the at least one temperature actuated member configured to compress at a first temperature and expand at a second temperature.