公开(公告)号：US20250167027A1

公开(公告)日：2025-05-22

申请号：US18517791

申请日：2023-11-22

Applicant: Applied Materials, Inc.

Inventor： Srinivas Poshatrahalli Gopalakrishna ,  Shivaraj Nara Manjunath ,  Devendra Channappa Holeyannavar ,  Paul Reuter ,  Douglas Baumgarten ,  Sushant Koshti ,  Amit Kumar Biswas ,  Nithiyanantham Balasubramaniam ,  Latha Ramesh ,  Navya Talluri

IPC: H01L21/673 ,  G01N19/10 ,  G01N33/00 ,  G06F30/27 ,  H01L21/67

Abstract: A method for monitoring inside parameters of a substrate carrier. The method includes receiving a first substrate carrier, supplying a fluid, at a first flow rate, through an inlet of the first substrate carrier, and at least partially purging the fluid through an outlet of the first substrate carrier for a first period of time. The method further includes measuring, using a first sensor disposed at the outlet, a first value of a first property of an exhaust from the substrate carrier at the outlet of the first substrate carrier, and determining, based at least in part on the first value of the first property, a second value of the first property inside the first substrate carrier.