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公开(公告)号：US20230320183A1
公开(公告)日：2023-10-05
申请号：US18207549
申请日：2023-06-08
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser , Gangadhar Banappanavar , Dinesh Kabra
Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.
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公开(公告)号：US20210226183A1
公开(公告)日：2021-07-22
申请号：US17152689
申请日：2021-01-19
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser
Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.
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公开(公告)号：US12137601B2
公开(公告)日：2024-11-05
申请号：US18207549
申请日：2023-06-08
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser , Gangadhar Banappanavar , Dinesh Kabra
Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.
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公开(公告)号：US11856833B2
公开(公告)日：2023-12-26
申请号：US17152688
申请日：2021-01-19
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser , Guoheng Zhao , Todd J. Egan , Dinesh Kabra , Gangadhar Banappanavar
IPC: H01L51/56 , H10K71/00 , C23C14/56 , C23C14/24 , C23C14/50 , C23C14/54 , C23C14/12 , H10K71/70 , H10K71/16
CPC classification number: H10K71/00 , C23C14/12 , C23C14/24 , C23C14/50 , C23C14/54 , C23C14/568 , H10K71/164 , H10K71/70
Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.
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公开(公告)号：US11889740B2
公开(公告)日：2024-01-30
申请号：US17152689
申请日：2021-01-19
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser , Gangadhar Banappanavar , Dinesh Kabra
Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.
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Patent Agency Ranking
公开(公告)号：US20220341722A1
公开(公告)日：2022-10-27
申请号：US17236997
申请日：2021-04-21
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser
Abstract: An organic light-emitting diode (OLED) deposition system has a workpiece transport system configured to position a workpiece within the OLED deposition system under vacuum conditions, a deposition chamber configured to deposit a first layer of organic material onto the workpiece, a metrology system having one or more sensors measure of the workpiece after deposition in the deposition chamber, and a control system to control a deposition of the layer of organic material onto the workpiece. The metrology system includes a digital holographic microscope positioned to receive light from the workpiece and generate a thickness profile measurement of a layer on the workpiece. The control system is configured to adjust processing of a subsequent workpiece at the deposition chamber or adjust processing of the workpiece at a subsequent deposition chamber based on the thickness profile.
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公开(公告)号：US12225808B2
公开(公告)日：2025-02-11
申请号：US18395081
申请日：2023-12-22
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser , Guoheng Zhao , Todd J. Egan , Dinesh Kabra , Gangadhar Banappanavar
Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.
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公开(公告)号：US12163783B2
公开(公告)日：2024-12-10
申请号：US17236997
申请日：2021-04-21
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser
Abstract: An organic light-emitting diode (OLED) deposition system has a workpiece transport system configured to position a workpiece within the OLED deposition system under vacuum conditions, a deposition chamber configured to deposit a first layer of organic material onto the workpiece, a metrology system having one or more sensors measure of the workpiece after deposition in the deposition chamber, and a control system to control a deposition of the layer of organic material onto the workpiece. The metrology system includes a digital holographic microscope positioned to receive light from the workpiece and generate a thickness profile measurement of a layer on the workpiece. The control system is configured to adjust processing of a subsequent workpiece at the deposition chamber or adjust processing of the workpiece at a subsequent deposition chamber based on the thickness profile.
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公开(公告)号：US20240130210A1
公开(公告)日：2024-04-18
申请号：US18395081
申请日：2023-12-22
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser , Guoheng Zhao , Todd J. Egan , Dinesh Kabra , Gangadhar Banappanavar
CPC classification number: H10K71/00 , C23C14/12 , C23C14/24 , C23C14/50 , C23C14/54 , C23C14/568 , H10K71/164 , H10K71/70
Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.
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公开(公告)号：US20210226182A1
公开(公告)日：2021-07-22
申请号：US17152688
申请日：2021-01-19
Applicant: Applied Materials, Inc.
Inventor： Yeishin Tung , Byung Sung Kwak , Robert Jan Visser , Guoheng Zhao , Todd J. Egan
Abstract: An organic light-emitting diode (OLED) deposition system includes two deposition chambers, a transfer chamber between the two deposition chambers, a metrology system having one or more sensors to perform measurements of the workpiece within the transfer chamber, and a control system to cause the system to form an organic light-emitting diode layer stack on the workpiece. Vacuum is maintained around the workpiece while the workpiece is transferred between the two deposition chambers and while retaining the workpiece within the transfer chamber. The control system is configured to cause the two deposition chambers to deposit two layers of organic material onto the workpiece, and to receive a first plurality of measurements of the workpiece in the transfer chamber from the metrology system.
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