公开(公告)号：US20230023363A1

公开(公告)日：2023-01-26

申请号：US17382280

申请日：2021-07-21

Applicant: Applied Materials Israel Ltd.

Inventor： Michael CHEMAMA ,  Ron MEIRY ,  Moshe ELIASOF ,  Lior YARON ,  Guy EYTAN ,  Konstantin CHIRKO ,  Rafael BISTRITZER

IPC: G01N23/2206 ,  H01L21/66 ,  G01N23/2251 ,  H01J37/22 ,  H01J37/28

Abstract: There is provided a system and method of measuring a lateral recess in a semiconductor specimen, comprising: obtaining a first image acquired by collecting SEs emitted from the surface of the specimen, and a second image acquired by collecting BSEs scattered from an interior region of the specimen between the surface and a target second layer, the specimen scanned using an electron beam with a landing energy selected to penetrate to a depth corresponding to the target second layer; generating a first GL waveform based on the first image, and a second GL waveform based on the second image; estimating a first width of the first layers based on the first GL waveform, and a second width with respect to at least the target second layer based on the second GL; and measuring a lateral recess based on the first width and the second width.

公开(公告)号：US20190027354A1

公开(公告)日：2019-01-24

申请号：US15653299

申请日：2017-07-18

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Irit RUACH-NIR ,  Michal JACOBON-EILON ,  Guy EYTAN ,  Magen Yaacov SCHULMAN

IPC: H01J49/04 ,  H01J49/00 ,  H01L21/67

Abstract: A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.