公开(公告)号：US20240404784A1

公开(公告)日：2024-12-05

申请号：US18203034

申请日：2023-05-29

Applicant: Applied Materials Israel Ltd.

Inventor： Itamar Shani ,  Konstantin Chirko ,  Lior Yaron ,  Guy Eytan ,  Guy Shwartz

IPC: H01J37/28 ,  G06T11/00 ,  G06T11/20

Abstract: Disclosed herein is a system for non-destructive tomography of specimens. The system includes a scanning electron microscope (SEM) and a processor(s). The SEM is configured to obtain a sinogram of a tested specimen, parameterized by a vector {right arrow over (s)}, by projecting e-beams on the tested specimen, at each of a plurality of projection directions and offsets, and. for each e-beam, measuring a respective intensity of electrons returned from the tested specimen, The processor(s) is configured to obtain a tomographic map, pertaining to the tested specimen, by determining values indicative of components of a vector {right arrow over (t)} defined by an equation W{right arrow over (t)}={right arrow over (s)}. W is a matrix with components wij specifying a contribution of a j-th voxel in a nominal specimen to an i-th element of a nominal sinogram of the nominal specimen. The matrix W accounts for e-beam expansion and attenuation with depth within the nominal specimen.

公开(公告)号：US20230326713A1

公开(公告)日：2023-10-12

申请号：US17714908

申请日：2022-04-06

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Guy Shwartz ,  Ori Golani ,  Itamar Shani ,  Ido Almog

IPC: H01J37/28 ,  H01J37/22 ,  H01J37/244 ,  G01N23/2251

CPC classification number: H01J37/28 ,  H01J37/222 ,  H01J37/244 ,  H01J2237/24475 ,  H01J2237/226 ,  H01J2237/2448 ,  G01N23/2251

Abstract: Disclosed herein is a method for non-destructive hybrid acousto-optic and scanning electron microscopy-based metrology. The method includes: (i) obtaining acousto-optic and scanning electron microscopy measurement data of an inspected structure on a sample; (ii) processing the measurement data to extract values of key measurement parameters corresponding to the acousto-optic measurement data and the scanning electron microscopy measurement data, respectively; and (iii) obtaining estimated values of one or more structural parameters of the inspected structure by inputting the extracted values into an algorithm, which is configured to jointly process the extracted values to output estimated values of the one or more structural parameters.

公开(公告)号：US11264202B2

公开(公告)日：2022-03-01

申请号：US16876637

申请日：2020-05-18

Applicant: Applied Materials Israel Ltd.

Inventor： Konstantin Chirko ,  Itamar Shani ,  Albert Karabekov ,  Guy Eytan ,  Lior Yaron ,  Alon Litman

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/05 ,  H01J37/20

Abstract: A method, a non-transitory computer readable medium and a three-dimensional evaluation system for providing three dimensional information regarding structural elements of a specimen. The method can include illuminating the structural elements with electron beams of different incidence angles, where the electron beams pass through the structural elements and the structural elements are of nanometric dimensions; detecting forward scattered electrons that are scattered from the structural elements to provide detected forward scattered electrons; and generating the three dimensional information regarding structural elements based at least on the detected forward scattered electrons.

公开(公告)号：US20210358712A1

公开(公告)日：2021-11-18

申请号：US16876637

申请日：2020-05-18

Applicant: Applied Materials Israel Ltd.

Inventor： Konstantin Chirko ,  Itamar Shani ,  Albert Karabekov ,  Guy Eytan ,  Lior Yaron ,  Alon Litman

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/05 ,  H01J37/20

Abstract: A method, a non-transitory computer readable medium and a three-dimensional evaluation system for providing three dimensional information regarding structural elements of a specimen. The method can include illuminating the structural elements with electron beams of different incidence angles, where the electron beams pass through the structural elements and the structural elements are of nanometric dimensions; detecting forward scattered electrons that are scattered from the structural elements to provide detected forward scattered electrons; and generating the three dimensional information regarding structural elements based at least on the detected forward scattered electrons.