公开(公告)号：US4447731A

公开(公告)日：1984-05-08

申请号：US327191

申请日：1981-12-03

申请人： Asahiro Kuni ,  Yukio Kembo ,  Nobuyuki Akiyama ,  Nobuhiko Aoki

发明人： Asahiro Kuni ,  Yukio Kembo ,  Nobuyuki Akiyama ,  Nobuhiko Aoki

IPC分类号： G01B11/02 ,  G01B21/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q30/04 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28

CPC分类号： H01J37/226 ,  H01J37/20

摘要： An exterior view examination apparatus comprising a movable sample stage provided in a sample chamber of a scanning type electron microscope; a sample mounted on the stage; and an optical microscope which can observe the sample from an exterior of the chamber, mounted on the chamber in parallel with the scanning type electron microscope, the position of a surface part of the sample (mounted on the sample stage) to be observed, measured or analyzed being preliminary defined by the optical microscope, and the sample stage being moved by a certain amount thereby to bring the sample at the center of the visual field of the electron microscope.

摘要翻译： 一种外观检查装置，包括设置在扫描型电子显微镜的样品室中的可移动样品台; 样品安装在舞台上; 和可以与扫描型电子显微镜平行地安装在室上的室外观察样品的光学显微镜，测量样品表面部分（安装在样品台上）的位置，测量 或者通过光学显微镜进行初步定义，并且将样品台移动一定量，从而将样品置于电子显微镜的视野的中心。

公开(公告)号：US4508453A

公开(公告)日：1985-04-02

申请号：US397900

申请日：1982-07-13

申请人： Yasuhiko Hara ,  Nobuyuki Akiyama ,  Satoru Fushimi ,  Yoshimasa Oshima ,  Nobuhiko Aoki

发明人： Yasuhiko Hara ,  Nobuyuki Akiyama ,  Satoru Fushimi ,  Yoshimasa Oshima ,  Nobuhiko Aoki

IPC分类号： G01N21/956 ,  G01R31/308 ,  G03F7/20 ,  G01M11/00

CPC分类号： G03F7/70616 ,  G01N21/956 ,  G01R31/308 ,  G03F7/7065

摘要： A pattern detection system for inspecting defects in fine or minute patterns such as photomask patterns at a fast speed is disclosed. The system comprises an illuminator, a device for moving objects with the patterns to be inspected with being illuminated by the illuminator, an optical system for imaging the objects, a scanner for scanning the objects in a direction intersected at a given angle with respect to direction of the objects moved by the moving device and arrays of photosensors arranged linearly in a direction perpendicular to that of images on the objects scanned by the scanner, on the surface of which the images are formed by the optical system and for producing respective outputs parallelly on the time basis.

摘要翻译： 公开了一种用于以高速度检查诸如光掩模图案的精细或微小图案中的缺陷的图案检测系统。 该系统包括照明器，用于利用照明器照亮要检查的图案来移动物体的装置，用于对物体进行成像的光学系统，用于沿相对于方向以给定角度相交的方向扫描物体的扫描仪 由移动装置移动的物体和由扫描仪扫描的物体上垂直于图像的方向线性布置的光敏器件的阵列，其表面上由光学系统形成图像并且平行地产生相应的输出 时间基础。

公开(公告)号：US3968423A

公开(公告)日：1976-07-06

申请号：US513774

申请日：1974-10-10

申请人： Yasutaka Hoshino ,  Yoshiharu Utsumi ,  Nobuhiko Aoki ,  Hiroshi Yokokawa

发明人： Yasutaka Hoshino ,  Yoshiharu Utsumi ,  Nobuhiko Aoki ,  Hiroshi Yokokawa

IPC分类号： G01R33/32 ,  G01R33/46 ,  G01R33/08

CPC分类号： G01R33/4625

摘要： The nuclear resonance signal obtained from the sample is stored in a memory circuit and the stored signal is then repeatedly read out. A periodic function which is derived as a result of the transformation of a triangular wave into a trapezoidal one, is used for the Fourier transformation of the repeatedly read-out signal. The adverse influence of the transient phenomenon in the h-f impulse signal on the resultant spectrum is eliminated by stopping the Fourier transformation only during the initial portion of the read-out period of the memory circuit.

摘要翻译： 从采样获得的核共振信号存储在存储器电路中，然后重复地读出所存储的信号。 作为将三角波变换为梯形的结果导出的周期函数用于重复读出信号的傅里叶变换。 通过仅在存储器电路的读出周期的初始部分停止傅立叶变换，消除了h-f脉冲信号中的瞬态现象对合成光谱的不利影响。

公开(公告)号：US4564296A

公开(公告)日：1986-01-14

申请号：US305374

申请日：1981-09-24

申请人： Yoshitada Oshida ,  Hiroshi Makihara ,  Nobuhiko Aoki

发明人： Yoshitada Oshida ,  Hiroshi Makihara ,  Nobuhiko Aoki

IPC分类号： G01B11/00 ,  G01B11/06 ,  H01L21/66

CPC分类号： G01B11/06

摘要： A plate thickness measuring method and apparatus, is provided wherein a fine pattern is projected on the front and rear surfaces of an object to be measured via object lenses oppositely provided on the front and rear surfaces of the object to be measured in its thickness. The image of the projected pattern on the object to be measured is formed via said object lenses, and the contrast of the formed pattern image is detected. Then the object lenses are moved slightly to achieve the maximum of the contrast, or to perform an automatic focusing control. The thickness of the object to be measured can then be estimated from the difference of the positions of the object lenses at which the maximum contrast, or the focused condition, are obtained.

摘要翻译： 提供了一种板厚测量方法和装置，其中精细图案通过相对设置在被测量物体的前表面和后表面上的物镜在其厚度上投影在被测量物体的前表面和后表面上。 通过所述物镜形成待测物体上的投影图案的图像，并且检测形成的图案图像的对比度。 然后物镜稍微移动以达到对比度的最大值，或进行自动对焦控制。 然后可以从获得最大对比度或聚焦条件的物镜的位置的差异来估计被测量物体的厚度。