公开(公告)号：US5622566A

公开(公告)日：1997-04-22

申请号：US424473

申请日：1995-05-10

申请人： Atsushi Hosaka ,  Mitsuaki Iwashita ,  Toshiharu Nishimura

发明人： Atsushi Hosaka ,  Mitsuaki Iwashita ,  Toshiharu Nishimura

IPC分类号： C23C16/455 ,  H01L21/205 ,  H01L21/00

CPC分类号： C23C16/45561 ,  C23C16/455 ,  H01L21/02422 ,  H01L21/02532 ,  H01L21/02576 ,  H01L21/0262

摘要： A film-forming apparatus for forming an impurity-doped film on an object such as a semiconductor wafer has an elongated reaction tube located such that its longitudinal direction is identical to the vertical direction, and having an object arrangement region in which a plurality of objects or semiconductor wafers to be processed can be arranged at intervals in the vertical direction. A film-forming gas is introduced into the reaction tube through a film-forming gas introduction pipe. This apparatus also has a main dopant gas introduction pipe, having a gas outlet located below the object arrangement region in the reaction tube, for introducing a dopant gas into the reaction tube and guiding the same upward, at least one sub dopant gas introduction pipe, having a gas outlet located above the object arrangement region in the reaction tube, for introducing the same dopant gas as the first-mentioned one into the reaction tube so as to compensate for insufficient supply of the dopant gas through the main dopant gas introduction pipe, an exhaustion system for exhausting the gases in the reaction tube, and a heating unit for heating the interior of the reaction tube.

摘要翻译： PCT No.PCT / JP94 / 01526 Sec。 371日期：1995年5月10日 102（e）日期1995年5月10日PCT 1994年9月16日PCT PCT。 出版物WO95 / 08185 日期1995年3月23日在半导体晶片等物体上形成杂质掺杂膜的成膜装置具有伸长的反应管，其长度方向与上下方向一致， 可以在垂直方向上间隔布置要处理的多个物体或半导体晶片。 成膜气体通过成膜气体引入管被引入到反应管中。 该装置还具有主要的掺杂剂气体引入管，其具有位于反应管中的物体排列区域下方的气体出口，用于将掺杂剂气体引入反应管并引导相同的向上的至少一个子掺杂剂气体导入管， 具有位于反应管中的物体排列区域上方的气体出口，用于将与前述相同的掺杂气体引入反应管中，以补偿通过主要掺杂剂气体导入管的掺杂剂气体供应不足， 用于排出反应管中的气体的耗尽系统和用于加热反应管内部的加热单元。

公开(公告)号：US5654230A

公开(公告)日：1997-08-05

申请号：US418841

申请日：1995-04-07

申请人： Shinichi Jintate ,  Yoshihiko Okamoto ,  Toshiharu Nishimura ,  Atsushi Hosaka

发明人： Shinichi Jintate ,  Yoshihiko Okamoto ,  Toshiharu Nishimura ,  Atsushi Hosaka

IPC分类号： H01L21/205 ,  C30B31/16 ,  H01L21/20 ,  H01L21/22

CPC分类号： C30B31/16 ,  Y10S438/925

摘要： A doped film forming method comprising, the steps of preparing gas source for supplying a film forming gas into the process tube, gas source for supplying doping gases, in which a dope is included, into the process tube, a dry pump for exhausting the process tube, and an apparatus for burning a not-reacted element in waste gas, arranging a plurality of substrates in the process tube in such a way that they are separated from their adjacent ones by a certain interval, exhausting the process tube to keep it reduced in pressure, heating the substrates in the process tube to a temperature range of 500.degree.-600.degree. C., controlling amounts of the doping and film forming gases, while exhausting the process tube, at the ratio of the amount of the film forming gas to the amount of the doping gases being in the range of 1 to 1.625.times.10.sup.-3 to 2.125.times.10.sup.-3, and causing the doping and film forming gases to be reacted with the substrates.

摘要翻译： 一种掺杂膜形成方法，包括以下步骤：制备用于将成膜气体供应到处理管中的气体源，将包含掺杂气体的掺杂气体供应到工艺管中，用于排出该过程的干燥泵 管和用于燃烧废气中的未反应元件的设备，将多个基板在处理管中排列成使得它们与其相邻的基板分开一定间隔，排出处理管以保持其减小 在压力下，将处理管中的基板加热至500℃-600℃的温度范围，控制掺杂和成膜气体的量，同时以成膜气体量的比例排出处理管 掺杂气体的量在1至1.625×10 -3至2.125×10 -3的范围内，并且使掺杂和成膜气体与基底反应。

公开(公告)号：US4657296A

公开(公告)日：1987-04-14

申请号：US877505

申请日：1986-06-23

申请人： Shigetoshi Nishii ,  Toshimitsu Matsuoka ,  Toshio Tsuchida ,  Atsushi Hosaka

发明人： Shigetoshi Nishii ,  Toshimitsu Matsuoka ,  Toshio Tsuchida ,  Atsushi Hosaka

IPC分类号： B60R19/50 ,  B60R13/10

CPC分类号： B60R19/50 ,  Y10T403/125

摘要： A bumper main body has a pair of recesses into each of which a blank cap is disposed and fixedly and releasably held at its clipping portions by a first arm of a U-shaped leaf nut mounted on each of projections. The blank caps each have an outer surface flush with an outer surface of the bumper main body and a blind hole aligned with one of internally threaded flanged holes of the U-shaped leaf nut. The blind hole has a thin-walled closed end which is removed when a fastening bolt is screwed through the blind hole into one of the flanged holes to fasten a license plate to the bumper main body. The blind hole is alignable with the other of the flanged holes when the clipping portions are reversely attached to the leaf nut.

摘要翻译： 保险杠主体具有一对凹部，每个凹部设置有空白盖，并且通过安装在每个突起上的U形叶螺母的第一臂固定地且可释放地保持在其夹持部。 空白盖板各自具有与保险杠主体的外表面齐平的外表面和与U形叶螺母的内螺纹法兰孔中的一个对准的盲孔。 盲孔具有薄壁的封闭端，当紧固螺栓通过盲孔拧入其中一个凸缘孔中时，将其封闭在保险杠主体上。 当夹紧部分反向连接到叶片螺母时，盲孔可与另一个凸缘孔对准。