Method and apparatus for imaging of features on a substrate
    2.
    发明授权
    Method and apparatus for imaging of features on a substrate 失效
    用于在基板上成像的方法和装置

    公开(公告)号:US08692876B2

    公开(公告)日:2014-04-08

    申请号:US13002912

    申请日:2009-07-08

    IPC分类号: H04N7/18

    CPC分类号: G06T7/75 G06T2207/30072

    摘要: A method for imaging features on a substrate, comprising scanning the substrate and producing an image thereof, overlaying a grid model on the image, fitting the grid model to the locations of at least some of the features on the image, and extracting images of the features.

    摘要翻译: 一种用于对基底上的特征成像的方法,包括扫描基底并产生其图像,将图像上的网格模型重叠,将网格模型拟合到图像上的至少一些特征的位置,以及提取图像的图像 特征。

    Method and Apparatus for Imaging of Features on a Substrate
    3.
    发明申请
    Method and Apparatus for Imaging of Features on a Substrate 失效
    用于成像基板上特征的方法和装置

    公开(公告)号:US20110175994A1

    公开(公告)日:2011-07-21

    申请号:US13002912

    申请日:2009-07-08

    IPC分类号: H04N7/18

    CPC分类号: G06T7/75 G06T2207/30072

    摘要: A method for imaging features on a substrate, comprising scanning the substrate and producing an image thereof, overlaying a grid model on the image, fitting the grid model to the locations of at least some of the features on the image, and extracting images of the features.

    摘要翻译: 一种用于对基底上的特征成像的方法,包括扫描基底并产生其图像,将图像上的网格模型重叠,将网格模型拟合到图像上的至少一些特征的位置,以及提取图像的图像 特征。