公开(公告)号：US3925785A

公开(公告)日：1975-12-09

申请号：US49615074

申请日：1974-08-09

Applicant: BELL TELEPHONE LABOR INC

Inventor： FIRTION VICTOR ANDREW ,  RONGVED LEIF ,  SAUNDERS THOMAS EDWARD

IPC: H05K3/00 ,  B23K26/08 ,  B41C1/00 ,  G02B27/00 ,  G03F7/20 ,  H01B3/00 ,  H01L21/027 ,  G01D15/24

CPC classification number: G03F7/704 ,  B23K26/0838 ,  B23K2201/007 ,  C08K3/08 ,  C08K3/34 ,  H01B3/004 ,  C08L101/00

Abstract: Integrated circuit mask patterns are laser machined by mounting substrates on a support that is periodically stepped in a y direction after each scan by a laser writing beam in an x direction. X-direction scanning is accomplished by mounting a mirror on a carriage that reciprocates by rebounding between two displaced coil springs. A coding laser beam is reflected from the carriage through a stationary code plate, comprising alternate transparent and opaque stripes, to monitor the position of the carriage and to control the modulation of the writing beam.

公开(公告)号：US3870416A

公开(公告)日：1975-03-11

申请号：US43208274

申请日：1974-01-09

Applicant: BELL TELEPHONE LABOR INC

Inventor： BRADY KEVIN JAMES ,  FIRTION VICTOR ANDREW ,  RONGVED LEIF ,  SAUNDERS THOMAS EDWARD

IPC: B23Q1/36 ,  G01B11/03 ,  G03F7/20 ,  H05K13/00 ,  G01B11/26

CPC classification number: G03F7/70716 ,  B23Q1/36 ,  H05K13/0015

Abstract: A wafer alignment device comprises a support platform supported by three flexible rods extending downwardly to a linking ring. Three flexible rods extend upwardly from the linking ring to a stationary table. The support platform can be moved in x, y and theta directions, to align the wafer with great accuracy and without accompanying z-direction motion, for photolithographic printing purposes.

Abstract translation: 晶片对准装置包括由向下延伸到连接环的三个柔性杆支撑的支撑平台。 三个柔性杆从连接环向上延伸到固定台。 支撑平台可以在x，y和θ方向上移动，以便以高精度对准晶片，并且不伴随z方向运动，用于光刻打印目的。

公开(公告)号：US3622221A

公开(公告)日：1971-11-23

申请号：US3622221D

申请日：1969-06-04

Applicant: BELL TELEPHONE LABOR INC

Inventor： KOSSYK GUNTER J W ,  RONGVED LEIF ,  STAFFORD JOHN W ,  WEST JOHN W

IPC: G02B7/182 ,  G02B17/00

CPC classification number: G02B7/1821

Abstract: The polygonal mirror of a light beam scanner is aligned on a shaft by three mounting fixtures, each comprising a stiff spring bearing against one side of the mirror and a relatively soft spring bearing against the opposite side. The soft spring is compressed against the mirror by a bolt. The rotational plane of the mirror is adjusted by threading the bolts toward or away from the mirror.

公开(公告)号：US3927939A

公开(公告)日：1975-12-23

申请号：US42903773

申请日：1973-12-27

Applicant: BELL TELEPHONE LABOR INC

Inventor： BRADY KEVIN JAMES ,  FIRTION VICTOR ANDREW ,  RONGVED LEIF ,  SAUNDERS THOMAS EDWARD

IPC: G03F7/20 ,  G03B27/44

CPC classification number: G03F7/70716

Abstract: A table is reciprocated along a straight line by a force that does not precisely control movement direction. Accurate motion constraint is provided by two separated air bearings arranged along a common axis. A third air bearing, displaced from the common axis, supports the table on a sleeve that is free to rotate on its axis.

Abstract translation: 通过不精确地控制运动方向的力沿着直线往复运动的台子。 精确的运动约束由沿公共轴线布置的两个分离的空气轴承提供。 从公共轴线移位的第三个空气轴承将桌子支撑在可自由旋转的轴套上。

公开(公告)号：US3659473A

公开(公告)日：1972-05-02

申请号：US3659473D

申请日：1970-12-29

Applicant: BELL TELEPHONE LABOR INC

Inventor： RONGVED LEIF

IPC: F16H25/24 ,  F16H1/18 ,  F16H35/08 ,  F16H55/18

CPC classification number: F16H25/24 ,  Y10T74/19585 ,  Y10T74/19721 ,  Y10T74/19902

Abstract: A lead screw apparatus is disclosed that permits fine adjustments to be made in the screw pitch. A lead screw shaft having N threads, an initial length L, and a spring constant K1 is coaxially connecting to a spring having a spring constant K2 substantially smaller than K1. By deforming the spring by a distance delta 2, a force equal to delta 2K2 is generated. This force is transmitted to the lead screw, producing a change in length of the screw of delta 1 where delta 1 is equal to delta 2K2/K1. Since K2 is substantially smaller than K1, delta 1 will be substantially smaller than delta 2 by the same order of magnitude. Thus a large change delta 2 in the length of the spring will change the pitch of the lead screw from N/L to N/L + OR - + OR - delta 1.

Abstract translation: 公开了一种导螺杆装置，其允许在螺距上进行微调。 具有N个螺纹，初始长度L和弹簧常数K1的丝杠轴同轴连接到具有基本上小于K1的弹簧常数K 2的弹簧。 通过使弹簧变形距离δ2，产生等于Δ2K2的力。 该力传递到导螺杆，产生δ1的螺杆长度的变化，其中δ1等于δ2K 2 / K1。 由于K2基本上小于K1，所以Δ1将显着小于δ2相同数量级。 因此，弹簧长度上的一个较大的变化Δ2会将导螺杆的螺距从N / L变为N / L +/- +/- delta 1。