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公开(公告)号：US10312655B2
公开(公告)日：2019-06-04
申请号：US15841619
申请日：2017-12-14
发明人： Yin Xie , Zubin Lv , Yu Zhang , Yongzhou Ling , Yayu Wang , Jingshuai Wang , Chenliang Liu , Rujian Li , Kang Luo
摘要： An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening.
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公开(公告)号：US10598220B2
公开(公告)日：2020-03-24
申请号：US15816341
申请日：2017-11-17
发明人： Chenliang Liu , Donghua Jiang , Yongyi Fu , Chao Tan , Xuewei Wang , Rujian Li , Kang Luo , Yongzhou Ling , Yin Xie , Jianbo Yang , Fei Li
摘要： A bearing device and an ion implantation device are provided. The bearing device includes a bearing table configured to bear a substrate, and a plurality of supporting components configured to support the substrate, each supporting component is movably arranged on the bearing table, to support the substrate at an adjustable position.
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公开(公告)号：US10896829B2
公开(公告)日：2021-01-19
申请号：US15981209
申请日：2018-05-16
IPC分类号： H01L21/67 , B23K26/00 , H01L21/02 , B23K26/14 , B23K26/354
摘要： An excimer laser annealing apparatus is provided. The excimer laser annealing apparatus includes: a laser output channel, at least one first intake pipe and at least one second intake pipe, the laser output channel includes two end faces facing to each other and a side face connected with both of the two end faces; the at least one first intake pipe is located on the side face; and the at least one second intake pipe is located on at least one of the two end faces.
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