公开(公告)号：US10312655B2

公开(公告)日：2019-06-04

申请号：US15841619

申请日：2017-12-14

申请人： BOE TECHNOLOGY GROUP CO., LTD. ,  CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.

发明人： Yin Xie ,  Zubin Lv ,  Yu Zhang ,  Yongzhou Ling ,  Yayu Wang ,  Jingshuai Wang ,  Chenliang Liu ,  Rujian Li ,  Kang Luo

IPC分类号： H01S3/034 ,  H01S3/225 ,  H01S3/036 ,  H01S3/02

摘要： An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening.

公开(公告)号：US10665454B2

公开(公告)日：2020-05-26

申请号：US15973664

申请日：2018-05-08

申请人： BOE TECHNOLOGY GROUP CO., LTD. ,  Ordos Yuansheng Optoelectronics Co., Ltd.

发明人： Jingshuai Wang ,  Chul Ho Lee ,  Yongzhi Hao ,  Xiaoqiang Han ,  Zhanpeng Zhang ,  Guimei Zhang

IPC分类号： H01L21/36 ,  H01L21/02 ,  H01L21/687 ,  H01L27/12 ,  H01L21/67 ,  B23K26/00 ,  B23K26/12 ,  B23K26/352 ,  B23K26/14 ,  B23K26/08 ,  B23K101/40 ,  B23K103/00

摘要： A laser annealing apparatus including a carrying platform with a fixing surface, a laser source and a driving device. The laser source is configured to emit a laser beam toward the fixing surface, the laser beam having an illumination area which covers a center of the fixing surface and extends toward an edge of the fixing surface, in an extending direction of the illumination area the illumination area having a length which is not less than a distance between the center of the fixing surface and the edge of the fixing surface. The driving device is configured to drive the carrying platform to rotate around the center of the fixing surface.