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公开(公告)号：US10907767B2
公开(公告)日：2021-02-02
申请号：US16053913
申请日：2018-08-03
发明人： Huan Liu , Xunze Zhang , Gan Song , Hao Zhu , Dong Ding , Xiaokun Wang , Qingliang Wen , Jian Wang , Wenjun Zhang , Zengzhi Xuan , Wei Dong , Jinwei Huang , Hu Wang , Hualu Wang
摘要： A guide rail oiling tool includes: a sliding body, which is capped on a guide rail and slidable along the guide rail, and has an inner side surface facing a surface to be oiled of the guide rail, a shape of the inner side surface being matched with a shape of the surface to be oiled of the guide rail; an oil inlet disposed on the sliding body; and an oiling groove in communication with the oil inlet, disposed on the inner side surface of the sliding body and surrounding the surface to be oiled of the guide rail, so that the oiling groove applies oil to the surface to be oiled of the guide rail when the sliding body is sliding.
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公开(公告)号：US09934948B2
公开(公告)日：2018-04-03
申请号：US14731544
申请日：2015-06-05
发明人： Xiaokun Wang , Sangsoo Park , Xunze Zhang , Zhaobo Wang , Lei Sha , Guanjie Cheng , Wenjun Zhang , Hualu Wang , Qingliang Wen , Leilei Lv
CPC分类号： H01J37/3417 , C23C14/086 , C23C14/3407 , C23C14/352 , C23C14/505 , C23C14/562 , H01J37/3447 , H01J37/3473 , H01J37/3488
摘要： It is provided a magnetron-sputtering coating system including a sputtering chamber. The sputtering chamber therein includes: a set of target, formed by concatenating a plurality pieces of target; a substrate carrier, arranged to be opposite to the target set, and support a substrate to be coated with a film; and a driving device, arranged to drive the substrate carrier to reciprocate in a direction of the arrangement of the target.
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