公开(公告)号：US09784698B2

公开(公告)日：2017-10-10

申请号：US14523484

申请日：2014-10-24

Applicant: Bruker AXS, Inc.

Inventor： Roger D. Durst ,  Joerg Kaercher ,  Gregory A. Wachter

IPC: G01N23/207 ,  G01N23/20 ,  G01T1/24 ,  G06F17/17

CPC classification number: G01N23/207 ,  G01N23/20016 ,  G01T1/247 ,  G06F17/17

Abstract: In an X-ray detector operating in a rolling shutter read out mode, by precisely synchronizing sample rotation with the detector readout, the effects of timing skew on the image intensities and angular positions caused by the rolling shutter read out can be compensated by interpolation or calculation, thus allowing the data to be accurately integrated with conventional software. In one embodiment, the reflection intensities are interpolated with respect to time to recreate data that is synchronized to a predetermined time. This interpolated data can then be processed by any conventional integration routine to generate a 3D model of the sample. In another embodiment a 3D integration routine is specially adapted to allow the time-skewed data to be processed directly and generate a 3D model of the sample.

公开(公告)号：US20140264046A1

公开(公告)日：2014-09-18

申请号：US13833346

申请日：2013-03-15

Applicant: BRUKER AXS, INC.

Inventor： Roger D. Durst ,  Peter Laggner ,  Sergei A. Medved ,  Bruce L. Becker

IPC: G01T1/16 ,  G01T1/24

CPC classification number: G01T1/1606 ,  G01N23/201 ,  G01N2223/054 ,  G01T1/24 ,  H01L31/085 ,  Y10T29/4913

Abstract: A detector for a small-angle x-ray diffraction system uses curved readout strips shaped to correspond to the expected intensity distribution of x-rays scattered by the system. This expected intensity distribution may be a series of concentric circles, and each of the strips has a shape that approximates a section of an annulus. The strips may be positioned on a substrate such that a center of curvature of the curved strips is located along an edge of a readout region within which the strips are located or, alternatively, at a geometric center of the readout region. The detector may have a signal readout system that uses a delay line or, alternatively, a multichannel readout system. The detector may make use of electron generation via interaction of the diffracted x-ray beam with a gas in a gas chamber, or through interaction of the diffracted beam with a semiconductor material.

Abstract translation: 用于小角度X射线衍射系统的检测器使用弯曲的读出条，其形状对应于由系统散射的x射线的预期强度分布。 该预期的强度分布可以是一系列同心圆，并且每个条具有近似于环的一部分的形状。 条带可以定位在基板上，使得弯曲条带的曲率中心沿着条带所在的读出区域的边缘或者替代地位于读出区域的几何中心处。 检测器可以具有使用延迟线或者替代地，多通道读出系统的信号读出系统。 检测器可以通过衍射X射线束与气室中的气体的相互作用或通过衍射光束与半导体材料的相互作用来利用电子产生。

公开(公告)号：US09024268B2

公开(公告)日：2015-05-05

申请号：US13833346

申请日：2013-03-15

Applicant: Bruker AXS, Inc.

Inventor： Roger D. Durst ,  Peter Laggner ,  Sergei A. Medved ,  Bruce L. Becker

IPC: G01T1/24 ,  G01T1/16 ,  G01N23/201

CPC classification number: G01T1/1606 ,  G01N23/201 ,  G01N2223/054 ,  G01T1/24 ,  H01L31/085 ,  Y10T29/4913

Abstract: A detector for a small-angle x-ray diffraction system uses curved readout strips shaped to correspond to the expected intensity distribution of x-rays scattered by the system. This expected intensity distribution may be a series of concentric circles, and each of the strips has a shape that approximates a section of an annulus. The strips may be positioned on a substrate such that a center of curvature of the curved strips is located along an edge of a readout region within which the strips are located or, alternatively, at a geometric center of the readout region. The detector may have a signal readout system that uses a delay line or, alternatively, a multichannel readout system. The detector may make use of electron generation via interaction of the diffracted x-ray beam with a gas in a gas chamber, or through interaction of the diffracted beam with a semiconductor material.

Abstract translation: 用于小角度X射线衍射系统的检测器使用弯曲的读出条，其形状对应于由系统散射的x射线的预期强度分布。 该预期的强度分布可以是一系列同心圆，并且每个条具有近似于环的一部分的形状。 条带可以定位在基板上，使得弯曲条带的曲率中心沿着条带所在的读出区域的边缘或者替代地位于读出区域的几何中心处。 检测器可以具有使用延迟线或者替代地，多通道读出系统的信号读出系统。 检测器可以通过衍射X射线束与气室中的气体的相互作用或通过衍射光束与半导体材料的相互作用来利用电子产生。

公开(公告)号：US10408949B2

公开(公告)日：2019-09-10

申请号：US16047731

申请日：2018-07-27

Applicant: Bruker AXS, Inc.

Inventor： Hao Jiang ,  Joerg Kaercher ,  Roger D. Durst

IPC: G01T1/20 ,  G01T1/36

Abstract: An indirect, photon-counting X-ray detector capable of detecting the low-energy X-rays includes a scintillator screen that is directly coupled to a two-dimensional optical sensor. A signal filter receives an electrical output signal from the optical sensor and removes high intensity signal contributions therefrom that are indicative of direct interaction between said X-ray signal and said optical sensor. The scintillator screen has a sufficient thickness to ensure a high absorption of incident X-ray photons, and uses phosphor grains with a relatively small grain size. A cooling apparatus in thermal communication with the optical sensor may be used to control its temperature. The signal filter maintains a running average of changes in measured pixel output values for consecutive measurements, and replaces a measured value caused by a direct interaction event with a value equal to a previous measured value plus said running average.

公开(公告)号：US09897707B2

公开(公告)日：2018-02-20

申请号：US14310102

申请日：2014-06-20

Applicant: BRUKER AXS, INC.

Inventor： Roger D. Durst ,  Gregory A. Wachter ,  Tianqing He

IPC: G01T1/208 ,  G01T1/20

CPC classification number: G01T1/208 ,  G01T1/2018

Abstract: A method for X-ray detection using a charge-integrating X-ray detector including a photodetector array of pixels, each of which converts incident radiation into accumulated charge during an X-ray exposure, is provided. The method includes, for each pixel, reading out the accumulated charge from the pixel and determining an X-ray charge value from the read out accumulated charge. If the X-ray charge value is less than a photon counting threshold, the X-ray charge value is replaced with a quantized charge value representative of an estimated photon count and recording the quantized charge value as a recorded charge value. If, however, the X-ray charge is equal to or greater than the photon counting threshold, the X-charge value is recorded as the recorded charge value. The method allows operating a charge-integrating X-ray detector in a mixed photon-counting/analog output mode.