Method of manufacturing electric device, array of electric devices, and manufacturing method therefor
    9.
    发明授权
    Method of manufacturing electric device, array of electric devices, and manufacturing method therefor 有权
    电气装置的制造方法,电气装置的阵列及其制造方法

    公开(公告)号:US08679984B2

    公开(公告)日:2014-03-25

    申请号:US13173986

    申请日:2011-06-30

    IPC分类号: H01L21/461

    摘要: An example embodiment relates to a method of manufacturing an array of electric devices that includes attaching a platform including a micro-channel structure to a substrate. The method includes injecting first and second solutions into the micro-channel structure to form at least three liquid film columns, where the first and second solutions include different solvent composition ratios and the liquid columns each, respectfully, include different solvent composition ratios. The method further includes detaching the platform the substrate, removing solvent from the liquid film columns to form thin film columns, and treating the thin film columns under different conditions along a length direction of the thin film columns. The solvent is removed from the thin film columns and the thin film columns are treated under different conditions along a length direction of the thin film columns.

    摘要翻译: 示例性实施例涉及一种制造电气设备阵列的方法,其包括将包括微通道结构的平台附接到基板。 该方法包括将第一和第二溶液注入到微通道结构中以形成至少三个液膜柱,其中第一和第二溶液包括不同的溶剂组成比,并且液柱各自包括不同的溶剂组成比。 该方法还包括将基板分离,从液膜柱移除溶剂以形成薄膜柱,以及沿着薄膜柱的长度方向在不同条件下处理薄膜柱。 从薄膜柱中除去溶剂,并在薄膜柱的长度方向上在不同的条件下处理薄膜柱。