Gray scale mask and depth pattern transfer technique using inorganic
chalcogenide glass
    1.
    发明授权
    Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass 失效
    使用无机硫族化物玻璃的灰度掩模和深度图案转移技术

    公开(公告)号:US6033766A

    公开(公告)日:2000-03-07

    申请号:US228910

    申请日:1999-01-11

    Abstract: A method of producing a high resolution expanded analog gray scale mask is described. Using an inorganic chalcogenide glass, such as a selenium germanium, coated with a thin layer of silver, a gray scale mask may be produced with accurate control of the size, uniformity and variance of the pixels. The selenium germanium glass is composed of column structures arranged perpendicularly to the substrate giving a possible edge precision of 100 .ANG.. The column structures also prevent undercutting during the etching process, thus permitting pixels to be placed close together. Accordingly, selenium germanium may be used as a high resolution gray scale mask with an expanded analog gray scale. The gray scale mask may be used to impress information as a modulated thickness on a selenium germanium photoresist layer on an inorganic substrate. The selenium germanium photoresist layer may then transfer the gray scale to the substrate.

    Abstract translation: 描述了一种制造高分辨率扩展模拟灰度掩模的方法。 使用涂覆有薄银层的无机硫族化物玻璃(例如硒锗)可以通过精确控制像素的尺寸,均匀性和方差来生产灰度掩模。 硒锗玻璃由垂直于衬底排列的柱结构组成,给出了100 ANGSTROM的边缘精度。 柱结构还防止在蚀刻工艺期间的底切,从而允许像素靠近放置在一起。 因此,硒锗可以用作具有扩展的模拟灰度级的高分辨率灰度级掩模。 灰度掩模可用于将无机基底上的硒锗光致抗蚀剂层上的信息作为调制厚度印记。 然后,硒锗光致抗蚀剂层可以将灰度级转移到衬底。

    Gray scale mask and depth pattern transfer technique using inorganic
chalcogenide glass
    2.
    发明授权
    Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass 失效
    使用无机硫族化物玻璃的灰度掩模和深度图案转移技术

    公开(公告)号:US5998066A

    公开(公告)日:1999-12-07

    申请号:US857324

    申请日:1997-05-16

    Abstract: A method of producing a high resolution expanded analog gray scale mask is described. Using an inorganic chalcogenide glass, such as a selenium germanium, coated with a thin layer of silver, a gray scale mask may be produced with accurate control of the size, uniformity and variance of the pixels. The selenium germanium glass is composed of column structures arranged perpendicularly to the substrate giving a possible edge precision of 100 .ANG.. The column structures also prevent undercutting during the etching process, thus permitting pixels to be placed close together. Accordingly, selenium germanium may be used as a high resolution gray scale mask with an expanded analog gray scale. The gray scale mask may be used to impress information as a modulated thickness on a selenium germanium photoresist film on an inorganic substrate. The selenium germanium photoresist film may then transfer the gray scale to the substrate.

    Abstract translation: 描述了一种制造高分辨率扩展模拟灰度掩模的方法。 使用涂覆有薄银层的无机硫族化物玻璃(例如硒锗)可以通过精确控制像素的尺寸,均匀性和方差来生产灰度掩模。 硒锗玻璃由垂直于衬底排列的柱结构组成,给出了100 ANGSTROM的边缘精度。 柱结构还防止在蚀刻工艺期间的底切,从而允许像素靠近放置在一起。 因此,硒锗可以用作具有扩展的模拟灰度级的高分辨率灰度级掩模。 灰度掩模可用于将信息作为调制厚度印在无机基板上的硒锗光致抗蚀剂膜上。 然后硒锗光致抗蚀剂膜可以将灰度级转移到衬底。

    Self loading suspension for hard disk drives
    3.
    发明授权
    Self loading suspension for hard disk drives 失效
    用于硬盘驱动器的自加载悬架

    公开(公告)号:US5446612A

    公开(公告)日:1995-08-29

    申请号:US216222

    申请日:1994-03-22

    CPC classification number: G11B21/21

    Abstract: A head suspension assembly for a hard disk drive data storage device which prevents contact between the head portion of the mechanism and the surface of the data storage media. An arm member includes a head assembly secured to one end and a bushing at the other end for engaging a rotatable positioning shaft. The arm member applies a resilient beam loading force to urge the arm member away from the media, and includes an aerodynamic airfoil that interacts with the air flow adjacent to the media surface to oppose the beam loading force and move the arm member toward the media to a proper flying height. When the disk is spinning, the negative lift of the airfoil opposes the resilient loading of the arm member and urges the arm member closer to the surface of the rotating media. As the head approaches the rotating surface, the positive lift of the air bearing counterbalances the negative lift from the airfoil such that a dynamic equilibrium is established at a predetermined flying height. The assembly intrinsically prevents head-to-disk stiction and may minimize head crashes that are normally caused by excessive preload.

    Abstract translation: 一种用于硬盘驱动器数据存储装置的头悬挂组件,其防止机构的头部与数据存储介质的表面之间的接触。 臂构件包括固定到一端的头组件和在另一端处的用于接合可旋转定位轴的衬套。 臂构件施加弹性梁加载力以将臂构件推离介质,并且包括与邻近介质表面的空气流相互作用以对抗梁加载力并将臂构件朝向介质移动的空气动力学翼面 适当的飞行高度。 当盘旋转时,翼面的负提升与臂构件的弹性加载相反,并且促使臂构件更靠近旋转介质的表面。 当头部靠近旋转表面时,空气轴承的正升力使得从机翼的负升力平衡使得在预定飞行高度处建立动态平衡。 组件本质上可防止头对盘粘滞,并可能最小化通常由过度预载引起的头部碰撞。

    Assembly of compact disk drive having a glass disk with a magnesium head
arm assembly and a steel motor hub
    4.
    发明授权
    Assembly of compact disk drive having a glass disk with a magnesium head arm assembly and a steel motor hub 失效
    具有带有镁头臂组件的玻璃盘和钢马达轮毂的光盘驱动器的组装

    公开(公告)号:US5278709A

    公开(公告)日:1994-01-11

    申请号:US776186

    申请日:1991-10-15

    CPC classification number: G11B17/0287 G11B25/043 G11B33/14 G11B5/5521 G11B5/82

    Abstract: A compact disk drive useful with a laptop computer comprises at least one glass disk, thin film read/write heads and a head actuator preferably made of magnesium material. The drive motor hub and hub flange are made of steel and the magnet housing for the actuator is made from an integral steel unit. A flexible cable assembly, which is connected to the read/write head circuits and to external circuitry for data processing and for providing control signals, is formed with two flexible sections. Each section is attached to the head actuator and to stationary posts of the disk drive housing thereby balancing the forces applied to the actuator when it is moved for head accessing. A clamp for holding the disk to the motor hub is designed to minimize distortion and to prevent shifting and misalignment of the disk relative to the center of the motor hub.

    Abstract translation: 用于膝上型计算机的紧凑型磁盘驱动器包括至少一个玻璃盘,薄膜读/写头和优选由镁材料制成的头致动器。 驱动电机轮毂和轮毂法兰由钢制成,用于执行机构的磁体外壳由一体式钢单元制成。 连接到读/写头电路和用于数据处理的外部电路并用于提供控制信号的柔性电缆组件形成有两个柔性部分。 每个部分连接到磁头驱动器的头致动器和静止的支柱,从而当施加到致动器的力被移动以便磁头进入时平衡施加的力。 用于将盘保持到电动机毂的夹具被设计成使变形失真最小化并且防止盘相对于电动机毂的中心的移位和不对准。

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