公开(公告)号：US06600591B2

公开(公告)日：2003-07-29

申请号：US09880230

申请日：2001-06-12

申请人： Robert Anderson ,  Bevan Staple ,  Richard Roth

发明人： Robert Anderson ,  Bevan Staple ,  Richard Roth

IPC分类号： G02B2600

CPC分类号： G02B26/0841 ,  Y10S359/904

摘要： A method and system are provided for operating an array of such optical micromirrors. Electrodes associated with each of a plurality of optical micromirrors within the array are sequentially actuated by applying a voltage to each such electrode for a fixed time. The voltage applied to each of the electrodes is selected so that the optical micromirror with which that electrode is associated is positioned in a certain tilted position. The step of sequentially actuating electrodes is repeated to maintain the tilted positions of the plurality of optical micromirrors.

公开(公告)号：US06969996B2

公开(公告)日：2005-11-29

申请号：US10839545

申请日：2004-05-04

申请人： Bevan Staple ,  Robert Anderson

发明人： Bevan Staple ,  Robert Anderson

IPC分类号： G02B26/08 ,  G01R31/02

CPC分类号： G02B26/0841

摘要： A configuration is provided by which it may be determined whether a MEMS device is in a select state. The select state is defined by a position of a moveable element, which is moved with electrostatic forces upon activation of an electrode. The select state is detected with a sensing configuration that has first and second regions. The regions are generally separated such that they are electrically uncoupled unless the moveable element is in the position that defines the select state. A detector may be provided to indicate whether the first and second regions are coupled electrically.

摘要翻译： 提供了可以确定MEMS器件是否处于选择状态的配置。 选择状态由可动元件的位置限定，可移动元件在电极激活时用静电力移动。 用具有第一和第二区域的感测配置来检测选择状态。 这些区域通常被分开，使得它们被电分离，除非可移动元件处于限定选择状态的位置。 可以提供检测器来指示第一和第二区域是否电耦合。

公开(公告)号：US06750655B2

公开(公告)日：2004-06-15

申请号：US10080789

申请日：2002-02-21

申请人： Bevan Staple ,  Robert Anderson

发明人： Bevan Staple ,  Robert Anderson

IPC分类号： G01R31327

CPC分类号： G02B26/0841

摘要： A configuration is provided by which it may be determined whether a MEMS device is in a select state. The select state is defined by a position of a moveable element, which is moved with electrostatic forces upon activation of an electrode. The select state is detected with a sensing configuration that has first and second regions. The regions are generally separated such that they are electrically uncoupled unless the moveable element is in the position that defines the select state. A detector may be provided to indicate whether the first and second regions are coupled electrically.

摘要翻译： 提供了可以确定MEMS器件是否处于选择状态的配置。 选择状态由可动元件的位置限定，可移动元件在电极激活时用静电力移动。 用具有第一和第二区域的感测配置来检测选择状态。 这些区域通常被分开，使得它们被电分离，除非可移动元件处于限定选择状态的位置。 可以提供检测器来指示第一和第二区域是否电耦合。

公开(公告)号：US07030537B2

公开(公告)日：2006-04-18

申请号：US10791633

申请日：2004-03-01

申请人： Bevan Staple ,  Richard Roth

发明人： Bevan Staple ,  Richard Roth

IPC分类号： H02N1/00 ,  G02B26/08

CPC分类号： B81B3/0008 ,  B81B2201/042 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3556 ,  G02B6/3558 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/358

摘要： A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First hand second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.

摘要翻译： 提供了一种减轻沉降问题的转向灯微结构。 包括反射涂层的第一可倾斜组件与衬底连接。 第二可倾斜组件也与衬底连接。 第一手第二电极与衬底连接并且被配置为使两个可倾斜组件倾斜以使它们相互交错。 在各种实施例中，可倾斜组件被配置为悬臂布置和/或扭力梁布置。

公开(公告)号：US06616853B1

公开(公告)日：2003-09-09

申请号：US09799916

申请日：2001-03-05

申请人： Bevan Staple ,  David Miller ,  Lilac Muller

发明人： Bevan Staple ,  David Miller ,  Lilac Muller

IPC分类号： H01L2100

CPC分类号： B81C1/00476 ,  B81B2201/042 ,  B81C2201/0133 ,  G02B6/3518

摘要： A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.

摘要翻译： 提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。 包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。 牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。 该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。 通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

公开(公告)号：US09425254B1

公开(公告)日：2016-08-23

申请号：US13439651

申请日：2012-04-04

申请人： Matthew L. Gross ,  James H. Eraker ,  Beth H. Kelsic ,  Bevan Staple

发明人： Matthew L. Gross ,  James H. Eraker ,  Beth H. Kelsic ,  Bevan Staple

IPC分类号： H01L29/06

CPC分类号： H01L29/0673 ,  B82Y20/00 ,  H01L29/0665

摘要： Systems and methods for providing a hybrid integrated nanostructure and nanotube substrate system are disclosed. The system includes a substrate having a plurality of nanostructures formed thereon. Interconnected to the substrate, directly or through nanostructures, are nanotubes. The nanostructures can extend for a greater distance from the surface of the substrate than the nanotubes, providing a robust structure. In addition, the structure can be highly emissive and absorptive hybrid surface.

摘要翻译： 公开了用于提供混合集成纳米结构和纳米管衬底系统的系统和方法。 该系统包括其上形成有多个纳米结构的基底。 直接或通过纳米结构与基底相互连接的是纳米管。 与纳米管相比，纳米结构可延伸到衬底的表面更远的距离，提供了坚固的结构。 此外，结构可以是高度发射和吸收的混合表面。

公开(公告)号：US07153440B2

公开(公告)日：2006-12-26

申请号：US10242213

申请日：2002-09-12

申请人： Bevan Staple ,  Jillian Buriak

发明人： Bevan Staple ,  Jillian Buriak

IPC分类号： C23F1/00

CPC分类号： B82Y30/00 ,  B81C1/00476 ,  B81C1/00801 ,  B81C2201/0114 ,  B81C2201/0133 ,  B81C2201/0139 ,  B81C2201/053

摘要： A microelectromechanical structure is formed by depositing sacrificial and structural material over a substrate to form a structural layer on a component electrically attached with the substrate. The galvanic potential of the structural layer is greater than the galvanic potential of the component. At least a portion of the structural material is covered with a protective material that has a galvanic potential less than or equal to the galvanic potential of the component. The sacrificial material is removed with a release solution. At least one of the protective material and release solution is surfactanated, the surfactant functionalizing a surface of the component.

公开(公告)号：US06859580B2

公开(公告)日：2005-02-22

申请号：US10632662

申请日：2003-08-01

申请人： Bevan Staple ,  David Paul Anderson ,  Lilac Muller

发明人： Bevan Staple ,  David Paul Anderson ,  Lilac Muller

IPC分类号： G02B6/34 ,  G02B6/35 ,  G02B26/08

CPC分类号： G02B6/358 ,  B81B3/0016 ,  B81B2201/047 ,  B81B2203/0181 ,  G02B6/29307 ,  G02B6/2931 ,  G02B6/3518 ,  G02B6/352 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3556 ,  G02B6/3558 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3598 ,  G02B26/0841 ,  Y10T307/977

摘要： A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.

摘要翻译： 提供了包括第一和第二结构板下面的基底层的微结构。 微结构的操作能够克服粘性。 操作方法包括提供与接触点接触的第一结构板的边缘。 第二结构板以克服第一结构板和接触点之间的静摩擦的方式偏转。 这种偏转可以包括提供用于提升第一结构板的撬力力或锤击力以扰乱接触点处的任何相关的力。

公开(公告)号：US06701037B2

公开(公告)日：2004-03-02

申请号：US09899002

申请日：2001-07-03

申请人： Bevan Staple ,  Richard Roth

发明人： Bevan Staple ,  Richard Roth

IPC分类号： G02B635

CPC分类号： B81B3/0008 ,  B81B2201/042 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3556 ,  G02B6/3558 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/358

摘要： A microstructure for steering light that mitigates stiction problems is provided. A first tiltable assembly that includes a reflective coating is connected with a substrate. A second tiltable assembly is also connected with the substrate. First and second electrodes are connected with the substrate and are configured to tilt the two tiltable assemblies such that they are interdigitated. In various embodiments, the tiltable assemblies are configured as cantilever arrangements and/or torsion-beam arrangements.

摘要翻译： 提供了一种减轻沉降问题的转向灯微结构。 包括反射涂层的第一可倾斜组件与衬底连接。 第二可倾斜组件也与衬底连接。 第一和第二电极与衬底连接并且被配置成使两个可倾斜组件倾斜以使它们交错。 在各种实施例中，可倾斜组件被配置为悬臂布置和/或扭力梁布置。

公开(公告)号：US09041915B2

公开(公告)日：2015-05-26

申请号：US13099118

申请日：2011-05-02

申请人： Ronald P. Earhart ,  Rex M. Craig ,  Christian J. Grund ,  Bevan Staple ,  Carl S. Weimer

发明人： Ronald P. Earhart ,  Rex M. Craig ,  Christian J. Grund ,  Bevan Staple ,  Carl S. Weimer

IPC分类号： G01C3/08 ,  G01S3/786 ,  G01S7/481 ,  G01S17/02 ,  G01S17/58 ,  G01S17/87 ,  G01S17/88 ,  G01S17/89 ,  G01S17/93 ,  G01S7/00

CPC分类号： G01S3/7867 ,  G01S7/003 ,  G01S7/4813 ,  G01S7/4814 ,  G01S7/4816 ,  G01S17/023 ,  G01S17/58 ,  G01S17/87 ,  G01S17/88 ,  G01S17/89 ,  G01S17/933

摘要： The present invention pertains to systems and methods for the capture of information regarding scenes using single or multiple three-dimensional LADAR systems. Where multiple systems are included, those systems can be placed in different positions about the imaged scene such that each LADAR system provides different viewing perspectives and/or angles. In accordance with further embodiments, the single or multiple LADAR systems can include two-dimensional focal plane arrays, in addition to three-dimensional focal plane arrays, and associated light sources for obtaining three-dimensional information about a scene, including information regarding the contours of the objects within the scene. Processing of captured image information can be performed in real time, and processed scene information can include data frames that comprise three-dimensional and two-dimensional image data.

摘要翻译： 本发明涉及用于捕获关于使用单个或多个三维LADAR系统的场景的信息的系统和方法。 在包括多个系统的地方，这些系统可以被放置在关于成像场景的不同位置，使得每个LADAR系统提供不同的观看视角和/或角度。 根据另外的实施例，除了三维焦平面阵列之外，单个或多个LADAR系统还可以包括二维焦平面阵列，以及用于获得关于场景的三维信息的相关联的光源，包括关于轮廓的信息 的场景内的物体。 拍摄图像信息的处理可以实时执行，并且处理的场景信息可以包括包括三维和二维图像数据的数据帧。