公开(公告)号：US20040170771A1

公开(公告)日：2004-09-02

申请号：US10755918

申请日：2004-01-13

申请人： Board of Regents, The University of Texas System

发明人： Todd Bailey ,  Byung J. Choi ,  Matthew Colburn ,  S. V. Sreenivasan ,  C. Grant Willson ,  John Ekerdt

IPC分类号： B05D001/36

CPC分类号： G11B5/855 ,  B29C35/0888 ,  B29C37/0053 ,  B29C43/003 ,  B29C2035/0827 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S977/887

摘要： The present invention includes a method of moving a liquid between a substrate extending in a first plane and a template extending in a second plane. More specifically, the method may include forming an oblique angle between the first plane and the second plane, reducing a distance between the substrate and the template such that the template is in contact with a portion of the liquid at a desired location, and creating a dispersion of the liquid away from the desired location.

摘要翻译： 本发明包括一种在第一平面中延伸的基板和在第二平面中延伸的模板之间移动液体的方法。 更具体地，该方法可以包括在第一平面和第二平面之间形成倾斜角度，减小基板和模板之间的距离，使得模板在期望位置与液体的一部分接触，并且产生 液体离开所需位置分散。

公开(公告)号：US20040189994A1

公开(公告)日：2004-09-30

申请号：US10805916

申请日：2004-03-22

申请人： Board of Regents, The University of Texas System

发明人： S. V. Sreenivasan ,  Byung J. Choi ,  Matthew Colburn ,  Todd Bailey

IPC分类号： G01B011/00 ,  G03F009/00 ,  C12Q001/68

CPC分类号： B29C35/0888 ,  B29C37/0053 ,  B29C43/003 ,  B29C43/021 ,  B29C2035/0827 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S101/36 ,  Y10T428/24802

摘要： The present invention includes a method of aligning a substrate and a template spaced-apart from the substrate with an activating light curable liquid disposed therebetween, the substrate having substrate alignment marks and the template having template alignment marks, the method including, reducing a distance between the substrate and the template to cause a spreading of the activating light curable liquid; and varying an overlay placement of the template with respect to the substrate such that the template alignment marks are substantially aligned with the substrate alignment marks before the spreading causes the activating light curable liquid to cover an area between the substrate alignment marks and the template alignment marks.

摘要翻译： 本发明包括一种将衬底和与衬底间隔开的模板与其间设置的活化光可固化液体对准的方法，所述衬底具有衬底对准标记，并且模板具有模板对准标记，该方法包括， 基板和模板，以引起活化光可固化液体的扩散; 并且改变模板相对于基板的覆盖布局，使得模板对准标记在扩展之前基本对准基板对准标记，使得激活光可固化液体覆盖基板对准标记和模板对准标记之间的区域 。

公开(公告)号：US20040168586A1

公开(公告)日：2004-09-02

申请号：US10755997

申请日：2004-01-13

申请人： Board of Regents, The University of Texas System

发明人： Todd Bailey ,  Byung J. Choi ,  Matthew Colburn ,  S.V. Sreenivasan ,  C. Grant Willson ,  John Ekerdt

IPC分类号： B31F001/07 ,  B44B005/00 ,  B41F019/02 ,  G03B027/00

CPC分类号： G11B5/855 ,  B29C35/0888 ,  B29C37/0053 ,  B29C43/003 ,  B29C2035/0827 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S977/887

摘要： The present invention includes a template comprising a plurality of protrusions and a plurality of recessions with a distance between a zenith of any of the plurality of protrusions and a nadir of any one of the plurality of recessions being less than 250 nm.

摘要翻译： 本发明包括一个模板，其包括多个突起和多个凹陷，多个凹陷之间的距离在多个突起中的任何一个的顶点之间的距离和多个凹陷中的任一个的最低点之间小于250nm。

公开(公告)号：US20040163563A1

公开(公告)日：2004-08-26

申请号：US10781278

申请日：2004-02-18

申请人： The Board of Regents, The University of Texas System

发明人： S. V. Sreenivasan ,  Byung J. Choi ,  Matthew Colburn ,  Todd Bailey

IPC分类号： B41F001/00

CPC分类号： B29C35/0888 ,  B29C37/0053 ,  B29C43/003 ,  B29C43/021 ,  B29C2035/0827 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S101/36 ,  Y10T428/24802

摘要： The present invention includes a template to form a recorded pattern on a substrate from a conformable material disposed between the template and the substrate, with the recorded pattern having recorded features with designed dimensions, the template comprising an original pattern having original features with original dimensions, with the original dimensions differing from the designed dimensions sufficient to compensate for volumetric changes of the conformable material that occurs upon the conformable material transitioning between first and second states.

摘要翻译： 本发明包括一种模板，用于从设置在模板和基板之间的适形材料在基板上形成记录图案，记录图案具有设计尺寸的记录特征，模板包括具有原始尺寸的原始特征的原始图案， 原始尺寸与设计尺寸不同，足以补偿在第一和第二状态之间的顺应材料转变时发生的适形材料的体积变化。

公开(公告)号：US20040189996A1

公开(公告)日：2004-09-30

申请号：US10818099

申请日：2004-04-05

申请人： Board of Regents, The University of Texas System

发明人： S. V. Sreenivasan ,  Byung J. Choi ,  Matthew Colburn ,  Todd Bailey

IPC分类号： G01B011/00

CPC分类号： B29C35/0888 ,  B29C37/0053 ,  B29C43/003 ,  B29C43/021 ,  B29C2035/0827 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S101/36 ,  Y10T428/24802

摘要： The present invention includes a method of determining an alignment between a substrate and a template spaced-apart from the substrate and having a distance defined therebetween, the substrate having a first pattern disposed thereon and the template having a second pattern disposed thereon, the method including, sensing the first and the second pattern, with the distance being established such that the first and the second pattern form a desired moirnull pattern when the template and the substrate are in a desired spatial relationship.

摘要翻译： 本发明包括一种确定衬底和与衬底间隔开的并具有在其间限定的距离的模板之间的对准的方法，所述衬底具有设置在其上的第一图案，并且所述模板具有设置在其上的第二图案，所述方法包括 感测第一和第二图案，其中建立距离使得当模板和衬底处于期望的空间关系时，第一和第二图案形成期望的莫尔图案。

公开(公告)号：US20040209177A1

公开(公告)日：2004-10-21

申请号：US10843195

申请日：2004-05-11

申请人： Board of Regents, The University of Texas System

发明人： S.V. Sreenivasan ,  Byung J. Choi ,  Matthew Colburn ,  Todd Bailey

IPC分类号： C12Q001/68 ,  G03F009/00 ,  G03C005/00 ,  G01B011/00

CPC分类号： B29C35/0888 ,  B29C37/0053 ,  B29C43/003 ,  B29C43/021 ,  B29C2035/0827 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S101/36 ,  Y10T428/24802

摘要： The present invention includes a method of determining a relative position of a substrate and a template spaced-apart therefrom, the substrate having substrate alignment marks disposed thereon and the template having template alignment marks disposed thereon, the method including, impinging first and second fluxes of light upon the substrate and template alignment marks, with the substrate and template alignment marks being responsive to the first flux of light defining a first response, and being responsive to the second flux of light defining a second response differing from the first response; and processing the first and second responses to form a focused image of the substrate and template alignment marks on a common plane, with the focused image indicating the relative position of the substrate and the template.

摘要翻译： 本发明包括一种确定基板与其间隔开的模板的相对位置的方法，该基板具有设置在其上的基板对准标记，该模板具有设置在其上的模板对准标记，该方法包括：将第一和第二通量 照亮基板和模板对准标记，其中基板和模板对准标记响应于限定第一响应的第一光束，并且响应于限定与第一响应不同的第二响应的第二光束响应; 以及处理第一和第二响应以在公共平面上形成基板和模板对准标记的聚焦图像，聚焦图像指示基板和模板的相对位置。