公开(公告)号：US10239982B2

公开(公告)日：2019-03-26

申请号：US15439604

申请日：2017-02-22

申请人： Board of Regents The University of Texas System

发明人： Carlton Grant Willson ,  Gregory Blachut ,  Michael Maher ,  Yusuke Asano ,  Christopher John Ellison

IPC分类号： C08F297/00 ,  B32B5/16 ,  B05D3/10 ,  B05D7/26 ,  B05D7/00 ,  C09D153/00 ,  G03F7/00 ,  H01L21/027 ,  B82Y40/00

摘要： The present invention relates to a method for the synthesis and utilization of block copolymer can that form sub-10 nm lamella nanostructures. Such methods have many uses including multiple applications in the semiconductor industry including production of templates for nanoimprint lithography.

公开(公告)号：US20170240681A1

公开(公告)日：2017-08-24

申请号：US15439604

申请日：2017-02-22

申请人： Board of Regents The University of Texas System

发明人： Carlton Grant Willson ,  Gregory Blachut ,  Michael Maher ,  Yusuke Asano ,  Christopher John Ellison

IPC分类号： C08F297/00 ,  B05D7/00 ,  H01L21/027 ,  B05D7/26 ,  G03F7/00 ,  C09D153/00 ,  B05D3/10

CPC分类号： C08F297/00 ,  B05D3/108 ,  B05D7/26 ,  B05D7/542 ,  B81C2201/0149 ,  B82Y40/00 ,  C09D153/00 ,  G03F7/0002 ,  H01L21/0271

摘要： The present invention relates to a method for the synthesis and utilization of block copolymer can that form sub-10 nm lamella nanostructures. Such methods have many uses including multiple applications in the semiconductor industry including production of templates for nanoimprint lithography.