-
公开(公告)号：US6052495A
公开(公告)日：2000-04-18
申请号：US944009
申请日：1997-10-01
CPC分类号： G02F1/011 , G02F1/3133 , G02F2001/0155 , G02F2203/055
摘要： The invention provides an optical switch and modulator which uses a closed loop optical resonator. The optical resonator is a dielectric cavity whose primary function is to store optical power. Various structures are possible, and a particularly advantageous one is a ring shaped cavity. The wavelength response at the output port of a ring resonator side coupled to two waveguides is determined by the details of the resonator, and the coupling between the resonator and the waveguides. By coupling to adjacent resonators, the modulator response can be improved over that of a single resonator. One such improvement is in modulator efficiency, which is defined as the ratio of the change in optical intensity at the output, to a change in absorption in the ring waveguides. Absorption is used for switching and modulation without incurring significant optical attenuation. Another improvement involves making the resonance insensitive to small deviations in wavelength or index change. The latter improves fabrication tolerances and compensates for possible drift of the signal wavelength. Collectively, the behavior of multiple coupled resonators yields higher order responses.
摘要翻译： 本发明提供一种使用闭环光谐振器的光开关和调制器。 光谐振器是其主要功能是存储光功率的介电腔。 各种结构是可能的，并且特别有利的是环形腔。 耦合到两个波导的环形谐振器侧的输出端口处的波长响应由谐振器的细节以及谐振器和波导之间的耦合决定。 通过耦合到相邻的谐振器，调制器响应可以比单个谐振器的响应得到改善。 一个这样的改进是调制器效率，其被定义为输出处的光强度的变化与环形波导中的吸收变化的比率。 吸收用于切换和调制，而不会引起显着的光衰减。 另一个改进是使谐振对波长或折射率变化的小偏差不敏感。 后者提高了制造公差，并补偿了信号波长的可能漂移。 总的来说，多个耦合谐振器的行为产生更高阶的响应。
-
公开(公告)号：US07936955B2
公开(公告)日：2011-05-03
申请号：US12780601
申请日：2010-05-14
申请人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
发明人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
IPC分类号： G02B6/26
CPC分类号： G02F1/025 , G02B6/125 , G02B6/136 , G02B2006/12107 , G02B2006/12164 , G02F1/0147 , G02F2203/15
摘要： A waveguide and resonator are formed on a lower cladding of a thermo optic device, each having a formation height that is substantially equal. Thereafter, the formation height of the waveguide is attenuated. In this manner, the aspect ratio as between the waveguide and resonator in an area where the waveguide and resonator front or face one another decreases (in comparison to the prior art) thereby restoring the synchronicity between the waveguide and the grating and allowing higher bandwidth configurations to be used. The waveguide attenuation is achieved by photomasking and etching the waveguide after the resonator and waveguide are formed. In one embodiment the photomasking and etching is performed after deposition of the upper cladding. In another, it is performed before the deposition. Thermo optic devices, thermo optic packages and fiber optic systems having these waveguides are also taught.
摘要翻译： 波导和谐振器形成在热光器件的下包层上，每个具有基本上相等的形成高度。 此后，波导的形成高度被衰减。 以这种方式，波导和谐振器在波导和谐振器前面或彼此面对的区域（与现有技术相比）中的波导和谐振器之间的纵横比，从而恢复波导和光栅之间的同步性并允许更高的带宽配置 要使用的。 在形成谐振器和波导之后，通过光掩模和蚀刻波导来实现波导衰减。 在一个实施例中，在沉积上部包层之后进行光掩模和蚀刻。 另一方面，它是在沉积之前进行的。 还教导了具有这些波导的热光器件，热光封装和光纤系统。
-
公开(公告)号：US07359607B2
公开(公告)日：2008-04-15
申请号：US10929271
申请日：2004-08-30
申请人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
发明人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
IPC分类号： G02B6/10
CPC分类号： G02F1/025 , G02B6/125 , G02B6/136 , G02B2006/12107 , G02B2006/12164 , G02F1/0147 , G02F2203/15
摘要： A waveguide and resonator are formed on a lower cladding of a thermo optic device, each having a formation height that is substantially equal. Thereafter, the formation height of the waveguide is attenuated. In this manner, the aspect ratio as between the waveguide and resonator in an area where the waveguide and resonator front or face one another decreases (in comparison to the prior art) thereby restoring the synchronicity between the waveguide and the grating and allowing higher bandwidth configurations to be used. The waveguide attenuation is achieved by photomasking and etching the waveguide after the resonator and waveguide are formed. In one embodiment the photomasking and etching is performed after deposition of the upper cladding. In another, it is performed before the deposition. Thermo optic devices, thermo optic packages and fiber optic systems having these waveguides are also taught.
摘要翻译： 波导和谐振器形成在热光器件的下包层上，每个具有基本相等的形成高度。 此后，波导的形成高度被衰减。 以这种方式，波导和谐振器在波导和谐振器前面或彼此面对的区域（与现有技术相比）中的波导和谐振器之间的纵横比，从而恢复波导和光栅之间的同步性并允许更高的带宽配置 要使用的。 在形成谐振器和波导之后，通过光掩模和蚀刻波导来实现波导衰减。 在一个实施例中，在沉积上部包层之后进行光掩模和蚀刻。 另一方面，它是在沉积之前进行的。 还教导了具有这些波导的热光器件，热光封装和光纤系统。
-
4.发明授权Diffractive optical element for collimating and redistributing Gaussian input beam 失效用于准直和重新分配高斯输入光束的衍射光学元件
公开(公告)号：US5148317A
公开(公告)日：1992-09-15
申请号：US720150
申请日：1991-06-24
申请人： James S. Foresi
发明人： James S. Foresi
CPC分类号： G02B5/1876 , G02B19/0014 , G02B19/0052 , G02B27/09 , G02B27/0927 , G02B27/0944 , G03H1/08
摘要： An optical element for producing a collimated output beam having a uniform intensity profile from a highly divergent input beam having a Gaussian intensity profile, the optical element consisting of a single convex-plano lens having a diffractive element etched into the plano side of the single lens in accordance with binary optics technology, the diffraction element being configured to complete collimation of the input beam directed at the convex side of the single lens while at the same time redistributing the input beam to produce a uniform intensity output beam.
摘要翻译： 一种光学元件，用于从具有高斯强度分布的高度发散的输入光束产生具有均匀强度分布的准直输出光束，所述光学元件由具有蚀刻到单个透镜的平面侧的衍射元件的单个凸平面透镜 根据二元光学技术，衍射元件被配置为完成指向单透镜的凸侧的输入光束的准直，同时重新分配输入光束以产生均匀的强度输出光束。
-
公开(公告)号：US20100220958A1
公开(公告)日：2010-09-02
申请号：US12780601
申请日：2010-05-14
申请人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
发明人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
CPC分类号： G02F1/025 , G02B6/125 , G02B6/136 , G02B2006/12107 , G02B2006/12164 , G02F1/0147 , G02F2203/15
摘要： A waveguide and resonator are formed on a lower cladding of a thermo optic device, each having a formation height that is substantially equal. Thereafter, the formation height of the waveguide is attenuated. In this manner, the aspect ratio as between the waveguide and resonator in an area where the waveguide and resonator front or face one another decreases (in comparison to the prior art) thereby restoring the synchronicity between the waveguide and the grating and allowing higher bandwidth configurations to be used. The waveguide attenuation is achieved by photomasking and etching the waveguide after the resonator and waveguide are formed. In one embodiment the photomasking and etching is performed after deposition of the upper cladding. In another, it is performed before the deposition. Thermo optic devices, thermo optic packages and fiber optic systems having these waveguides are also taught.
摘要翻译： 波导和谐振器形成在热光器件的下包层上，每个具有基本相等的形成高度。 此后，波导的形成高度被衰减。 以这种方式，波导和谐振器在波导和谐振器前面或彼此面对的区域（与现有技术相比）中的波导和谐振器之间的纵横比，从而恢复波导和光栅之间的同步性并允许更高的带宽配置 要使用的。 在形成谐振器和波导之后，通过光掩模和蚀刻波导来实现波导衰减。 在一个实施例中，在沉积上部包层之后进行光掩模和蚀刻。 另一方面，它是在沉积之前进行的。 还教导了具有这些波导的热光器件，热光封装和光纤系统。
-
6.发明授权
公开(公告)号：US6108464A
公开(公告)日：2000-08-22
申请号：US170937
申请日：1998-10-13
CPC分类号： G02B6/10 , G02B6/12004 , G02B6/122 , G02B6/132 , G02B2006/12169
摘要： Methods of forming polycrystalline semiconductor waveguides include the steps of forming a first cladding layer (e.g., SiO.sub.2) on a substrate (e.g., silicon) and then forming a polycrystalline semiconductor layer (e.g., poly-Si) on the first cladding layer using a direct deposition technique or by annealing amorphous silicon (a-Si) to form a polycrystalline layer, for example. The deposited polycrystalline semiconductor layer can then be polished at a face thereof to have a root-mean-square (RMS) surface roughness of less than about 6 nm so that waveguides patterned therefrom have loss ratings of better than 35 dB/cm. The polished polycrystalline semiconductor layer is then preferably etched in a plasma to form a plurality of polycrystalline strips. A second cladding layer is then formed on the polycrystalline strips to form a plurality of polycrystalline waveguides which provide relatively low-loss paths for optical communication between one or more optoelectronic devices coupled thereto. The annealed amorphous silicon layer or deposited polycrystalline layer can also be hydrogenated by exposing the second cladding layer to a hydrogen containing plasma at a temperature and pressure of about 350.degree. C. and 0.16 mTorr, respectively, and for a duration in a range between about 30 and 60 minutes. This further improves the loss ratings of the waveguides to about 15 dB/cm or less.
摘要翻译： 形成多晶半导体波导的方法包括以下步骤：在衬底（例如，硅）上形成第一覆层（例如SiO 2），然后使用直接形成在第一覆层上的多晶半导体层（例如，多晶硅） 沉积技术或通过退火非晶硅（a-Si）以形成多晶层。 然后，沉积的多晶半导体层可以在其表面进行抛光，以具有小于约6nm的均方根（RMS）表面粗糙度，使得图案化的波导具有优于35dB / cm的损耗等级。 然后优选在等离子体中蚀刻抛光的多晶半导体层以形成多个多晶条。 然后在多晶条上形成第二覆层以形成多个多晶波导，其为耦合到其之间的一个或多个光电器件之间的光通信提供相对低损耗的路径。 退火的非晶硅层或沉积的多晶层也可以通过在约350℃和0.16mTorr的温度和压力下分别将第二包层暴露于含氢等离子体并在约 30和60分钟。 这进一步将波导的损耗等级提高到约15dB / cm以下。
-
7.发明授权Methods of forming polycrystalline semiconductor waveguides for optoelectronic integrated circuits, and devices formed thereby 失效形成用于光电集成电路的多晶半导体波导的方法，以及由此形成的器件
公开(公告)号：US5841931A
公开(公告)日：1998-11-24
申请号：US756812
申请日：1996-11-26
CPC分类号： G02B6/10 , G02B6/12004 , G02B6/122 , G02B6/132 , G02B2006/12169
摘要： Methods of forming polycrystalline semiconductor waveguides include the steps of forming a first cladding layer (e.g., SiO.sub.2) on a substrate (e.g., silicon) and then forming a polycrystalline semiconductor layer (e.g., poly-Si) on the first cladding layer using a direct deposition technique or by annealing amorphous silicon (a-Si) to form a polycrystalline layer, for example. The deposited polycrystalline semiconductor layer can then be polished at a face thereof to have a root-mean-square (RMS) surface roughness of less than about 6 nm so that waveguides patterned therefrom have loss ratings of better than 35 dB/cm. The polished polycrystalline semiconductor layer is then preferably etched in a plasma to form a plurality of polycrystalline strips. A second cladding layer is then formed on the polycrystalline strips to form a plurality of polycrystalline waveguides which provide relatively low-loss paths for optical communication between one or more optoelectronic devices coupled thereto. The annealed amorphous silicon layer or deposited polycrystalline layer can also be hydrogenated by exposing the second cladding layer to a hydrogen containing plasma at a temperature and pressure of about 350.degree. C. and 0.16 mTorr, respectively, and for a duration in a range between about 30 and 60 minutes. This further improves the loss ratings of the waveguides to about 15 dB/cm or less.
摘要翻译： 形成多晶半导体波导的方法包括以下步骤：在衬底（例如，硅）上形成第一覆层（例如SiO 2），然后使用直接形成在第一覆层上的多晶半导体层（例如，多晶硅） 沉积技术或通过退火非晶硅（a-Si）以形成多晶层。 然后，沉积的多晶半导体层可以在其表面进行抛光，以具有小于约6nm的均方根（RMS）表面粗糙度，使得图案化的波导具有优于35dB / cm的损耗等级。 然后优选在等离子体中蚀刻抛光的多晶半导体层以形成多个多晶条。 然后在多晶条上形成第二覆层以形成多个多晶波导，其为耦合到其之间的一个或多个光电器件之间的光通信提供相对低损耗的路径。 退火的非晶硅层或沉积的多晶层也可以通过在约350℃和0.16mTorr的温度和压力下分别将第二包层暴露于含氢等离子体并在约 30和60分钟。 这进一步将波导的损耗等级提高到约15dB / cm以下。
-
公开(公告)号：US08111965B2
公开(公告)日：2012-02-07
申请号：US13099126
申请日：2011-05-02
申请人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
发明人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
IPC分类号： G02B6/10
CPC分类号： G02F1/025 , G02B6/125 , G02B6/136 , G02B2006/12107 , G02B2006/12164 , G02F1/0147 , G02F2203/15
摘要： A waveguide and resonator are formed on a lower cladding of a thermo optic device, each having a formation height that is substantially equal. Thereafter, the formation height of the waveguide is attenuated. In this manner, the aspect ratio as between the waveguide and resonator in an area where the waveguide and resonator front or face one another decreases (in comparison to the prior art) thereby restoring the synchronicity between the waveguide and the grating and allowing higher bandwidth configurations to be used. The waveguide attenuation is achieved by photomasking and etching the waveguide after the resonator and waveguide are formed. In one embodiment the photomasking and etching is performed after deposition of the upper cladding. In another, it is performed before the deposition. Thermo optic devices, thermo optic packages and fiber optic systems having these waveguides are also taught.
摘要翻译： 波导和谐振器形成在热光器件的下包层上，每个具有基本相等的形成高度。 此后，波导的形成高度被衰减。 以这种方式，波导和谐振器在波导和谐振器前面或彼此面对的区域（与现有技术相比）中的波导和谐振器之间的纵横比，从而恢复波导和光栅之间的同步性并允许更高的带宽配置 要使用的。 在形成谐振器和波导之后，通过光掩模和蚀刻波导来实现波导衰减。 在一个实施例中，在沉积上部包层之后进行光掩模和蚀刻。 另一方面，它是在沉积之前进行的。 还教导了具有这些波导的热光器件，热光封装和光纤系统。
-
公开(公告)号：US20110206332A1
公开(公告)日：2011-08-25
申请号：US13099126
申请日：2011-05-02
申请人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtel Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
发明人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtel Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
IPC分类号： G02B6/10
CPC分类号： G02F1/025 , G02B6/125 , G02B6/136 , G02B2006/12107 , G02B2006/12164 , G02F1/0147 , G02F2203/15
摘要： A waveguide and resonator are formed on a lower cladding of a thermo optic device, each having a formation height that is substantially equal. Thereafter, the formation height of the waveguide is attenuated. In this manner, the aspect ratio as between the waveguide and resonator in an area where the waveguide and resonator front or face one another decreases (in comparison to the prior art) thereby restoring the synchronicity between the waveguide and the grating and allowing higher bandwidth configurations to be used. The waveguide attenuation is achieved by photomasking and etching the waveguide after the resonator and waveguide are formed. In one embodiment the photomasking and etching is performed after deposition of the upper cladding. In another, it is performed before the deposition. Thermo optic devices, thermo optic packages and fiber optic systems having these waveguides are also taught.
摘要翻译： 波导和谐振器形成在热光器件的下包层上，每个具有基本相等的形成高度。 此后，波导的形成高度被衰减。 以这种方式，波导和谐振器在波导和谐振器前面或彼此面对的区域（与现有技术相比）中的波导和谐振器之间的纵横比，从而恢复波导和光栅之间的同步性并允许更高的带宽配置 要使用的。 在形成谐振器和波导之后，通过光掩模和蚀刻波导来实现波导衰减。 在一个实施例中，在沉积上部包层之后进行光掩模和蚀刻。 另一方面，它是在沉积之前进行的。 还教导了具有这些波导的热光器件，热光封装和光纤系统。
-
公开(公告)号：US07720341B2
公开(公告)日：2010-05-18
申请号：US12047927
申请日：2008-03-13
申请人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
发明人： Guy T. Blalock , Howard E. Rhodes , Vishnu K. Agarwal , Gurtej Singh Sandhu , James S. Foresi , Jean-Francois Viens , Dale G. Fried
IPC分类号： G02B6/10
CPC分类号： G02F1/025 , G02B6/125 , G02B6/136 , G02B2006/12107 , G02B2006/12164 , G02F1/0147 , G02F2203/15
摘要： A waveguide and resonator are formed on a lower cladding of a thermo optic device, each having a formation height that is substantially equal. Thereafter, the formation height of the waveguide is attenuated. In this manner, the aspect ratio as between the waveguide and resonator in an area where the waveguide and resonator front or face one another decreases (in comparison to the prior art) thereby restoring the synchronicity between the waveguide and the grating and allowing higher bandwidth configurations to be used. The waveguide attenuation is achieved by photomasking and etching the waveguide after the resonator and waveguide are formed. In one embodiment the photomasking and etching is performed after deposition of the upper cladding. In another, it is performed before the deposition. Thermo optic devices, thermo optic packages and fiber optic systems having these waveguides are also taught.
摘要翻译： 波导和谐振器形成在热光器件的下包层上，每个具有基本相等的形成高度。 此后，波导的形成高度被衰减。 以这种方式，波导和谐振器在波导和谐振器前面或彼此面对的区域（与现有技术相比）中的波导和谐振器之间的纵横比，从而恢复波导和光栅之间的同步性并允许更高的带宽配置 要使用的。 在形成谐振器和波导之后，通过光掩模和蚀刻波导来实现波导衰减。 在一个实施例中，在沉积上部包层之后进行光掩模和蚀刻。 另一方面，它是在沉积之前进行的。 还教导了具有这些波导的热光器件，热光封装和光纤系统。
-
-
-
-
-
-
-
-
-
搜索结果
14 条记录 (耗时 0.02 秒)
