公开(公告)号：US10325795B2

公开(公告)日：2019-06-18

申请号：US15849002

申请日：2017-12-20

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo T. Moura

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US20220172972A1

公开(公告)日：2022-06-02

申请号：US17544844

申请日：2021-12-07

Applicant: Brooks Automation, Inc.

Inventor： Robert T. CAVENEY ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo Moura

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US10600665B2

公开(公告)日：2020-03-24

申请号：US16444225

申请日：2019-06-18

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo T. Moura

IPC: H01L21/00 ,  H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US09852935B2

公开(公告)日：2017-12-26

申请号：US14988256

申请日：2016-01-05

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo T. Moura

IPC: G06F7/00 ,  H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

CPC classification number: H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US11195738B2

公开(公告)日：2021-12-07

申请号：US16825663

申请日：2020-03-20

Applicant: Brooks Automation, Inc.

Inventor： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo Moura

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US09230841B2

公开(公告)日：2016-01-05

申请号：US14579067

申请日：2014-12-22

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Robert T. Caveney ,  Jayaraman Krishnasamy ,  Mitchell Drew ,  Jairo T. Moura

IPC: G06F7/00 ,  H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

CPC classification number: H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

Abstract translation: 一种基板处理装置，包括框架，连接到框架的第一SCARA臂，包括端部执行器，构造成沿着第一径向轴线延伸和缩回; 连接到框架的第二SCARA臂，包括端部执行器，构造成沿着第二径向轴线延伸和缩回，SCARA臂具有共同的肩部旋转轴线; 并且耦合到SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且绕着共同的肩部旋转轴线旋转每个SCARA臂，其中第一径向轴线相对于第二径向轴线成角度，并且端部 相应臂的效应器与相应的径向轴线对准，其中每个末端执行器构造成保持至少一个基板，并且末端执行器位于公共转移平面上。

公开(公告)号：US20150110584A1

公开(公告)日：2015-04-23

申请号：US14579067

申请日：2014-12-22

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Robert T. Caveney ,  Jayaraman Krishnasamy ,  Mitchell Drew ,  Jairo T. Moura

IPC: H01L21/677 ,  B25J9/04 ,  B25J18/04 ,  B25J11/00

CPC classification number: H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

Abstract translation: 一种基板处理装置，包括框架，连接到框架的第一SCARA臂，包括端部执行器，构造成沿着第一径向轴线延伸和缩回; 连接到框架的第二SCARA臂，包括端部执行器，构造成沿着第二径向轴线延伸和缩回，SCARA臂具有共同的肩部旋转轴线; 并且耦合到SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且绕着共同的肩部旋转轴线旋转每个SCARA臂，其中第一径向轴线相对于第二径向轴线成角度，并且端部 相应臂的效应器与相应的径向轴线对准，其中每个末端执行器构造成保持至少一个基板，并且末端执行器位于公共转移平面上。