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公开(公告)号：US20200256919A1
公开(公告)日：2020-08-13
申请号：US16793623
申请日：2020-02-18
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. MOURA , Nathan SPIKER , Aaron GAWLIK , Jayaraman KRISHNASAMY
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
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公开(公告)号：US20220172973A1
公开(公告)日：2022-06-02
申请号：US17651183
申请日：2022-02-15
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. MOURA , Robert T. CAVENEY , Bing ` YIN , Nathan SPIKER , Vincent W. TSANG
IPC: H01L21/677 , H01L21/68 , B25J9/00 , B25J11/00 , B25J9/10 , H01L21/67 , B25J9/12 , B25J9/16 , G05B19/418
Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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公开(公告)号：US20150168496A1
公开(公告)日：2015-06-18
申请号：US14540077
申请日：2014-11-13
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. MOURA , Nathan SPIKER , Aaron GAWLIK , Jayaraman KRISHNASAMY
CPC classification number: G01R31/34 , G01L3/22 , H02P6/10 , H02P23/0031 , H02P23/12 , H02P25/098
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
Abstract translation: 可变磁阻电动机负载映射装置包括框架，布置在框架上的接口，其被配置为安装可变磁阻电动机，安装到框架并耦合到可变磁阻电动机的静态负载单元，以及可控制地耦合到静态负载的控制器 所述控制器被配置为选择所述可变磁阻电动机的至少一个电动机相位，激励所述至少一个电动机相位，以及从至少所述静态负载传感器接收电动机操作数据，用于映射和产生阵列 的电机运行数据查找表。
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公开(公告)号：US20190164800A1
公开(公告)日：2019-05-30
申请号：US16197087
申请日：2018-11-20
Applicant: BROOKS AUTOMATION, INC.
Inventor： Bing YIN , Jairo T. MOURA , Vincent TSANG , Aaron GAWLIK , Nathan SPIKER
IPC: H01L21/68 , H01L21/687
Abstract: A Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
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Patent Agency Ranking
公开(公告)号：US20180286728A1
公开(公告)日：2018-10-04
申请号：US15880387
申请日：2018-01-25
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. MOURA , Robert T. CAVENEY , Bing ` YIN , Nathan SPIKER , Vincent W. TSANG
IPC: H01L21/677 , H01L21/67 , G05B19/418 , B25J9/12 , B25J9/16
Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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公开(公告)号：US20220155372A1
公开(公告)日：2022-05-19
申请号：US17534179
申请日：2021-11-23
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. Moura , Nathan SPIKER , Aaron GAWLIK , Jayaraman KRISHNASAMY
Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
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公开(公告)号：US20210305076A1
公开(公告)日：2021-09-30
申请号：US17229495
申请日：2021-04-13
Applicant: BROOKS AUTOMATION, INC.
Inventor： Bing YIN , Jairo MOURA , Vincent TSANG , Aaron GAWLIK , Nathan SPIKER
IPC: H01L21/68 , H01L21/687
Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
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公开(公告)号：US20200273734A1
公开(公告)日：2020-08-27
申请号：US16872864
申请日：2020-05-12
Applicant: Brooks Automation, Inc.
Inventor： Jairo T. MOURA , Robert T. CAVENEY , Bing YIN , Nathan SPIKER , Vincent W. TSANG
IPC: H01L21/677 , H01L21/68 , B25J9/00 , B25J11/00 , B25J9/10 , H01L21/67 , B25J9/12 , B25J9/16 , G05B19/418
Abstract: A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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公开(公告)号：US20170018446A1
公开(公告)日：2017-01-19
申请号：US15209497
申请日：2016-07-13
Applicant: BROOKS AUTOMATION, INC.
Inventor： Bing YIN , Jairo T. MOURA , Vincent TSANG , Aaron GAWLIK , Nathan SPIKER
IPC: H01L21/677 , H01L21/67 , H01L21/68 , H01L21/687
CPC classification number: H01L21/68 , H01L21/68707
Abstract: Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
Abstract translation: 基板处理装置，包括具有包括端部执行器的输送臂的晶片输送装置，与基板输送装置成一体的臂姿势确定性特征，并且被设置为使得基板处理装置的静态检测传感器至少检测至少一个边缘 在运输臂的径向运动中一个手臂姿势确定性特征，以及控制器，其配置成使得边缘的检测影响识别运输臂在飞行中的至少热膨胀方差的比例因子的确定，并且包括 运动效应解算器，被配置为从飞行中的边缘的检测中确定所确定的比例因子与运输臂的每个不同链路相应的每个不同离散方差之间的离散关系，至少确定运输臂的热膨胀方差 在飞行中
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